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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5534066 |
Fluid delivery apparatus having an infrared feedline sensor |
Jul. 9, 1996 |
| 5534068 |
Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement |
Jul. 9, 1996 |
| 5534072 |
Integrated module multi-chamber CVD processing system and its method for processing subtrates |
Jul. 9, 1996 |
| 5534073 |
Semiconductor producing apparatus comprising wafer vacuum chucking device |
Jul. 9, 1996 |
| 5534074 |
Vertical boat for holding semiconductor wafers |
Jul. 9, 1996 |
| 5534110 |
Shadow clamp |
Jul. 9, 1996 |
| 5531835 |
Patterned susceptor to reduce electrostatic force in a CVD chamber |
Jul. 2, 1996 |
| 5527392 |
Substrate temperature control apparatus for CVD reactors |
Jun. 18, 1996 |
| 5527393 |
Vapor-phase deposition apparatus and vapor-phase deposition method |
Jun. 18, 1996 |
| 5525160 |
Film deposition processing device having transparent support and transfer pins |
Jun. 11, 1996 |
| 5525780 |
Method and apparatus for uniform semiconductor material processing using induction heating with a chuck member |
Jun. 11, 1996 |
| 5522937 |
Welded susceptor assembly |
Jun. 4, 1996 |
| 5520741 |
Apparatus for producing a plasma polymer protective layer on workpieces, in particular headlamp reflectors |
May. 28, 1996 |
| 5518549 |
Susceptor and baffle therefor |
May. 21, 1996 |
| 5516367 |
Chemical vapor deposition chamber with a purge guide |
May. 14, 1996 |
| 5509464 |
Method and apparatus for cooling rectangular substrates |
Apr. 23, 1996 |
| 5507873 |
Vertical boat |
Apr. 16, 1996 |
| 5503677 |
Process and device for coating the inner surface of greatly arched, essentially dome-shaped substrates by CVD |
Apr. 2, 1996 |
| 5493987 |
Chemical vapor deposition reactor and method |
Feb. 27, 1996 |
| 5494523 |
Controlling plasma particulates by contouring the plasma sheath using materials of differing RF impedances |
Feb. 27, 1996 |
| 5494524 |
Vertical heat treatment device for semiconductor |
Feb. 27, 1996 |
| 5492566 |
Support for disk-shaped articles using the Bernoulli principle |
Feb. 20, 1996 |
| 5490881 |
Maintaining uniformity of deposited film thickness in plasma-enhanced chemical vapor deposition |
Feb. 13, 1996 |
| 5489369 |
Method and apparatus for thin film coating an article |
Feb. 6, 1996 |
| 5490228 |
Heating units for use in semiconductor-producing apparatuses and production thereof |
Feb. 6, 1996 |
| 5484486 |
Quick release process kit |
Jan. 16, 1996 |
| 5482558 |
Heat treatment boat support |
Jan. 9, 1996 |
| 5482559 |
Heat treatment boat |
Jan. 9, 1996 |
| 5482748 |
Method for diamond coating by microwave plasma |
Jan. 9, 1996 |
| 5480489 |
Reactor for uniform heating of a substrate |
Jan. 2, 1996 |
| 5480678 |
Apparatus for use with CVI/CVD processes |
Jan. 2, 1996 |
| 5478399 |
Unitary wafer plasma enhanced chemical vapor deposition holding device |
Dec. 26, 1995 |
| 5478429 |
Plasma process apparatus |
Dec. 26, 1995 |
| 5478608 |
Arc assisted CVD coating method and apparatus |
Dec. 26, 1995 |
| 5478609 |
Substrate heating mechanism |
Dec. 26, 1995 |
| 5476548 |
Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring |
Dec. 19, 1995 |
| 5476549 |
Process for an improved laminate of ZnSe and ZnS |
Dec. 19, 1995 |
| 5474612 |
Vapor-phase deposition apparatus and vapor-phase deposition method |
Dec. 12, 1995 |
| 5474614 |
Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp |
Dec. 12, 1995 |
| 5472510 |
Superconducting films on alkaline earth fluoride substrates with multiple buffer layers |
Dec. 5, 1995 |
| 5468297 |
Wafer boat for supporting silicon wafers |
Nov. 21, 1995 |
| 5468298 |
Bottom purge manifold for CVD tungsten process |
Nov. 21, 1995 |
| 5462603 |
Semiconductor processing apparatus |
Oct. 31, 1995 |
| 5460684 |
Stage having electrostatic chuck and plasma processing apparatus using same |
Oct. 24, 1995 |
| 5460703 |
Low thermal expansion clamping mechanism |
Oct. 24, 1995 |
| 5458687 |
Method of and apparatus for securing and cooling/heating a wafer |
Oct. 17, 1995 |
| 5458688 |
Heat treatment boat |
Oct. 17, 1995 |
| 5456756 |
Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer |
Oct. 10, 1995 |
| 5456757 |
Susceptor for vapor deposition |
Oct. 10, 1995 |
| 5453233 |
Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique |
Sep. 26, 1995 |
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