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Class Information
Number: 118/728
Name: Coating apparatus > Gas or vapor deposition > Work support
Description: Apparatus wherein significance is attributable to a means which holds the base to be coated.

Sub-classes under this class:

Class Number Class Name Patents
118/729 Moving work support 901

Patents under this class:

Patent Number Title Of Patent Date Issued
8702903 Thermally conductive sheet and substrate mounting device including same Apr. 22, 2014
8702867 Gas distribution plate and substrate treating apparatus including the same Apr. 22, 2014
8685313 Corrosion-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same Apr. 1, 2014
8680441 Heating plate with planar heater zones for semiconductor processing Mar. 25, 2014
8673166 Plasma processing apparatus and plasma processing method Mar. 18, 2014
8671882 Plasma processing apparatus Mar. 18, 2014
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8658947 Rapid conductive cooling using a secondary process plane Feb. 25, 2014
8656860 High efficiency epitaxial chemical vapor deposition (CVD) reactor Feb. 25, 2014
8652259 Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition Feb. 18, 2014
8647438 Annular baffle Feb. 11, 2014
8641825 Substrate temperature regulation fixed apparatus Feb. 4, 2014
8636873 Plasma processing apparatus and structure therein Jan. 28, 2014
8629370 Assembly for delivering RF power and DC voltage to a plasma processing chamber Jan. 14, 2014
8623142 Coating apparatus Jan. 7, 2014
8609192 Method and device for controlling oxidizing-reducing of the surface of a steel strip running continuously through a radiant tubes furnace for its galvanizing Dec. 17, 2013
8608900 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Dec. 17, 2013
8607731 Cathode with inner and outer electrodes at different heights Dec. 17, 2013
8603249 Lift pin driving device and manufacturing apparatus having same Dec. 10, 2013
8603248 System and method for varying wafer surface temperature via wafer-carrier temperature offset Dec. 10, 2013
8596623 Device and process for liquid treatment of a wafer shaped article Dec. 3, 2013
8591824 Heat treating furnace Nov. 26, 2013
8591700 Susceptor support system Nov. 26, 2013
8591656 Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor Nov. 26, 2013
8591655 Apparatus for the preparation of film Nov. 26, 2013
8590483 Coating device Nov. 26, 2013
8585823 CVD apparatus having a rotating heater Nov. 19, 2013
8582963 Detection of substrate warping during rapid thermal processing Nov. 12, 2013
8580092 Adjustable process spacing, centering, and improved gas conductance Nov. 12, 2013
8580078 Bevel etcher with vacuum chuck Nov. 12, 2013
8580037 Method of depositing materials on a non-planar surface Nov. 12, 2013
8567339 Liquid processing apparatus Oct. 29, 2013
8562746 Sectional wafer carrier Oct. 22, 2013
8562745 Stable wafer-carrier system Oct. 22, 2013
8562744 Coating device Oct. 22, 2013
8546732 Heating plate with planar heater zones for semiconductor processing Oct. 1, 2013
8545939 Method and device for the infiltration of a structure of a porous material by chemical vapour deposition Oct. 1, 2013
8545632 Coating holder and coating device having same Oct. 1, 2013
8540819 Ceramic heater Sep. 24, 2013
8540818 Polycrystalline silicon reactor Sep. 24, 2013
8535495 Coating device Sep. 17, 2013
8535446 Coating holder and coating device having same Sep. 17, 2013
8535445 Enhanced wafer carrier Sep. 17, 2013
8524555 Susceptor with backside area of constant emissivity Sep. 3, 2013
8524004 Loadlock batch ozone cure Sep. 3, 2013
8512511 Mounting table and plasma processing apparatus Aug. 20, 2013
8506715 Coating deposition apparatus and method therefor Aug. 13, 2013
8506713 Film deposition apparatus and film deposition method Aug. 13, 2013
8491963 Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates Jul. 23, 2013
8491955 Method of manufacturing electronic apparatus including plastic substrate, electronic apparatus manufactured using the method, and apparatus for use in the method Jul. 23, 2013

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