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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6171402 |
Thermal conditioning apparatus |
Jan. 9, 2001 |
| 6171437 |
Semiconductor manufacturing device |
Jan. 9, 2001 |
| 6171453 |
Alignment mark shielding ring and method of using |
Jan. 9, 2001 |
| 6168427 |
Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
Jan. 2, 2001 |
| 6168668 |
Shadow ring and guide for supporting the shadow ring in a chamber |
Jan. 2, 2001 |
| 6168669 |
Substrate holding apparatus and substrate process system |
Jan. 2, 2001 |
| 6168697 |
Holders suitable to hold articles during processing and article processing methods |
Jan. 2, 2001 |
| 6164240 |
Semiconductor wafer processor, plasma generating apparatus, magnetic field generator, and method of generating a magnetic field |
Dec. 26, 2000 |
| 6165268 |
Wafer carrier adapter and method for use thereof |
Dec. 26, 2000 |
| 6165276 |
Apparatus for preventing plasma etching of a wafer clamp in semiconductor fabrication processes |
Dec. 26, 2000 |
| 6167194 |
Guard ring of a heating device of the light irradiation type |
Dec. 26, 2000 |
| 6162336 |
Clamping ring design to reduce wafer sticking problem in metal deposition |
Dec. 19, 2000 |
| 6163648 |
Heating device of the light irradiation type and holding device therefor |
Dec. 19, 2000 |
| 6159287 |
Truncated susceptor for vapor-phase deposition |
Dec. 12, 2000 |
| 6159299 |
Wafer pedestal with a purge ring |
Dec. 12, 2000 |
| 6159301 |
Substrate holding apparatus for processing semiconductor |
Dec. 12, 2000 |
| 6152073 |
Assembly for the manufacture of highly integrated circuits on a semiconductor substrate |
Nov. 28, 2000 |
| 6152075 |
Method and system for heating semiconductor wafers |
Nov. 28, 2000 |
| 6153260 |
Method for heating exhaust gas in a substrate reactor |
Nov. 28, 2000 |
| 6149728 |
Semiconductor manufacturing device |
Nov. 21, 2000 |
| 6149730 |
Apparatus for forming films of a semiconductor device, a method of manufacturing a semiconductor device, and a method of forming thin films of a semiconductor |
Nov. 21, 2000 |
| 6150006 |
Quartz glass component used in the production of semiconductors |
Nov. 21, 2000 |
| 6151447 |
Rapid thermal processing apparatus for processing semiconductor wafers |
Nov. 21, 2000 |
| 6148762 |
Plasma processing apparatus |
Nov. 21, 2000 |
| 6146463 |
Apparatus and method for aligning a substrate on a support member |
Nov. 14, 2000 |
| 6146464 |
Susceptor for deposition apparatus |
Nov. 14, 2000 |
| 6146504 |
Substrate support and lift apparatus and method |
Nov. 14, 2000 |
| 6142096 |
Electronic device manufacturing apparatus and method for manufacturing electronic device |
Nov. 7, 2000 |
| 6143079 |
Compact process chamber for improved process uniformity |
Nov. 7, 2000 |
| 6143086 |
Apparatus for full wafer deposition |
Nov. 7, 2000 |
| 6143143 |
Masking means and cleaning techniques for surfaces of substrates |
Nov. 7, 2000 |
| 6143147 |
Wafer holding assembly and wafer processing apparatus having said assembly |
Nov. 7, 2000 |
| 6138745 |
Two-stage sealing system for thermally conductive chuck |
Oct. 31, 2000 |
| 6139682 |
Processing apparatus for manufacturing semiconductors |
Oct. 31, 2000 |
| 6139700 |
Method of and apparatus for forming a metal interconnection in the contact hole of a semiconductor device |
Oct. 31, 2000 |
| 6139983 |
Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same |
Oct. 31, 2000 |
| 6140612 |
Controlling the temperature of a wafer by varying the pressure of gas between the underside of the wafer and the chuck |
Oct. 31, 2000 |
| 6135054 |
Semiconductor wafer holder with CVD silicon carbide film coating |
Oct. 24, 2000 |
| 6136166 |
Apparatus for producing a uniform magnetic field over a large surface area of a wafer |
Oct. 24, 2000 |
| 6132562 |
Method and device for transporting cylindrical substrates to be coated |
Oct. 17, 2000 |
| 6133121 |
Apparatus for supporting semiconductor wafers and semiconductor wafer processing method using supporting apparatus |
Oct. 17, 2000 |
| 6129046 |
Substrate processing apparatus |
Oct. 10, 2000 |
| 6129047 |
Susceptor for vapor-phase growth apparatus |
Oct. 10, 2000 |
| 6129048 |
Susceptor for barrel reactor |
Oct. 10, 2000 |
| 6129108 |
Fluid delivering system |
Oct. 10, 2000 |
| 6129546 |
Heat process apparatus and heat process method |
Oct. 10, 2000 |
| 6123804 |
Sectional clamp ring |
Sep. 26, 2000 |
| 6123805 |
Discharge electrode and process chamber of dry etching facility for manufacturing semiconductor devices |
Sep. 26, 2000 |
| 6120607 |
Apparatus and method for blocking the deposition of oxide on a wafer |
Sep. 19, 2000 |
| 6120608 |
Workpiece support platen for semiconductor process chamber |
Sep. 19, 2000 |
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