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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6410888 |
Process chamber cooling |
Jun. 25, 2002 |
| 6407367 |
Heat treatment apparatus, heat treatment process employing the same, and process for producing semiconductor article |
Jun. 18, 2002 |
| 6407368 |
System for maintaining a flat zone temperature profile in LP vertical furnace |
Jun. 18, 2002 |
| 6407371 |
Heater |
Jun. 18, 2002 |
| 6406545 |
Semiconductor workpiece processing apparatus and method |
Jun. 18, 2002 |
| 6402508 |
Heat and cooling treatment apparatus and substrate processing system |
Jun. 11, 2002 |
| 6403923 |
System for controlling the temperature of a reflective substrate during rapid heating |
Jun. 11, 2002 |
| 6403926 |
Thermal processing apparatus having a coolant passage |
Jun. 11, 2002 |
| 6403927 |
Heat-processing apparatus and method of semiconductor process |
Jun. 11, 2002 |
| 6399921 |
System and method for thermal processing of a semiconductor substrate |
Jun. 4, 2002 |
| 6399922 |
Single-substrate-heat-treating apparatus for semiconductor process system |
Jun. 4, 2002 |
| 6394797 |
Substrate temperature control system and method for controlling temperature of substrate |
May. 28, 2002 |
| 6393209 |
Lamp unit for a photoirradiating heating device |
May. 21, 2002 |
| 6393210 |
Rapid thermal processing method and apparatus |
May. 21, 2002 |
| 6391116 |
Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
May. 21, 2002 |
| 6383300 |
Heat treatment apparatus and cleaning method of the same |
May. 7, 2002 |
| 6379466 |
Temperature controlled gas distribution plate |
Apr. 30, 2002 |
| 6380518 |
Heat treatment apparatus and substrate processing system |
Apr. 30, 2002 |
| 6376804 |
Semiconductor processing system with lamp cooling |
Apr. 23, 2002 |
| 6375743 |
Method for improved chamber bake-out and cool-down |
Apr. 23, 2002 |
| 6375746 |
Wafer processing architecture including load locks |
Apr. 23, 2002 |
| 6376028 |
Device and method for treating the inside surface of a plastic container with a narrow opening in a plasma enhanced process |
Apr. 23, 2002 |
| 6370796 |
Heater block cooling system for wafer processing apparatus |
Apr. 16, 2002 |
| 6372048 |
Gas processing apparatus for object to be processed |
Apr. 16, 2002 |
| 6372639 |
Method for constructing interconnects for sub-micron semiconductor devices and the resulting semiconductor devices |
Apr. 16, 2002 |
| 6367410 |
Closed-loop dome thermal control apparatus for a semiconductor wafer processing system |
Apr. 9, 2002 |
| 6368404 |
Induction heated chemical vapor deposition reactor |
Apr. 9, 2002 |
| 6368880 |
Barrier applications for aluminum planarization |
Apr. 9, 2002 |
| 6368987 |
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions |
Apr. 9, 2002 |
| 6369361 |
Thermal processing apparatus |
Apr. 9, 2002 |
| 6364949 |
300 mm CVD chamber design for metal-organic thin film deposition |
Apr. 2, 2002 |
| 6359263 |
System for controlling the temperature of a reflective substrate during rapid heating |
Mar. 19, 2002 |
| 6359264 |
Thermal cycling module |
Mar. 19, 2002 |
| 6355909 |
Method and apparatus for thermal processing of semiconductor substrates |
Mar. 12, 2002 |
| 6352430 |
Method and apparatus for cooling a CVI/CVD furnace |
Mar. 5, 2002 |
| 6352593 |
Mini-batch process chamber |
Mar. 5, 2002 |
| 6352594 |
Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors |
Mar. 5, 2002 |
| 6350964 |
Power distribution printed circuit board for a semiconductor processing system |
Feb. 26, 2002 |
| 6348417 |
Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
Feb. 19, 2002 |
| 6344117 |
Backing plate for sputtering |
Feb. 5, 2002 |
| 6344631 |
Substrate support assembly and processing apparatus |
Feb. 5, 2002 |
| 6345150 |
Single wafer annealing oven |
Feb. 5, 2002 |
| 6342691 |
Apparatus and method for thermal processing of semiconductor substrates |
Jan. 29, 2002 |
| 6336991 |
Method of holding substrate and substrate holding system |
Jan. 8, 2002 |
| 6337105 |
Method and apparatus for forming thin functional film |
Jan. 8, 2002 |
| 6337467 |
Lamp based scanning rapid thermal processing |
Jan. 8, 2002 |
| 6334928 |
Semiconductor processing system and method of using the same |
Jan. 1, 2002 |
| 6332927 |
Substrate processing apparatus |
Dec. 25, 2001 |
| 6332928 |
High throughput OMPVE apparatus |
Dec. 25, 2001 |
| 6331211 |
Method and apparatus for forming low dielectric constant polymeric films |
Dec. 18, 2001 |
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