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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7048802 |
CVD reactor with graphite-foam insulated, tubular susceptor |
May. 23, 2006 |
| 7045014 |
Substrate support assembly |
May. 16, 2006 |
| 7045045 |
Workpiece holder for processing apparatus, and processing apparatus using the same |
May. 16, 2006 |
| 7041939 |
Thermal processing apparatus and thermal processing method |
May. 9, 2006 |
| 7033443 |
Gas-cooled clamp for RTP |
Apr. 25, 2006 |
| 7033444 |
Plasma processing apparatus, and electrode structure and table structure of processing apparatus |
Apr. 25, 2006 |
| 7033445 |
Gridded susceptor |
Apr. 25, 2006 |
| RE39064 |
Electronic device manufacturing apparatus and method for manufacturing electronic device |
Apr. 18, 2006 |
| 7025858 |
Apparatus for supporting wafer in semiconductor process |
Apr. 11, 2006 |
| 7022192 |
Semiconductor wafer susceptor |
Apr. 4, 2006 |
| 7024105 |
Substrate heater assembly |
Apr. 4, 2006 |
| 7017652 |
Method and apparatus for transferring heat from a substrate to a chuck |
Mar. 28, 2006 |
| 7018479 |
Rotating semiconductor processing apparatus |
Mar. 28, 2006 |
| 7018480 |
Manufacturing method and apparatus of fiber reinforced composite member |
Mar. 28, 2006 |
| 7019268 |
Wafer processing apparatus and method of use |
Mar. 28, 2006 |
| 7011712 |
Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof |
Mar. 14, 2006 |
| 7001482 |
Method and apparatus for improved focus ring |
Feb. 21, 2006 |
| 6997993 |
Susceptor supporting construction |
Feb. 14, 2006 |
| 6994544 |
Wafer scale thermal stress fixture and method |
Feb. 7, 2006 |
| RE38937 |
Susceptor for vapor-phase growth apparatus |
Jan. 24, 2006 |
| 6979369 |
Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof |
Dec. 27, 2005 |
| 6979659 |
Silicon fixture supporting silicon wafers during high temperature processing |
Dec. 27, 2005 |
| 6972071 |
High-speed symmetrical plasma treatment system |
Dec. 6, 2005 |
| 6965115 |
Airtight processing apparatus, airtight processing method, and electron beam processing apparatus |
Nov. 15, 2005 |
| 6960263 |
Shadow frame with cross beam for semiconductor equipment |
Nov. 1, 2005 |
| 6957690 |
Apparatus for thermal treatment of substrates |
Oct. 25, 2005 |
| 6958097 |
Device for holding and vacuum-sealing a container having an opening |
Oct. 25, 2005 |
| 6958098 |
Semiconductor wafer support lift-pin assembly |
Oct. 25, 2005 |
| 6958175 |
Film forming method and film forming device |
Oct. 25, 2005 |
| 6955720 |
Plasma deposition of spin chucks to reduce contamination of Silicon wafers |
Oct. 18, 2005 |
| 6955741 |
Semiconductor-processing reaction chamber |
Oct. 18, 2005 |
| 6951587 |
Ceramic heater system and substrate processing apparatus having the same installed therein |
Oct. 4, 2005 |
| 6942929 |
Process chamber having component with yttrium-aluminum coating |
Sep. 13, 2005 |
| 6935466 |
Lift pin alignment and operation methods and apparatus |
Aug. 30, 2005 |
| 6932871 |
Multi-station deposition apparatus and method |
Aug. 23, 2005 |
| 6932872 |
Heating apparatus using induction heating |
Aug. 23, 2005 |
| 6932873 |
Managing work-piece deflection |
Aug. 23, 2005 |
| 6934606 |
Automatic calibration of a wafer-handling robot |
Aug. 23, 2005 |
| 6929712 |
Plasma processing apparatus capable of evaluating process performance |
Aug. 16, 2005 |
| 6926802 |
Exhaust ring of dry etching device |
Aug. 9, 2005 |
| 6926926 |
Silicon carbide deposited by high density plasma chemical-vapor deposition with bias |
Aug. 9, 2005 |
| 6924462 |
Pedestal for flat panel display applications |
Aug. 2, 2005 |
| 6921437 |
Gas distribution system |
Jul. 26, 2005 |
| 6921457 |
Semiconductor manufacturing apparatus, and positioning jig used for same |
Jul. 26, 2005 |
| 6919538 |
Method for thermally treating substrates |
Jul. 19, 2005 |
| 6919569 |
Radiation detector and method of manufacture thereof |
Jul. 19, 2005 |
| 6917755 |
Substrate support |
Jul. 12, 2005 |
| 6913670 |
Substrate support having barrier capable of detecting fluid leakage |
Jul. 5, 2005 |
| 6910441 |
Pressure regulating system of plasma processing equipment |
Jun. 28, 2005 |
| 6907841 |
Apparatus and method for synthesizing spherical diamond powder by using chemical vapor deposition method |
Jun. 21, 2005 |
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