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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5595606 |
Shower head and film forming apparatus using the same |
Jan. 21, 1997 |
| 5593740 |
Method and apparatus for making carbon-encapsulated ultrafine metal particles |
Jan. 14, 1997 |
| 5591267 |
Reduced pressure device |
Jan. 7, 1997 |
| 5591485 |
Method and apparatus for producing nickel shell molds |
Jan. 7, 1997 |
| 5584934 |
Method and apparatus for preventing distortion of horizontal quartz tube caused by high temperature |
Dec. 17, 1996 |
| 5584971 |
Treatment apparatus control method |
Dec. 17, 1996 |
| 5582649 |
Wafer transfer apparatus for use in a film deposition furnace |
Dec. 10, 1996 |
| 5580822 |
Chemical vapor deposition method |
Dec. 3, 1996 |
| 5578132 |
Apparatus for heat treating semiconductors at normal pressure and low pressure |
Nov. 26, 1996 |
| 5577157 |
Optical processing furnace with quartz muffle and diffuser plate |
Nov. 19, 1996 |
| 5571330 |
Load lock chamber for vertical type heat treatment apparatus |
Nov. 5, 1996 |
| 5571333 |
Heat treatment furnace with an exhaust baffle |
Nov. 5, 1996 |
| 5571749 |
Method and apparatus for forming deposited film |
Nov. 5, 1996 |
| 5566744 |
Apparatus and method to ensure heat transfer to and from an entire substrate during semiconductor processing |
Oct. 22, 1996 |
| 5567237 |
Continuous drier for board-shaped piece material and coating installation comprising such a continuous drier |
Oct. 22, 1996 |
| 5567267 |
Method of controlling temperature of susceptor |
Oct. 22, 1996 |
| 5558736 |
Electron cyclotron resonance apparatus |
Sep. 24, 1996 |
| 5554222 |
Ionization deposition apparatus |
Sep. 10, 1996 |
| 5554226 |
Heat treatment processing apparatus and cleaning method thereof |
Sep. 10, 1996 |
| 5551984 |
Vertical heat treatment apparatus with a circulation gas passage |
Sep. 3, 1996 |
| 5551985 |
Method and apparatus for cold wall chemical vapor deposition |
Sep. 3, 1996 |
| 5542559 |
Plasma treatment apparatus |
Aug. 6, 1996 |
| 5540780 |
Molecular beam epitaxy effusion cell |
Jul. 30, 1996 |
| 5540782 |
Heat treating apparatus having heat transmission-preventing plates |
Jul. 30, 1996 |
| 5539855 |
Apparatus for measuring the temperature of a substrate |
Jul. 23, 1996 |
| 5536317 |
Parylene deposition apparatus including a quartz crystal thickness/rate controller |
Jul. 16, 1996 |
| 5536319 |
Parylene deposition apparatus including an atmospheric shroud and inert gas source |
Jul. 16, 1996 |
| 5536322 |
Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device |
Jul. 16, 1996 |
| 5536918 |
Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers |
Jul. 16, 1996 |
| 5534068 |
Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement |
Jul. 9, 1996 |
| 5529633 |
Apparatus for depositing a substance on a rotating surface |
Jun. 25, 1996 |
| 5527392 |
Substrate temperature control apparatus for CVD reactors |
Jun. 18, 1996 |
| 5520742 |
Thermal processing apparatus with heat shielding member |
May. 28, 1996 |
| 5518593 |
Shield configuration for vacuum chamber |
May. 21, 1996 |
| 5514414 |
Solvent-less vapor deposition apparatus and process for application of soldering fluxes |
May. 7, 1996 |
| 5511608 |
Clampless vacuum heat transfer station |
Apr. 30, 1996 |
| 5509967 |
Heat treatment apparatus |
Apr. 23, 1996 |
| 5508071 |
CVD diamond coating annulus components and method of their fabrication |
Apr. 16, 1996 |
| 5505544 |
Chamber temperature uniformity test fixture |
Apr. 9, 1996 |
| 5503678 |
Vertical low pressure CVD apparatus with an adjustable nozzle |
Apr. 2, 1996 |
| 5504831 |
System for compensating against wafer edge heat loss in rapid thermal processing |
Apr. 2, 1996 |
| 5500047 |
Apparatus for adsorbing atomic hydrogen on surface |
Mar. 19, 1996 |
| 5498292 |
Heating device used for a gas phase growing mechanism or heat treatment mechanism |
Mar. 12, 1996 |
| 5496410 |
Plasma processing apparatus and method of processing substrates by using same apparatus |
Mar. 5, 1996 |
| 5489446 |
Device for forming silicon oxide film |
Feb. 6, 1996 |
| 5487786 |
Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder |
Jan. 30, 1996 |
| 5482558 |
Heat treatment boat support |
Jan. 9, 1996 |
| 5482559 |
Heat treatment boat |
Jan. 9, 1996 |
| 5479874 |
CVD diamond production using preheating |
Jan. 2, 1996 |
| 5480488 |
Apparatus for supplying CVD coating devices |
Jan. 2, 1996 |
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