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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6676759 |
Wafer support device in semiconductor manufacturing device |
Jan. 13, 2004 |
| 6676760 |
Process chamber having multiple gas distributors and method |
Jan. 13, 2004 |
| 6676761 |
Method and apparatus for dechucking a substrate |
Jan. 13, 2004 |
| 6676804 |
Method and apparatus for plasma processing |
Jan. 13, 2004 |
| 6676805 |
Method of holding substrate and substrate holding system |
Jan. 13, 2004 |
| 6676812 |
Alignment mark shielding ring without arcing defect and method for using |
Jan. 13, 2004 |
| 6673198 |
Semiconductor processing equipment having improved process drift control |
Jan. 6, 2004 |
| 6669253 |
Wafer boat and boat holder |
Dec. 30, 2003 |
| 6669783 |
High temperature electrostatic chuck |
Dec. 30, 2003 |
| 6669784 |
Gas processing apparatus for object to be processed |
Dec. 30, 2003 |
| 6666921 |
Chemical vapor deposition apparatus and chemical vapor deposition method |
Dec. 23, 2003 |
| 6666949 |
Uniform temperature workpiece holder |
Dec. 23, 2003 |
| 6663714 |
CVD apparatus |
Dec. 16, 2003 |
| 6660097 |
Single-substrate-processing apparatus for semiconductor process |
Dec. 9, 2003 |
| 6660330 |
Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support |
Dec. 9, 2003 |
| 6656283 |
Channelled chamber surface for a semiconductor substrate processing chamber |
Dec. 2, 2003 |
| 6656286 |
Pedestal with a thermally controlled platen |
Dec. 2, 2003 |
| 6652655 |
Method to isolate multi zone heater from atmosphere |
Nov. 25, 2003 |
| 6652656 |
Semiconductor wafer holding assembly |
Nov. 25, 2003 |
| 6652713 |
Pedestal with integral shield |
Nov. 25, 2003 |
| 6648976 |
Apparatus and method for plasma processing |
Nov. 18, 2003 |
| 6648977 |
Method of producing near-net shape free standing articles by chemical vapor deposition |
Nov. 18, 2003 |
| 6646233 |
Wafer stage for wafer processing apparatus and wafer processing method |
Nov. 11, 2003 |
| 6644964 |
Substrate processing apparatus and substrate processing method |
Nov. 11, 2003 |
| 6644965 |
Substrate processing apparatus and substrate processing method |
Nov. 11, 2003 |
| 6645303 |
Heater/lift assembly for high temperature processing chamber |
Nov. 11, 2003 |
| 6645304 |
Susceptors for semiconductor-producing apparatuses |
Nov. 11, 2003 |
| 6645344 |
Universal backplane assembly and methods |
Nov. 11, 2003 |
| 6645871 |
Method of holding substrate and substrate holding system |
Nov. 11, 2003 |
| 6634314 |
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors |
Oct. 21, 2003 |
| 6635580 |
Apparatus and method for controlling wafer temperature in a plasma etcher |
Oct. 21, 2003 |
| 6631692 |
Plasma CVD film-forming device |
Oct. 14, 2003 |
| 6632325 |
Article for use in a semiconductor processing chamber and method of fabricating same |
Oct. 14, 2003 |
| 6630030 |
Method and apparatus for growing thin films |
Oct. 7, 2003 |
| 6623563 |
Susceptor with bi-metal effect |
Sep. 23, 2003 |
| 6623597 |
Focus ring and apparatus for processing a semiconductor wafer comprising the same |
Sep. 23, 2003 |
| 6620252 |
Metallization module for cathode-ray tube (CRT) applications |
Sep. 16, 2003 |
| 6620253 |
Engagement mechanism for semiconductor substrate deposition process kit hardware |
Sep. 16, 2003 |
| 6620736 |
Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing |
Sep. 16, 2003 |
| 6616767 |
High temperature ceramic heater assembly with RF capability |
Sep. 9, 2003 |
| 6610170 |
Method of holding substrate and substrate holding system |
Aug. 26, 2003 |
| 6610171 |
Method of holding substrate and substrate holding system |
Aug. 26, 2003 |
| 6608287 |
Process chamber with rectangular temperature compensation ring |
Aug. 19, 2003 |
| 6605177 |
Substrate support with gas feed-through and method |
Aug. 12, 2003 |
| 6602384 |
Plasma processing apparatus |
Aug. 5, 2003 |
| 6599367 |
Vacuum processing apparatus |
Jul. 29, 2003 |
| 6595506 |
Apparatus and method for reduced particulate generation during workpiece handling |
Jul. 22, 2003 |
| 6596086 |
Apparatus for thin film growth |
Jul. 22, 2003 |
| 6592673 |
Apparatus and method for detecting a presence or position of a substrate |
Jul. 15, 2003 |
| 6592675 |
Rotating susceptor |
Jul. 15, 2003 |
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