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Class Information
Number: 118/725
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool > Substrate heater
Description: Apparatus wherein the temperature altering means heats the base or a support for the base.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7619184 |
Multi-parameter process and control method |
Nov. 17, 2009 |
| 7618494 |
Substrate holding structure and substrate processing device |
Nov. 17, 2009 |
| 7616872 |
Temperature measurement and heat-treating methods and systems |
Nov. 10, 2009 |
| 7615121 |
Susceptor system |
Nov. 10, 2009 |
| 7608802 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Oct. 27, 2009 |
| 7603028 |
Non-contact thermal platforms |
Oct. 13, 2009 |
| 7601935 |
Two-wire hot runner nozzle heater system |
Oct. 13, 2009 |
| 7601224 |
Method of supporting a substrate in a gas cushion susceptor system |
Oct. 13, 2009 |
| 7592569 |
Substrate processing apparatus, pressure control method for substrate processing apparatus and recording medium having program recorded therein |
Sep. 22, 2009 |
| 7585386 |
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
Sep. 8, 2009 |
| 7585371 |
Substrate susceptors for receiving semiconductor substrates to be deposited upon |
Sep. 8, 2009 |
| 7582184 |
Plasma processing member |
Sep. 1, 2009 |
| 7582166 |
Holder for supporting wafers during semiconductor manufacture |
Sep. 1, 2009 |
| 7575431 |
Vertical heat processing apparatus and method for using the same |
Aug. 18, 2009 |
| 7570876 |
Method and system for loading substrate supports into a substrate holder |
Aug. 4, 2009 |
| 7560668 |
Substrate processing device |
Jul. 14, 2009 |
| 7557328 |
High rate method for stable temperature control of a substrate |
Jul. 7, 2009 |
| 7556695 |
Apparatus to make nanolaminate thermal barrier coatings |
Jul. 7, 2009 |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
Jun. 30, 2009 |
| 7553467 |
Tubular reaction vessel and process for producing silicon therewith |
Jun. 30, 2009 |
| 7528349 |
Temperature stabilization for substrate processing |
May. 5, 2009 |
| 7528348 |
Apparatus and method for measuring the temperature of substrates |
May. 5, 2009 |
| 7528347 |
Cooling device and heat treating device using the same |
May. 5, 2009 |
| 7527827 |
Substrate processing apparatus and substrate processing method |
May. 5, 2009 |
| 7527497 |
Heat treating apparatus, heat treating method, and storage medium |
May. 5, 2009 |
| 7525071 |
Power-supplying member and heating apparatus using the same |
Apr. 28, 2009 |
| 7525068 |
Heating system of batch type reaction chamber and method thereof |
Apr. 28, 2009 |
| 7524532 |
Process for depositing thin layers on a substrate in a process chamber of adjustable height |
Apr. 28, 2009 |
| 7521653 |
Plasma arc coating system |
Apr. 21, 2009 |
| 7517217 |
Method and apparatus for heat processing of substrate |
Apr. 14, 2009 |
| 7509035 |
Lamp array for thermal processing exhibiting improved radial uniformity |
Mar. 24, 2009 |
| 7503980 |
Substrate supporting apparatus |
Mar. 17, 2009 |
| 7501605 |
Method of tuning thermal conductivity of electrostatic chuck support assembly |
Mar. 10, 2009 |
| 7497912 |
Substrate processing apparatus |
Mar. 3, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7488918 |
Method and apparatus for manufacturing printed light guide plate |
Feb. 10, 2009 |
| 7485190 |
Apparatus for heating a substrate in a variable temperature process using a fixed temperature chuck |
Feb. 3, 2009 |
| 7481888 |
Heat treatment jig and heat treatment method for silicon wafer |
Jan. 27, 2009 |
| 7470919 |
Substrate support assembly with thermal isolating plate |
Dec. 30, 2008 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7461794 |
Substrate temperature regulating support pins |
Dec. 9, 2008 |
| 7453051 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Nov. 18, 2008 |
| 7452420 |
Apparatus and method for diamond production |
Nov. 18, 2008 |
| 7449071 |
Wafer holder with peripheral lift ring |
Nov. 11, 2008 |
| 7446284 |
Etch resistant wafer processing apparatus and method for producing the same |
Nov. 4, 2008 |
| 7442900 |
Chamber for uniform heating of large area substrates |
Oct. 28, 2008 |
| 7442275 |
Lateral temperature equalizing system for large area surfaces during processing |
Oct. 28, 2008 |
| 7432476 |
Substrate heat treatment apparatus |
Oct. 7, 2008 |
| 7432475 |
Vertical heat treatment device and method controlling the same |
Oct. 7, 2008 |
| 7432474 |
Heating device |
Oct. 7, 2008 |
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