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Class Information
Number: 118/725
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool > Substrate heater
Description: Apparatus wherein the temperature altering means heats the base or a support for the base.

Patents under this class:

Patent Number Title Of Patent Date Issued
8703248 Polycrystalline silicon reactor Apr. 22, 2014
8701753 Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinks Apr. 22, 2014
8692166 Substrate heating device and substrate heating method Apr. 8, 2014
8680441 Heating plate with planar heater zones for semiconductor processing Mar. 25, 2014
8679255 Gas supply device, substrate processing apparatus and substrate processing method Mar. 25, 2014
8679254 Vapor phase epitaxy apparatus of group III nitride semiconductor Mar. 25, 2014
8673081 High throughput multi-wafer epitaxial reactor Mar. 18, 2014
8673076 Substrate processing apparatus and semiconductor device producing method Mar. 18, 2014
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8663391 Electrostatic chuck having a plurality of heater coils Mar. 4, 2014
8658947 Rapid conductive cooling using a secondary process plane Feb. 25, 2014
8652260 Apparatus for holding semiconductor wafers Feb. 18, 2014
8652259 Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition Feb. 18, 2014
8652258 Substrate treatment device Feb. 18, 2014
8646407 Film formation apparatus for semiconductor process and method for using the same Feb. 11, 2014
8642120 Method and apparatus for coating glass substrate Feb. 4, 2014
8628621 Gas injector and film deposition apparatus having the same Jan. 14, 2014
8624165 Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light Jan. 7, 2014
8623173 Substrate processing apparatus having electrode member Jan. 7, 2014
8618446 Substrate support with substrate heater and symmetric RF return Dec. 31, 2013
8618442 Nozzle housing assembly Dec. 31, 2013
8612038 Target object processing system and method of controlling the same Dec. 17, 2013
8610034 Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device Dec. 17, 2013
8609192 Method and device for controlling oxidizing-reducing of the surface of a steel strip running continuously through a radiant tubes furnace for its galvanizing Dec. 17, 2013
8608900 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Dec. 17, 2013
8608852 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies Dec. 17, 2013
8603248 System and method for varying wafer surface temperature via wafer-carrier temperature offset Dec. 10, 2013
8603246 Growth reactor systems and methods for low-temperature synthesis of nanowires Dec. 10, 2013
8597462 Movable chamber liner plasma confinement screen combination for plasma processing apparatuses Dec. 3, 2013
8591993 Epitaxial wafer manufacturing apparatus and manufacturing method Nov. 26, 2013
8591824 Heat treating furnace Nov. 26, 2013
8585823 CVD apparatus having a rotating heater Nov. 19, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8562743 Method and apparatus for atomic layer deposition Oct. 22, 2013
8552346 Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber Oct. 8, 2013
8546732 Heating plate with planar heater zones for semiconductor processing Oct. 1, 2013
8546270 Atomic layer deposition apparatus Oct. 1, 2013
8542474 Electrostatic chuck Sep. 24, 2013
8540818 Polycrystalline silicon reactor Sep. 24, 2013
8536498 Induction heating device for a metal plate Sep. 17, 2013
8535479 Manufacturing method of semiconductor device, and semiconductor device Sep. 17, 2013
8535445 Enhanced wafer carrier Sep. 17, 2013
8535444 Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part Sep. 17, 2013
8524004 Loadlock batch ozone cure Sep. 3, 2013
8518184 Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition Aug. 27, 2013
8512472 Method and apparatus to enhance process gas temperature in a CVD reactor Aug. 20, 2013
8506712 Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig Aug. 13, 2013
8497217 Film forming apparatus and film-forming method Jul. 30, 2013
8491752 Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism Jul. 23, 2013
8486343 Apparatus for producing silicon Jul. 16, 2013

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