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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7103271 |
Light irradiation heat treatment method and light irradiation heat treatment apparatus |
Sep. 5, 2006 |
| 7098428 |
System and method for an improved susceptor |
Aug. 29, 2006 |
| 7094994 |
Heat treatment apparatus and method of semiconductor wafer |
Aug. 22, 2006 |
| 7091453 |
Heat treatment apparatus by means of light irradiation |
Aug. 15, 2006 |
| 7090727 |
Heated gas line body feedthrough for vapor and gas delivery systems and methods for employing same |
Aug. 15, 2006 |
| 7087119 |
Atomic layer deposition with point of use generated reactive gas species |
Aug. 8, 2006 |
| 7084376 |
Semiconductor production device ceramic plate |
Aug. 1, 2006 |
| 7082261 |
Heating stage |
Jul. 25, 2006 |
| 7077912 |
Semiconductor manufacturing system |
Jul. 18, 2006 |
| 7077913 |
Apparatus for fabricating a semiconductor device |
Jul. 18, 2006 |
| 7079760 |
Processing system and method for thermally treating a substrate |
Jul. 18, 2006 |
| 7070660 |
Wafer holder with stiffening rib |
Jul. 4, 2006 |
| 7070661 |
Uniform gas cushion wafer support |
Jul. 4, 2006 |
| 7072579 |
Light irradiation type thermal processing apparatus and method of adjusting light irradiation intensity |
Jul. 4, 2006 |
| 7067012 |
CVD coating device |
Jun. 27, 2006 |
| 7067178 |
Substrate table, production method therefor and plasma treating device |
Jun. 27, 2006 |
| 7067770 |
Radiant heating system with a high infrared radiant heating capacity, for treatment chambers |
Jun. 27, 2006 |
| 7068925 |
Versatile semi-toroidal processing furnace with automatic and reconfigurable wafer exchange |
Jun. 27, 2006 |
| 7068926 |
Heat treatment apparatus of light-emission type and method of cleaning same |
Jun. 27, 2006 |
| 7060939 |
Substrate heating method, substrate heating system, and applying developing system |
Jun. 13, 2006 |
| 7060944 |
Heat treatment device and heat treatment method |
Jun. 13, 2006 |
| 7060945 |
Substrate heater and fabrication method for the same |
Jun. 13, 2006 |
| 7062161 |
Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor |
Jun. 13, 2006 |
| 7056389 |
Method and device for thermal treatment of substrates |
Jun. 6, 2006 |
| 7056479 |
Process for preparing carbon nanotubes |
Jun. 6, 2006 |
| 7049549 |
Multi-thermal zone shielding apparatus |
May. 23, 2006 |
| 7049553 |
Substrate processing apparatus and substrate processing method |
May. 23, 2006 |
| 7050710 |
Thermal treatment equipment and thermal treatment method |
May. 23, 2006 |
| 7045746 |
Shadow-free shutter arrangement and method |
May. 16, 2006 |
| 7045747 |
Heater unit |
May. 16, 2006 |
| 7041931 |
Stepped reflector plate |
May. 9, 2006 |
| 7041939 |
Thermal processing apparatus and thermal processing method |
May. 9, 2006 |
| 7043148 |
Wafer heating using edge-on illumination |
May. 9, 2006 |
| 7038173 |
Thermal processing apparatus and thermal processing method |
May. 2, 2006 |
| 7038174 |
Heating device for heating semiconductor wafers in thermal processing chambers |
May. 2, 2006 |
| 7039303 |
Heating method, heating apparatus, and production method of image display apparatus |
May. 2, 2006 |
| 7034255 |
Light irradiation type thermal processing apparatus |
Apr. 25, 2006 |
| 7033443 |
Gas-cooled clamp for RTP |
Apr. 25, 2006 |
| 7033444 |
Plasma processing apparatus, and electrode structure and table structure of processing apparatus |
Apr. 25, 2006 |
| 7033445 |
Gridded susceptor |
Apr. 25, 2006 |
| 7029505 |
Sheet type heat treating apparatus and method for processing semiconductors |
Apr. 18, 2006 |
| 7025831 |
Apparatus for surface conditioning |
Apr. 11, 2006 |
| 7025833 |
Apparatus and method for web cooling in a vacuum coating chamber |
Apr. 11, 2006 |
| 7025858 |
Apparatus for supporting wafer in semiconductor process |
Apr. 11, 2006 |
| 7026580 |
Adjustable exhaust flow for thermal uniformity |
Apr. 11, 2006 |
| 7026581 |
Apparatus for positioning an elevator tube |
Apr. 11, 2006 |
| 7027722 |
Electric heater for a semiconductor processing apparatus |
Apr. 11, 2006 |
| 7022947 |
Systems for supporting ceramic susceptors |
Apr. 4, 2006 |
| 7022948 |
Chamber for uniform substrate heating |
Apr. 4, 2006 |
| 7024105 |
Substrate heater assembly |
Apr. 4, 2006 |
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