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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6669784 |
Gas processing apparatus for object to be processed |
Dec. 30, 2003 |
| 6666924 |
Reaction chamber with decreased wall deposition |
Dec. 23, 2003 |
| 6666949 |
Uniform temperature workpiece holder |
Dec. 23, 2003 |
| 6663713 |
Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
Dec. 16, 2003 |
| 6660096 |
Gas treatment apparatus |
Dec. 9, 2003 |
| 6660973 |
Radiant heating apparatus and discharge current detecting circuit therefor |
Dec. 9, 2003 |
| 6656284 |
Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the same |
Dec. 2, 2003 |
| 6653603 |
Heaters |
Nov. 25, 2003 |
| 6653212 |
Method and apparatus for thin-film deposition, and method of manufacturing thin-film semiconductor device |
Nov. 25, 2003 |
| 6649544 |
Thermal treatment equipment and method for heat-treating |
Nov. 18, 2003 |
| 6649885 |
Thermal processing apparatus |
Nov. 18, 2003 |
| 6645871 |
Method of holding substrate and substrate holding system |
Nov. 11, 2003 |
| 6646233 |
Wafer stage for wafer processing apparatus and wafer processing method |
Nov. 11, 2003 |
| 6642484 |
Glass ceramic plates for holding substrates during pre-heating |
Nov. 4, 2003 |
| 6642489 |
Method and apparatus for improving exhaust gas consumption in an exhaust conduit |
Nov. 4, 2003 |
| 6639196 |
Method and apparatus for cooling a CVI/CVD furnace |
Oct. 28, 2003 |
| 6639312 |
Dummy wafers and methods for making the same |
Oct. 28, 2003 |
| 6635117 |
Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system |
Oct. 21, 2003 |
| 6633022 |
Substrate processing apparatus and substrate processing method |
Oct. 14, 2003 |
| 6626236 |
Substrate temperature control plate and substrate temperature control apparatus comprising same |
Sep. 30, 2003 |
| 6624393 |
Method and apparatus for preparing semiconductor wafers for measurement |
Sep. 23, 2003 |
| 6620251 |
Substrate processing method and substrate processing apparatus |
Sep. 16, 2003 |
| 6617256 |
Method for controlling the temperature of a gas distribution plate in a process reactor |
Sep. 9, 2003 |
| 6614005 |
Device and method for thermally treating substrates |
Sep. 2, 2003 |
| 6609909 |
Heat treatment apparatus and method |
Aug. 26, 2003 |
| 6610150 |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
Aug. 26, 2003 |
| 6610170 |
Method of holding substrate and substrate holding system |
Aug. 26, 2003 |
| 6610171 |
Method of holding substrate and substrate holding system |
Aug. 26, 2003 |
| 6610967 |
Rapid thermal processing chamber for processing multiple wafers |
Aug. 26, 2003 |
| 6608287 |
Process chamber with rectangular temperature compensation ring |
Aug. 19, 2003 |
| 6602348 |
Substrate cooldown chamber |
Aug. 5, 2003 |
| 6599368 |
System architecture of semiconductor manufacturing equipment |
Jul. 29, 2003 |
| 6600138 |
Rapid thermal processing system for integrated circuits |
Jul. 29, 2003 |
| 6594446 |
Heat-treating methods and systems |
Jul. 15, 2003 |
| 6589349 |
Apparatus for forming silicon oxide film and method of forming silicon oxide film |
Jul. 8, 2003 |
| 6589351 |
Electron beam physical vapor deposition apparatus and crucible therefor |
Jul. 8, 2003 |
| 6590186 |
Heat treatment apparatus and method |
Jul. 8, 2003 |
| 6582780 |
Substrate support for use in a hot filament chemical vapor deposition chamber |
Jun. 24, 2003 |
| 6579373 |
Substrate processing apparatus and substrate processing method |
Jun. 17, 2003 |
| 6579374 |
Apparatus for fabrication of thin films |
Jun. 17, 2003 |
| 6575737 |
Method and apparatus for improved substrate handling |
Jun. 10, 2003 |
| 6576565 |
RTCVD process and reactor for improved conformality and step-coverage |
Jun. 10, 2003 |
| 6577923 |
Apparatus and method for robotic alignment of substrates |
Jun. 10, 2003 |
| 6572371 |
Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates |
Jun. 3, 2003 |
| 6572706 |
Integrated precursor delivery system |
Jun. 3, 2003 |
| 6573201 |
Method and apparatus for protection of substrate surface |
Jun. 3, 2003 |
| 6570134 |
Heat treatment device of the light irradiation type and heat treatment process of the irradiation type |
May. 27, 2003 |
| 6566630 |
Thermal processing apparatus for introducing gas between a target object and a cooling unit for cooling the target object |
May. 20, 2003 |
| 6562140 |
Apparatus for fabrication of thin films |
May. 13, 2003 |
| 6562141 |
Dual degas/cool loadlock cluster tool |
May. 13, 2003 |
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