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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6797068 |
Film forming unit |
Sep. 28, 2004 |
| 6793734 |
Heating furnace and semiconductor wafer-holding jig assembly and process of manufacturing semiconductor devices |
Sep. 21, 2004 |
| 6793767 |
Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage |
Sep. 21, 2004 |
| 6786969 |
Method and apparatus for producing single crystal, substrate for growing single crystal and method for heating single crystal |
Sep. 7, 2004 |
| 6786998 |
Wafer temperature control apparatus and method |
Sep. 7, 2004 |
| 6783596 |
Wafer handling device |
Aug. 31, 2004 |
| 6783598 |
Moisture barrier sealing of fiber optic coils |
Aug. 31, 2004 |
| 6783630 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling |
Aug. 31, 2004 |
| 6780251 |
Substrate processing apparatus and method for fabricating semiconductor device |
Aug. 24, 2004 |
| 6780787 |
Low contamination components for semiconductor processing apparatus and methods for making components |
Aug. 24, 2004 |
| 6776849 |
Wafer holder with peripheral lift ring |
Aug. 17, 2004 |
| 6776850 |
Preventative maintenance aided tool for CVD chamber |
Aug. 17, 2004 |
| 6776874 |
Processing method and apparatus for removing oxide film |
Aug. 17, 2004 |
| 6776875 |
Semiconductor substrate support assembly having lobed o-rings therein |
Aug. 17, 2004 |
| 6772710 |
Plasma enhanced chemical vapor deposition apparatus |
Aug. 10, 2004 |
| 6772827 |
Suspended gas distribution manifold for plasma chamber |
Aug. 10, 2004 |
| 6773562 |
Shadow frame for substrate processing |
Aug. 10, 2004 |
| 6774376 |
Wafer holding pin |
Aug. 10, 2004 |
| 6770144 |
Multideposition SACVD reactor |
Aug. 3, 2004 |
| 6770146 |
Method and system for rotating a semiconductor wafer in processing chambers |
Aug. 3, 2004 |
| 6767407 |
Auto-centering device for mechanical clamp |
Jul. 27, 2004 |
| 6767429 |
Vacuum processing apparatus |
Jul. 27, 2004 |
| 6758909 |
Gas port sealing for CVD/CVI furnace hearth plates |
Jul. 6, 2004 |
| 6759253 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units |
Jul. 6, 2004 |
| 6752625 |
Method and apparatus device for the heat treatment of substrates |
Jun. 22, 2004 |
| 6753507 |
Wafer heating apparatus |
Jun. 22, 2004 |
| 6746540 |
Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same |
Jun. 8, 2004 |
| 6740167 |
Device for mounting a substrate and method for producing an insert for a susceptor |
May. 25, 2004 |
| 6740367 |
Plasma CVD film-forming device |
May. 25, 2004 |
| 6736901 |
Vertical chemical vapor deposition system |
May. 18, 2004 |
| 6733624 |
Apparatus for holding an object to be processed |
May. 11, 2004 |
| 6733829 |
Anti-binding deposition ring |
May. 11, 2004 |
| 6730175 |
Ceramic substrate support |
May. 4, 2004 |
| 6726799 |
Plasma etching apparatus with focus ring and plasma etching method |
Apr. 27, 2004 |
| 6726805 |
Pedestal with integral shield |
Apr. 27, 2004 |
| 6723202 |
Worktable device and plasma processing apparatus for semiconductor process |
Apr. 20, 2004 |
| 6723214 |
Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system |
Apr. 20, 2004 |
| 6723437 |
Semiconductor processing component having low surface contaminant concentration |
Apr. 20, 2004 |
| 6719849 |
Single-substrate-processing apparatus for semiconductor process |
Apr. 13, 2004 |
| 6716027 |
Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
Apr. 6, 2004 |
| 6716287 |
Processing chamber with flow-restricting ring |
Apr. 6, 2004 |
| 6716304 |
Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder |
Apr. 6, 2004 |
| 6712909 |
Substrate processing apparatus and method for manufacturing semiconductor device |
Mar. 30, 2004 |
| 6709267 |
Substrate holder with deep annular groove to prevent edge heat loss |
Mar. 23, 2004 |
| 6695921 |
Hoop support for semiconductor wafer |
Feb. 24, 2004 |
| 6692575 |
Apparatus for supporting a substrate in a reaction chamber |
Feb. 17, 2004 |
| 6692576 |
Wafer support system |
Feb. 17, 2004 |
| 6689264 |
Semiconductor wafer clamp retainer |
Feb. 10, 2004 |
| 6682603 |
Substrate support with extended radio frequency electrode upper surface |
Jan. 27, 2004 |
| 6682627 |
Process chamber having a corrosion-resistant wall and method |
Jan. 27, 2004 |
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