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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5451261 |
Metal film deposition apparatus and metal film deposition method |
Sep. 19, 1995 |
| 5449411 |
Microwave plasma processing apparatus |
Sep. 12, 1995 |
| 5449444 |
Method and apparatus for forming a film by sputtering process |
Sep. 12, 1995 |
| 5447570 |
Purge gas in wafer coating area selection |
Sep. 5, 1995 |
| 5447595 |
Electrodes for plasma etching apparatus and plasma etching apparatus using the same |
Sep. 5, 1995 |
| 5445677 |
Apparatus for manufacturing semiconductor and method of manufacturing semiconductor |
Aug. 29, 1995 |
| 5443648 |
Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate |
Aug. 22, 1995 |
| 5443649 |
Silicon carbide carrier for wafer processing in vertical furnaces |
Aug. 22, 1995 |
| 5441568 |
Exhaust baffle for uniform gas flow pattern |
Aug. 15, 1995 |
| 5439523 |
Device for suppressing particle splash onto a semiconductor wafer |
Aug. 8, 1995 |
| 5439524 |
Plasma processing apparatus |
Aug. 8, 1995 |
| 5439715 |
Process and apparatus for microwave plasma chemical vapor deposition |
Aug. 8, 1995 |
| 5437757 |
Clamp ring for domed pedestal in wafer processing chamber |
Aug. 1, 1995 |
| 5435849 |
Apparatus for plasma deposition |
Jul. 25, 1995 |
| 5436721 |
Wafer tilt gauge |
Jul. 25, 1995 |
| 5431737 |
Interchangeable CVD chuck surface |
Jul. 11, 1995 |
| 5421401 |
Compound clamp ring for semiconductor wafers |
Jun. 6, 1995 |
| 5421889 |
Method and apparatus for inverting samples in a process |
Jun. 6, 1995 |
| 5421894 |
Power loss recovery for wafer heater |
Jun. 6, 1995 |
| 5419798 |
Suppression of graphite formation during laser etching of diamond |
May. 30, 1995 |
| 5407486 |
CVD apparatus |
Apr. 18, 1995 |
| 5407487 |
Method and apparatus for producing nickel shell molds |
Apr. 18, 1995 |
| 5403401 |
Substrate carrier |
Apr. 4, 1995 |
| 5401316 |
Method and apparatus for hydrophobic treatment |
Mar. 28, 1995 |
| 5395452 |
Apparatus made of silica for semiconductor device fabrication |
Mar. 7, 1995 |
| 5393349 |
Semiconductor wafer processing apparatus |
Feb. 28, 1995 |
| 5391229 |
Apparatus for chemical vapor deposition of diamond including graphite substrate holders |
Feb. 21, 1995 |
| 5391231 |
Holding arrangement for a planar workpiece and at least one such holding arrangement |
Feb. 21, 1995 |
| 5389197 |
Method of and apparatus for plasma processing of wafer |
Feb. 14, 1995 |
| 5383971 |
Differential pressure CVD chuck |
Jan. 24, 1995 |
| 5384008 |
Process and apparatus for full wafer deposition |
Jan. 24, 1995 |
| 5382311 |
Stage having electrostatic chuck and plasma processing apparatus using same |
Jan. 17, 1995 |
| 5380396 |
Valve and semiconductor fabricating equipment using the same |
Jan. 10, 1995 |
| 5376180 |
Apparatus for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus |
Dec. 27, 1994 |
| 5374314 |
Methods and apparatus for externally treating a container with application of internal bias gas |
Dec. 20, 1994 |
| 5372649 |
Apparatus for weighting a diffusion furnace cantilever |
Dec. 13, 1994 |
| 5370709 |
Semiconductor wafer processing apparatus having a Bernoulli chuck |
Dec. 6, 1994 |
| 5370739 |
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD |
Dec. 6, 1994 |
| 5368888 |
Apparatus and method for gas phase coating of hollow articles |
Nov. 29, 1994 |
| 5366002 |
Apparatus and method to ensure heat transfer to and from an entire substrate during semiconductor processing |
Nov. 22, 1994 |
| 5356476 |
Semiconductor wafer processing method and apparatus with heat and gas flow control |
Oct. 18, 1994 |
| 5354382 |
Electron cyclotron resonance apparatus comprising wafer cooling pedestal |
Oct. 11, 1994 |
| 5352294 |
Alignment of a shadow frame and large flat substrates on a support |
Oct. 4, 1994 |
| 5350455 |
Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus |
Sep. 27, 1994 |
| 5343938 |
Method and apparatus for thermally insulating a wafer support |
Sep. 6, 1994 |
| 5334250 |
Vapor deposition apparatus for using solid starting materials |
Aug. 2, 1994 |
| 5334257 |
Treatment object supporting device |
Aug. 2, 1994 |
| 5332442 |
Surface processing apparatus |
Jul. 26, 1994 |
| 5332443 |
Lift fingers for substrate processing apparatus |
Jul. 26, 1994 |
| 5330607 |
Sacrificial metal etchback system |
Jul. 19, 1994 |
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