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Class Information
Number: 118/726
Name: Coating apparatus > Gas or vapor deposition > Crucible or evaporator structure
Description: Apparatus wherein significance is attributable to a means which either vaporizes the coating material or contains the coating material during vaporization.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611586 |
Reactor for extended duration growth of gallium containing single crystals |
Nov. 3, 2009 |
| 7611587 |
Thin-film deposition evaporator |
Nov. 3, 2009 |
| 7601225 |
System for controlling the sublimation of reactants |
Oct. 13, 2009 |
| 7596305 |
Method and apparatus for preparing vaporized reactants for chemical vapor deposition |
Sep. 29, 2009 |
| 7556244 |
Method and apparatus to help promote contact of gas with vaporized material |
Jul. 7, 2009 |
| 7556695 |
Apparatus to make nanolaminate thermal barrier coatings |
Jul. 7, 2009 |
| 7547363 |
Solid organometallic compound-filled container and filling method thereof |
Jun. 16, 2009 |
| 7547003 |
Vaporizing apparatus and semiconductor processing system |
Jun. 16, 2009 |
| 7527693 |
Apparatus for improved delivery of metastable species |
May. 5, 2009 |
| 7497420 |
Safe liquid source containers |
Mar. 3, 2009 |
| 7487739 |
Sublimation containment apparatus and method for developing latent fingerprints |
Feb. 10, 2009 |
| 7487956 |
Method and apparatus to help promote contact of gas with vaporized material |
Feb. 10, 2009 |
| 7484315 |
Replaceable precursor tray for use in a multi-tray solid precursor delivery system |
Feb. 3, 2009 |
| 7485189 |
Thin film deposition device using an FTIR gas analyzer for mixed gas supply |
Feb. 3, 2009 |
| 7481889 |
Film forming apparatus and film forming method |
Jan. 27, 2009 |
| 7462245 |
Single-wafer-processing type CVD apparatus |
Dec. 9, 2008 |
| 7452424 |
Vaporizer |
Nov. 18, 2008 |
| 7435300 |
Dynamic film thickness control system/method and its utilization |
Oct. 14, 2008 |
| 7429300 |
Successive vapour deposition system, vapour deposition system, and vapour deposition process |
Sep. 30, 2008 |
| 7422198 |
Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method |
Sep. 9, 2008 |
| 7419641 |
Multiple-chamber device for fractionated evaporation and separation of a solution |
Sep. 2, 2008 |
| 7413611 |
Gas reaction system and semiconductor processing apparatus |
Aug. 19, 2008 |
| 7404862 |
Device and method for organic vapor jet deposition |
Jul. 29, 2008 |
| 7402779 |
Effusion cell and method for use in molecular beam deposition |
Jul. 22, 2008 |
| 7393416 |
Vapor deposition process and apparatus therefor |
Jul. 1, 2008 |
| 7384666 |
Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device |
Jun. 10, 2008 |
| 7378133 |
Fabrication system, light-emitting device and fabricating method of organic compound-containing layer |
May. 27, 2008 |
| 7371285 |
Motorized chamber lid |
May. 13, 2008 |
| 7370848 |
Bubbler for substrate processing |
May. 13, 2008 |
| 7369758 |
Molecular beam source for use in accumulation of organic thin-films |
May. 6, 2008 |
| 7359630 |
Evaporation source for evaporating an organic electroluminescent layer |
Apr. 15, 2008 |
| 7339139 |
Multi-layered radiant thermal evaporator and method of use |
Mar. 4, 2008 |
| 7335584 |
Method of using SACVD deposition and corresponding deposition reactor |
Feb. 26, 2008 |
| 7331512 |
Monitoring and controlling of laser operation |
Feb. 19, 2008 |
| 7332040 |
Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material |
Feb. 19, 2008 |
| 7329595 |
Deposition of carbon-containing layers using vitreous carbon source |
Feb. 12, 2008 |
| 7326303 |
Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) |
Feb. 5, 2008 |
| 7320734 |
Plasma immersion ion implantation system including a plasma source having low dissociation and low minimum plasma voltage |
Jan. 22, 2008 |
| 7311939 |
Vacuum coating unit and a method for the differentiated coating of spectacle lenses |
Dec. 25, 2007 |
| 7311797 |
Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
Dec. 25, 2007 |
| 7311783 |
Multiple axis tumbler coating apparatus |
Dec. 25, 2007 |
| 7300038 |
Method and apparatus to help promote contact of gas with vaporized material |
Nov. 27, 2007 |
| 7300537 |
Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
Nov. 27, 2007 |
| 7294208 |
Apparatus for providing gas to a processing chamber |
Nov. 13, 2007 |
| 7291224 |
Covering assembly for crucible used for evaporation of raw materials |
Nov. 6, 2007 |
| 7279047 |
Reactor for extended duration growth of gallium containing single crystals |
Oct. 9, 2007 |
| 7276121 |
Forming improved metal nitrides |
Oct. 2, 2007 |
| 7270714 |
Surface treating apparatus |
Sep. 18, 2007 |
| 7253084 |
Deposition from liquid sources |
Aug. 7, 2007 |
| 7246796 |
Carburetor, various types of devices using the carburetor, and method of vaporization |
Jul. 24, 2007 |
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