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Class Information
Number: 118/729
Name: Coating apparatus > Gas or vapor deposition > Work support > Moving work support
Description: Apparatus wherein the holding means for the base is capable of motion.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618516 |
Method and apparatus to confine plasma and to enhance flow conductance |
Nov. 17, 2009 |
| 7597531 |
Method of controlling mover device |
Oct. 6, 2009 |
| 7594479 |
Plasma CVD device and discharge electrode |
Sep. 29, 2009 |
| 7582167 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Sep. 1, 2009 |
| 7582186 |
Method and apparatus for an improved focus ring in a plasma processing system |
Sep. 1, 2009 |
| 7572340 |
High resolution substrate holder leveling device and method |
Aug. 11, 2009 |
| 7572339 |
Surface treatment system and method thereof |
Aug. 11, 2009 |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
Jun. 30, 2009 |
| 7544957 |
Non-uniform ion implantation |
Jun. 9, 2009 |
| 7537673 |
Plasma processing apparatus |
May. 26, 2009 |
| 7534301 |
RF grounding of cathode in process chamber |
May. 19, 2009 |
| 7527694 |
Substrate gripping apparatus |
May. 5, 2009 |
| 7516833 |
Multi-station workpiece processors, methods of processing semiconductor workpieces within multi-station workpiece processors, and methods of moving semiconductor workpieces within multi-statio |
Apr. 14, 2009 |
| 7513953 |
Continuous system for depositing films onto plastic bottles and method |
Apr. 7, 2009 |
| 7513954 |
Plasma processing apparatus and substrate mounting table employed therein |
Apr. 7, 2009 |
| 7497912 |
Substrate processing apparatus |
Mar. 3, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7485190 |
Apparatus for heating a substrate in a variable temperature process using a fixed temperature chuck |
Feb. 3, 2009 |
| 7482244 |
Method of preventing a peeling issue of a high stressed thin film |
Jan. 27, 2009 |
| 7470919 |
Substrate support assembly with thermal isolating plate |
Dec. 30, 2008 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7462011 |
Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program |
Dec. 9, 2008 |
| 7462244 |
Device and method for vacuum film formation |
Dec. 9, 2008 |
| 7455735 |
Width adjustable substrate support for plasma processing |
Nov. 25, 2008 |
| 7449071 |
Wafer holder with peripheral lift ring |
Nov. 11, 2008 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7429718 |
Heating and cooling of substrate support |
Sep. 30, 2008 |
| 7422636 |
Plasma enhanced atomic layer deposition system having reduced contamination |
Sep. 9, 2008 |
| 7422637 |
Processing chamber configured for uniform gas flow |
Sep. 9, 2008 |
| 7419551 |
Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another |
Sep. 2, 2008 |
| 7413612 |
In situ substrate holder leveling method and apparatus |
Aug. 19, 2008 |
| 7413628 |
Substrate treatment method and substrate treatment apparatus |
Aug. 19, 2008 |
| 7402778 |
Oven for controlled heating of compounds at varying temperatures |
Jul. 22, 2008 |
| 7393433 |
Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof |
Jul. 1, 2008 |
| 7393418 |
Susceptor |
Jul. 1, 2008 |
| 7393207 |
Wafer support tool for heat treatment and heat treatment apparatus |
Jul. 1, 2008 |
| 7387686 |
Film formation apparatus |
Jun. 17, 2008 |
| 7371287 |
Substrate handling system |
May. 13, 2008 |
| 7371998 |
Thermal wafer processor |
May. 13, 2008 |
| 7351293 |
Method and device for rotating a wafer |
Apr. 1, 2008 |
| 7347900 |
Chemical vapor deposition apparatus and method |
Mar. 25, 2008 |
| 7335394 |
Substrate supporting frame |
Feb. 26, 2008 |
| 7331307 |
Thermally sprayed member, electrode and plasma processing apparatus using the electrode |
Feb. 19, 2008 |
| 7326303 |
Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) |
Feb. 5, 2008 |
| 7317172 |
Bake system |
Jan. 8, 2008 |
| 7299104 |
Substrate processing apparatus and substrate transferring method |
Nov. 20, 2007 |
| 7294209 |
Apparatus and method for depositing material onto a substrate using a roll-to-roll mask |
Nov. 13, 2007 |
| 7275553 |
Liquid processing apparatus and liquid processing method |
Oct. 2, 2007 |
| 7276125 |
Barrel type susceptor |
Oct. 2, 2007 |
| 7274006 |
Heater |
Sep. 25, 2007 |
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