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Class Information
Number: 118/727
Name: Coating apparatus > Gas or vapor deposition > Crucible or evaporator structure > Movable crucible
Description: Apparatus wherein the holder of the coating material can be transported from one position to another.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7339139 |
Multi-layered radiant thermal evaporator and method of use |
Mar. 4, 2008 |
| 7331512 |
Monitoring and controlling of laser operation |
Feb. 19, 2008 |
| 7118783 |
Methods and apparatus for vapor processing of micro-device workpieces |
Oct. 10, 2006 |
| 7025832 |
Source for thermal physical vapor deposition of organic electroluminescent layers |
Apr. 11, 2006 |
| 6905582 |
Configurable vacuum system and method |
Jun. 14, 2005 |
| 6902625 |
Multiple pocket electron beam source |
Jun. 7, 2005 |
| 6861321 |
Method of loading a wafer onto a wafer holder to reduce thermal shock |
Mar. 1, 2005 |
| 6699375 |
Method of extending process kit consumable recycling life |
Mar. 2, 2004 |
| 6669811 |
Linear drive system for use in a plasma processing system |
Dec. 30, 2003 |
| 6660343 |
Fabrication of conductive/non-conductive nanocomposites by laser evaporation |
Dec. 9, 2003 |
| 6641674 |
Movable evaporation device |
Nov. 4, 2003 |
| 6495216 |
Apparatus and method for electron beam evaporation |
Dec. 17, 2002 |
| 6467427 |
Evaporation source material supplier |
Oct. 22, 2002 |
| 6350317 |
Linear drive system for use in a plasma processing system |
Feb. 26, 2002 |
| 6342103 |
Multiple pocket electron beam source |
Jan. 29, 2002 |
| 6340501 |
Device and method for manufacturing an optical recording medium |
Jan. 22, 2002 |
| 6338778 |
Vacuum coating system with a coating chamber and at least one source chamber |
Jan. 15, 2002 |
| 6264747 |
Apparatus for forming multicolor interference coating |
Jul. 24, 2001 |
| 6244212 |
Electron beam evaporation assembly for high uniform thin film |
Jun. 12, 2001 |
| 6218212 |
Apparatus for growing mixed compound semiconductor and growth method using the same |
Apr. 17, 2001 |
| 5804089 |
Plasma processing apparatus and method |
Sep. 8, 1998 |
| 5534314 |
Directed vapor deposition of electron beam evaporant |
Jul. 9, 1996 |
| 5534071 |
Integrated laser ablation deposition system |
Jul. 9, 1996 |
| 5445973 |
Method for manufacturing solar cells |
Aug. 29, 1995 |
| 5370739 |
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD |
Dec. 6, 1994 |
| 5288328 |
Apparatus for controlling a material flow emitted by a heated evaporation source and application to a vacuum evaporation coating machine |
Feb. 22, 1994 |
| 5262194 |
Methods and apparatus for controlling film deposition |
Nov. 16, 1993 |
| 5230923 |
Process and apparatus for the substantially continuous manufacture of a silicon oxide deposition film on a flexible plastic film |
Jul. 27, 1993 |
| 5207884 |
Superconductor deposition system |
May. 4, 1993 |
| 5190590 |
Vacuum coating apparatus |
Mar. 2, 1993 |
| 5136609 |
Method of producing finely divided particles or powder, vapor or fine droplets, and apparatus therefor |
Aug. 4, 1992 |
| 5122389 |
Vacuum evaporation method and apparatus |
Jun. 16, 1992 |
| 5085166 |
Laser vapor deposition apparatus |
Feb. 4, 1992 |
| 5070811 |
Apparatus for applying dielectric or metallic materials |
Dec. 10, 1991 |
| 5065697 |
Laser sputtering apparatus |
Nov. 19, 1991 |
| 5035202 |
Frequency fine-adjusting apparatus for a piezo-electric oscillator |
Jul. 30, 1991 |
| 4979464 |
Apparatus for treating wafers in the manufacture of semiconductor elements |
Dec. 25, 1990 |
| 4959524 |
Apparatus and evaporator for metallizing foils |
Sep. 25, 1990 |
| 4776299 |
Source replenishment device for vacuum deposition |
Oct. 11, 1988 |
| 4755364 |
Liquid phase epitaxy apparatus and method |
Jul. 5, 1988 |
| 4748935 |
Vapor source for vacuum coating installation |
Jun. 7, 1988 |
| 4690098 |
Vacuum vapor-deposition system |
Sep. 1, 1987 |
| 4682565 |
Vapor nozzle with gas barrier bars |
Jul. 28, 1987 |
| 4651441 |
Drying oven including shuttle transporting means |
Mar. 24, 1987 |
| 4646680 |
Crucible for use in molecular beam epitaxial processing |
Mar. 3, 1987 |
| 4632059 |
Evaporator device for the evaporation of several materials |
Dec. 30, 1986 |
| 4607152 |
Vacuum evaporation device |
Aug. 19, 1986 |
| 4565711 |
Method of and apparatus for the coating of quartz crucibles with protective layers |
Jan. 21, 1986 |
| 4561382 |
Vacuum vapor deposition gun assembly |
Dec. 31, 1985 |
| 4469719 |
Method for controlling the edge gradient of a layer of deposition material |
Sep. 4, 1984 |
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