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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5753091 |
Carrier palette for substrates of optical storage media |
May. 19, 1998 |
| 5753133 |
Method and apparatus for etching film layers on large substrates |
May. 19, 1998 |
| 5743967 |
Low pressure CVD apparatus |
Apr. 28, 1998 |
| 5744403 |
Dielectric film deposition method and apparatus |
Apr. 28, 1998 |
| 5738165 |
Substrate holding apparatus |
Apr. 14, 1998 |
| 5738729 |
Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method |
Apr. 14, 1998 |
| 5738751 |
Substrate support having improved heat transfer |
Apr. 14, 1998 |
| 5736818 |
Resonant radiofrequency wave plasma generating apparatus with improved stage |
Apr. 7, 1998 |
| 5733426 |
Semiconductor wafer clamp device and method |
Mar. 31, 1998 |
| 5730803 |
Apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold body |
Mar. 24, 1998 |
| 5725718 |
Clamp ring for domed heated pedestal in wafer processing chamber |
Mar. 10, 1998 |
| 5720818 |
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
Feb. 24, 1998 |
| 5719077 |
Fixture and method for laser fabrication by in-situ cleaving of semiconductor bars |
Feb. 17, 1998 |
| 5716486 |
Method and apparatus for tuning field for plasma processing using corrected electrode |
Feb. 10, 1998 |
| 5711808 |
Boat for vertical diffusion furnace |
Jan. 27, 1998 |
| 5711814 |
Method of and apparatus for forming film with rotary electrode |
Jan. 27, 1998 |
| 5711815 |
Film forming apparatus and film forming method |
Jan. 27, 1998 |
| 5709785 |
Metallizing machine |
Jan. 20, 1998 |
| 5702531 |
Apparatus for forming a thin film |
Dec. 30, 1997 |
| 5700725 |
Apparatus and method for making integrated circuits |
Dec. 23, 1997 |
| 5697427 |
Apparatus and method for cooling a substrate |
Dec. 16, 1997 |
| 5695565 |
VCR head drum coated with diamond-like hard carbon films and the method and apparatus for manufacturing the same |
Dec. 9, 1997 |
| 5695566 |
Apparatus and method for plasma-processing |
Dec. 9, 1997 |
| 5695568 |
Chemical vapor deposition chamber |
Dec. 9, 1997 |
| 5690742 |
Susceptor for an epitaxial growth apparatus |
Nov. 25, 1997 |
| 5688331 |
Resistance heated stem mounted aluminum susceptor assembly |
Nov. 18, 1997 |
| 5688389 |
Method and apparatus for thin film coating an article |
Nov. 18, 1997 |
| 5679159 |
Spinning substrate holder for cutting tool inserts for improved arc-jet diamond deposition |
Oct. 21, 1997 |
| 5679164 |
Auxiliary apparatus for growing MOCVD |
Oct. 21, 1997 |
| 5679165 |
Apparatus for manufacturing semiconductor device |
Oct. 21, 1997 |
| 5679168 |
Thermal processing apparatus and process |
Oct. 21, 1997 |
| 5680502 |
Thin film heat treatment apparatus with conductively heated table and surrounding radiation shield |
Oct. 21, 1997 |
| 5673922 |
Apparatus for centering substrates on support members |
Oct. 7, 1997 |
| 5674320 |
Susceptor for a device for epitaxially growing objects and such a device |
Oct. 7, 1997 |
| 5674368 |
Film forming apparatus |
Oct. 7, 1997 |
| 5669977 |
Shape memory alloy lift pins for semiconductor processing equipment |
Sep. 23, 1997 |
| 5665166 |
Plasma processing apparatus |
Sep. 9, 1997 |
| 5665167 |
Plasma treatment apparatus having a workpiece-side electrode grounding circuit |
Sep. 9, 1997 |
| 5665430 |
Chemical vapor deposition method for depositing diamond using a high temperature vacuum substrate mount |
Sep. 9, 1997 |
| 5660639 |
Method and apparatus for plasma treating an article |
Aug. 26, 1997 |
| 5660740 |
Treatment apparatus control method |
Aug. 26, 1997 |
| 5656093 |
Wafer spacing mask for a substrate support chuck and method of fabricating same |
Aug. 12, 1997 |
| 5653812 |
Method and apparatus for deposition of diamond-like carbon coatings on drills |
Aug. 5, 1997 |
| 5648175 |
Chemical vapor deposition reactor system and integrated circuit |
Jul. 15, 1997 |
| 5645646 |
Susceptor for deposition apparatus |
Jul. 8, 1997 |
| 5643366 |
Wafer handling within a vacuum chamber using vacuum |
Jul. 1, 1997 |
| 5637200 |
Compact disk locking apparatus |
Jun. 10, 1997 |
| 5635241 |
Method for producing thin film and apparatus therefor |
Jun. 3, 1997 |
| 5626678 |
Non-conductive alignment member for uniform plasma processing of substrates |
May. 6, 1997 |
| 5626680 |
Thermal processing apparatus and process |
May. 6, 1997 |
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