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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6929699 |
Gas injectors for a vertical furnace used in semiconductor processing |
Aug. 16, 2005 |
| 6927363 |
Distribution manifold for exhausting photoresist vapors |
Aug. 9, 2005 |
| 6923867 |
Substrate processing apparatus and method for manufacturing semiconductor device |
Aug. 2, 2005 |
| 6923869 |
Device for deposition with chamber cleaner and method for cleaning the chamber |
Aug. 2, 2005 |
| 6924462 |
Pedestal for flat panel display applications |
Aug. 2, 2005 |
| 6924463 |
Pyrometer calibrated wafer temperature estimator |
Aug. 2, 2005 |
| 6924464 |
Ceramic heater and manufacturing method of ceramic heater |
Aug. 2, 2005 |
| 6920915 |
Apparatus and method for cooling a semiconductor substrate |
Jul. 26, 2005 |
| 6922522 |
Heat treatment apparatus, calibration method for temperature measuring system of the apparatus, and heat treatment system |
Jul. 26, 2005 |
| 6919538 |
Method for thermally treating substrates |
Jul. 19, 2005 |
| 6919541 |
Apparatus for preventing rapid temperature variation during wafer processing |
Jul. 19, 2005 |
| 6917755 |
Substrate support |
Jul. 12, 2005 |
| 6913670 |
Substrate support having barrier capable of detecting fluid leakage |
Jul. 5, 2005 |
| 6914218 |
Vacuum oven, system incorporating the same and method of using the same |
Jul. 5, 2005 |
| 6907841 |
Apparatus and method for synthesizing spherical diamond powder by using chemical vapor deposition method |
Jun. 21, 2005 |
| 6907924 |
Thermally conductive chuck for vacuum processor |
Jun. 21, 2005 |
| 6905079 |
Shower head structure and cleaning method thereof |
Jun. 14, 2005 |
| 6905549 |
Vertical type semiconductor device producing apparatus |
Jun. 14, 2005 |
| 6901659 |
Method of manufacturing electron-emitting device using ink-jet discharge device |
Jun. 7, 2005 |
| 6902622 |
Systems and methods for epitaxially depositing films on a semiconductor substrate |
Jun. 7, 2005 |
| 6902623 |
Reactor having a movable shutter |
Jun. 7, 2005 |
| 6903030 |
System and method for heat treating semiconductor |
Jun. 7, 2005 |
| 6903306 |
Directional cooling system for vacuum heat treating furnace |
Jun. 7, 2005 |
| 6899763 |
Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes |
May. 31, 2005 |
| 6899788 |
Article holders that use gas vortices to hold an article in a desired position |
May. 31, 2005 |
| 6899789 |
Method of holding substrate and substrate holding system |
May. 31, 2005 |
| 6900413 |
Hot wall rapid thermal processor |
May. 31, 2005 |
| 6896513 |
Large area substrate processing system |
May. 24, 2005 |
| 6896764 |
Vacuum processing apparatus and control method thereof |
May. 24, 2005 |
| 6897403 |
Plasma processing method and plasma processing apparatus |
May. 24, 2005 |
| 6897411 |
Heated substrate support |
May. 24, 2005 |
| 6895179 |
Wafer stage for wafer processing apparatus |
May. 17, 2005 |
| 6891131 |
Thermal processing system |
May. 10, 2005 |
| 6891263 |
Ceramic substrate for a semiconductor production/inspection device |
May. 10, 2005 |
| 6887315 |
Vacuum plate having a symmetrical air-load block |
May. 3, 2005 |
| 6888104 |
Thermally matched support ring for substrate processing chamber |
May. 3, 2005 |
| 6884295 |
Method of forming oxynitride film or the like and system for carrying out the same |
Apr. 26, 2005 |
| 6884298 |
Method and system for coating and developing |
Apr. 26, 2005 |
| 6884968 |
Apparatus and process for annealing a multilayer body, and multilayer body of this type |
Apr. 26, 2005 |
| 6884972 |
Ceramic plate for a semiconductor producing/inspecting apparatus |
Apr. 26, 2005 |
| 6885815 |
Thermal processing apparatus performing irradiating a substrate with light |
Apr. 26, 2005 |
| 6881447 |
Chemically and electrically stabilized polymer films |
Apr. 19, 2005 |
| 6879777 |
Localized heating of substrates using optics |
Apr. 12, 2005 |
| 6879778 |
Batch furnace |
Apr. 12, 2005 |
| 6879779 |
Annealing oven with heat transfer plate |
Apr. 12, 2005 |
| 6878210 |
Surface-treating holder having tubular structure and method using the same |
Apr. 12, 2005 |
| 6875956 |
Method of forming photoresist pattern using hot plate oven |
Apr. 5, 2005 |
| 6876816 |
Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment |
Apr. 5, 2005 |
| 6869500 |
Method for processing a wafer and apparatus for performing the same |
Mar. 22, 2005 |
| 6866094 |
Temperature-controlled chuck with recovery of circulating temperature control fluid |
Mar. 15, 2005 |
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