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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6592679 |
Clean method for vacuum holding of substrates |
Jul. 15, 2003 |
| 6593548 |
Heating element CVD system |
Jul. 15, 2003 |
| 6589351 |
Electron beam physical vapor deposition apparatus and crucible therefor |
Jul. 8, 2003 |
| 6589352 |
Self aligning non contact shadow ring process kit |
Jul. 8, 2003 |
| 6590186 |
Heat treatment apparatus and method |
Jul. 8, 2003 |
| 6586886 |
Gas distribution plate electrode for a plasma reactor |
Jul. 1, 2003 |
| 6581275 |
Fabricating an electrostatic chuck having plasma resistant gas conduits |
Jun. 24, 2003 |
| 6579373 |
Substrate processing apparatus and substrate processing method |
Jun. 17, 2003 |
| 6576064 |
Support apparatus for semiconductor wafer processing |
Jun. 10, 2003 |
| 6577923 |
Apparatus and method for robotic alignment of substrates |
Jun. 10, 2003 |
| 6572708 |
Semiconductor wafer support lift-pin assembly |
Jun. 3, 2003 |
| 6565662 |
Vacuum processing apparatus for semiconductor process |
May. 20, 2003 |
| 6558158 |
Ceramic heater |
May. 6, 2003 |
| 6558505 |
Method and apparatus for processing semiconductor substrates |
May. 6, 2003 |
| 6558508 |
Processing apparatus having dielectric plates linked together by electrostatic force |
May. 6, 2003 |
| 6554906 |
Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same |
Apr. 29, 2003 |
| 6554907 |
Susceptor with internal support |
Apr. 29, 2003 |
| 6554954 |
Conductive collar surrounding semiconductor workpiece in plasma chamber |
Apr. 29, 2003 |
| 6555276 |
Substrate coating and semiconductor processing method of improving uniformity of liquid deposition |
Apr. 29, 2003 |
| 6551404 |
Apparatus for treating a wafer |
Apr. 22, 2003 |
| 6551406 |
Apparatus for growing thin films |
Apr. 22, 2003 |
| 6551448 |
Heat processing apparatus of substrate |
Apr. 22, 2003 |
| 6547921 |
Method and apparatus for processing semiconductor substrates |
Apr. 15, 2003 |
| 6548130 |
Fiber coating method |
Apr. 15, 2003 |
| 6544340 |
Heater with detachable ceramic top plate |
Apr. 8, 2003 |
| 6544341 |
System for fabricating a device on a substrate with a process gas |
Apr. 8, 2003 |
| 6544379 |
Method of holding substrate and substrate holding system |
Apr. 8, 2003 |
| 6544380 |
Plasma treatment method and apparatus |
Apr. 8, 2003 |
| 6540014 |
Workpiece chuck |
Apr. 1, 2003 |
| 6537011 |
Method and apparatus for transferring and supporting a substrate |
Mar. 25, 2003 |
| 6534748 |
Semiconductor purification apparatus and method |
Mar. 18, 2003 |
| 6534749 |
Thermal process apparatus for measuring accurate temperature by a radiation thermometer |
Mar. 18, 2003 |
| 6532642 |
Method of making a silicon carbide rail for use in a semiconductor wafer carrier |
Mar. 18, 2003 |
| 6532796 |
Method of substrate temperature control and method of assessing substrate temperature controllability |
Mar. 18, 2003 |
| 6533868 |
Deposition apparatus |
Mar. 18, 2003 |
| 6533869 |
Apparatus and method for making free standing diamond |
Mar. 18, 2003 |
| 6530992 |
Method of forming a film in a chamber and positioning a substitute in a chamber |
Mar. 11, 2003 |
| 6530994 |
Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing |
Mar. 11, 2003 |
| 6527927 |
Vacuum treatment system |
Mar. 4, 2003 |
| 6528364 |
Methods to form electronic devices and methods to form a material over a semiconductive substrate |
Mar. 4, 2003 |
| 6523563 |
Modular gas panel closet for a semiconductor wafer processing platform |
Feb. 25, 2003 |
| 6524428 |
Method of holding substrate and substrate holding system |
Feb. 25, 2003 |
| 6521046 |
Chamber material made of Al alloy and heater block |
Feb. 18, 2003 |
| 6521292 |
Substrate support including purge ring having inner edge aligned to wafer edge |
Feb. 18, 2003 |
| 6514376 |
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
Feb. 4, 2003 |
| 6514378 |
Method for improving uniformity and reducing etch rate variation of etching polysilicon |
Feb. 4, 2003 |
| 6512207 |
Apparatus and method for the treatment of substrates |
Jan. 28, 2003 |
| 6508883 |
Throughput enhancement for single wafer reactor |
Jan. 21, 2003 |
| 6508884 |
Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus |
Jan. 21, 2003 |
| 6508885 |
Edge sealing structure for substrate in low-pressure processing environment |
Jan. 21, 2003 |
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