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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7018479 |
Rotating semiconductor processing apparatus |
Mar. 28, 2006 |
| 7019263 |
Substrate heating apparatus and multi-chamber substrate processing system |
Mar. 28, 2006 |
| 7019268 |
Wafer processing apparatus and method of use |
Mar. 28, 2006 |
| 7017658 |
Heat processing device |
Mar. 28, 2006 |
| 7015422 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
Mar. 21, 2006 |
| 7015426 |
Purged heater-susceptor for an ALD/CVD reactor |
Mar. 21, 2006 |
| 7011710 |
Concentration profile on demand gas delivery system (individual divert delivery system) |
Mar. 14, 2006 |
| 7011711 |
Chemical vapor deposition reactor |
Mar. 14, 2006 |
| 7009148 |
Method of processing a substrate, heating apparatus, and method of forming a pattern |
Mar. 7, 2006 |
| 7000418 |
Capacitance sensing for substrate cooling |
Feb. 21, 2006 |
| 7003219 |
Substrate processing method |
Feb. 21, 2006 |
| 6998579 |
Chamber for uniform substrate heating |
Feb. 14, 2006 |
| 6998580 |
Thermal processing apparatus and thermal processing method |
Feb. 14, 2006 |
| 6991684 |
Heat-treating apparatus and heat-treating method |
Jan. 31, 2006 |
| 6991701 |
Plasma treatment method and apparatus |
Jan. 31, 2006 |
| 6992270 |
Wafer bake system and method for operating the same |
Jan. 31, 2006 |
| 6992876 |
Electrostatic chuck and its manufacturing method |
Jan. 31, 2006 |
| 6984267 |
Manufacture system for semiconductor device with thin gate insulating film |
Jan. 10, 2006 |
| 6981465 |
Chemical vapor deposition process and apparatus thereof |
Jan. 3, 2006 |
| 6979659 |
Silicon fixture supporting silicon wafers during high temperature processing |
Dec. 27, 2005 |
| 6970644 |
Heating configuration for use in thermal processing chambers |
Nov. 29, 2005 |
| 6969829 |
Substrate processing apparatus |
Nov. 29, 2005 |
| 6969830 |
Wafer chuck having thermal plate with interleaved heating and cooling elements |
Nov. 29, 2005 |
| 6965092 |
Ultra fast rapid thermal processing chamber and method of use |
Nov. 15, 2005 |
| 6965093 |
Device for thermally treating substrates |
Nov. 15, 2005 |
| 6963052 |
Heater module for semiconductor manufacturing equipment |
Nov. 8, 2005 |
| 6963692 |
Heat-treating methods and systems |
Nov. 8, 2005 |
| 6957690 |
Apparatus for thermal treatment of substrates |
Oct. 25, 2005 |
| 6958098 |
Semiconductor wafer support lift-pin assembly |
Oct. 25, 2005 |
| 6955720 |
Plasma deposition of spin chucks to reduce contamination of Silicon wafers |
Oct. 18, 2005 |
| 6955741 |
Semiconductor-processing reaction chamber |
Oct. 18, 2005 |
| 6955925 |
Annealing |
Oct. 18, 2005 |
| 6956186 |
Ceramic heater |
Oct. 18, 2005 |
| 6954585 |
Substrate processing method and apparatus |
Oct. 11, 2005 |
| 6952889 |
Forced convection assisted rapid thermal furnace |
Oct. 11, 2005 |
| 6951821 |
Processing system and method for chemically treating a substrate |
Oct. 4, 2005 |
| 6951996 |
Pulsed processing semiconductor heating methods using combinations of heating sources |
Oct. 4, 2005 |
| 6949143 |
Dual substrate loadlock process equipment |
Sep. 27, 2005 |
| 6949474 |
Method of manufacturing a semiconductor device and a semiconductor manufacture system |
Sep. 27, 2005 |
| 6949719 |
Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator |
Sep. 27, 2005 |
| 6946033 |
Heated gas distribution plate for a processing chamber |
Sep. 20, 2005 |
| 6939579 |
ALD reactor and method with controlled wall temperature |
Sep. 6, 2005 |
| 6940047 |
Heat treatment apparatus with temperature control system |
Sep. 6, 2005 |
| 6941063 |
Heat-treating methods and systems |
Sep. 6, 2005 |
| 6935269 |
Apparatus for treating the surface with neutral particle beams |
Aug. 30, 2005 |
| 6935466 |
Lift pin alignment and operation methods and apparatus |
Aug. 30, 2005 |
| 6936108 |
Heat treatment device |
Aug. 30, 2005 |
| 6936797 |
Thermal processing method and thermal processing apparatus for substrate employing photoirradiation |
Aug. 30, 2005 |
| 6932871 |
Multi-station deposition apparatus and method |
Aug. 23, 2005 |
| 6932873 |
Managing work-piece deflection |
Aug. 23, 2005 |
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