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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5855687 |
Substrate support shield in wafer processing reactors |
Jan. 5, 1999 |
| 5853485 |
Pressure gradient CVI/CVD apparatus process and product |
Dec. 29, 1998 |
| 5851298 |
Susceptor structure for mounting processing object thereon |
Dec. 22, 1998 |
| 5851299 |
Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions |
Dec. 22, 1998 |
| 5848670 |
Lift pin guidance apparatus |
Dec. 15, 1998 |
| 5849228 |
Segmented substrate for improved arc-jet diamond deposition |
Dec. 15, 1998 |
| 5850071 |
Substrate heating equipment for use in a semiconductor fabricating apparatus |
Dec. 15, 1998 |
| 5846332 |
Thermally floating pedestal collar in a chemical vapor deposition chamber |
Dec. 8, 1998 |
| 5846375 |
Area specific temperature control for electrode plates and chucks used in semiconductor processing equipment |
Dec. 8, 1998 |
| 5843233 |
Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus |
Dec. 1, 1998 |
| 5843237 |
Apparatus for manufacturing a semiconductor device having a wafer loading stage with an annular slope |
Dec. 1, 1998 |
| 5840125 |
Rapid thermal heating apparatus including a substrate support and an external drive to rotate the same |
Nov. 24, 1998 |
| 5837058 |
High temperature susceptor |
Nov. 17, 1998 |
| 5830277 |
Thermal processing system with supplemental resistive heater and shielded optical pyrometry |
Nov. 3, 1998 |
| 5830808 |
Plasma reactor with magnet for protecting an electroacoustic chuck from the plasma |
Nov. 3, 1998 |
| 5820683 |
Object-supporting boat |
Oct. 13, 1998 |
| 5820684 |
Substrate support for an evaporation installation |
Oct. 13, 1998 |
| 5820685 |
Wafer support device |
Oct. 13, 1998 |
| 5820686 |
Multi-layer susceptor for rapid thermal process reactors |
Oct. 13, 1998 |
| 5820723 |
Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support |
Oct. 13, 1998 |
| 5817179 |
GaAs anneal boat design and method for use |
Oct. 6, 1998 |
| 5814196 |
Apparatus and method for high throughput sputtering |
Sep. 29, 1998 |
| 5814561 |
Substrate carrier having a streamlined shape and method for thin film formation |
Sep. 29, 1998 |
| 5810931 |
High aspect ratio clamp ring |
Sep. 22, 1998 |
| 5810933 |
Wafer cooling device |
Sep. 22, 1998 |
| 5810935 |
Apparatus for transferring a wafer |
Sep. 22, 1998 |
| 5810936 |
Plasma-inert cover and plasma cleaning process and apparatus employing same |
Sep. 22, 1998 |
| 5811762 |
Heater assembly with dual temperature control for use in PVD/CVD system |
Sep. 22, 1998 |
| 5809211 |
Ramping susceptor-wafer temperature using a single temperature input |
Sep. 15, 1998 |
| 5803977 |
Apparatus for full wafer deposition |
Sep. 8, 1998 |
| 5804042 |
Wafer support structure for a wafer backplane with a curved surface |
Sep. 8, 1998 |
| 5804089 |
Plasma processing apparatus and method |
Sep. 8, 1998 |
| 5800622 |
Vapor-phase growth apparatus and compound semiconductor device fabricated thereby |
Sep. 1, 1998 |
| 5800623 |
Semiconductor wafer support platform |
Sep. 1, 1998 |
| 5796066 |
Cable actuated drive assembly for vacuum chamber |
Aug. 18, 1998 |
| 5792267 |
Coating fixture for a turbine engine blade |
Aug. 11, 1998 |
| 5792304 |
Method of holding substrate and substrate holding system |
Aug. 11, 1998 |
| 5788304 |
Wafer carrier having both a rigid structure and resistance to corrosive environments |
Aug. 4, 1998 |
| 5785763 |
Electron-gun evaporation system having evaporation-source stream regulator |
Jul. 28, 1998 |
| 5785764 |
Susceptor for a gas phase growth apparatus |
Jul. 28, 1998 |
| 5782979 |
Substrate holder for MOCVD |
Jul. 21, 1998 |
| 5779797 |
Wafer boat for vertical diffusion and vapor growth furnace |
Jul. 14, 1998 |
| 5769951 |
Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus |
Jun. 23, 1998 |
| 5767002 |
Method of manufacturing a multi-layer film each layer having single-layer area |
Jun. 16, 1998 |
| 5766362 |
Apparatus for depositing barrier film on three-dimensional articles |
Jun. 16, 1998 |
| 5766363 |
Heater for CVD apparatus |
Jun. 16, 1998 |
| 5766365 |
Removable ring for controlling edge deposition in substrate processing apparatus |
Jun. 16, 1998 |
| 5762714 |
Plasma guard for chamber equipped with electrostatic chuck |
Jun. 9, 1998 |
| 5762715 |
Segmented substrate for improved ARC-JET diamond deposition |
Jun. 9, 1998 |
| 5756964 |
Thermal processing apparatus |
May. 26, 1998 |
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