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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.

Sub-classes under this class:

Class Number Class Name Patents
118/725 Substrate heater 1,976

Patents under this class:

Patent Number Title Of Patent Date Issued
8709539 Process and apparatus for producing composite material that includes carbon nanotubes Apr. 29, 2014
8701753 Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinks Apr. 22, 2014
8692166 Substrate heating device and substrate heating method Apr. 8, 2014
8685855 Tray for CVD and method for forming film using same Apr. 1, 2014
8679989 Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion Mar. 25, 2014
8679255 Gas supply device, substrate processing apparatus and substrate processing method Mar. 25, 2014
8679254 Vapor phase epitaxy apparatus of group III nitride semiconductor Mar. 25, 2014
8679252 Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof Mar. 25, 2014
8673081 High throughput multi-wafer epitaxial reactor Mar. 18, 2014
8673080 Temperature controlled showerhead Mar. 18, 2014
8669496 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Mar. 11, 2014
8668775 Machine CVD shower head Mar. 11, 2014
8663391 Electrostatic chuck having a plurality of heater coils Mar. 4, 2014
8663390 Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems Mar. 4, 2014
8662886 System for improved pressure control in horizontal diffusion furnace scavenger system for controlling oxide growth Mar. 4, 2014
8658947 Rapid conductive cooling using a secondary process plane Feb. 25, 2014
8658945 Backside rapid thermal processing of patterned wafers Feb. 25, 2014
8657958 CVD-Siemens monosilane reactor process with complete utilization of feed gases and total recycle Feb. 25, 2014
8652258 Substrate treatment device Feb. 18, 2014
8652256 Manufacturing apparatus of polycrystalline silicon Feb. 18, 2014
8647438 Annular baffle Feb. 11, 2014
8646407 Film formation apparatus for semiconductor process and method for using the same Feb. 11, 2014
8636882 Producing method of semiconductor device and substrate processing apparatus Jan. 28, 2014
8628621 Gas injector and film deposition apparatus having the same Jan. 14, 2014
8624165 Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light Jan. 7, 2014
8623173 Substrate processing apparatus having electrode member Jan. 7, 2014
8618446 Substrate support with substrate heater and symmetric RF return Dec. 31, 2013
8618442 Nozzle housing assembly Dec. 31, 2013
8613802 Nitride semiconductor crystal manufacturing apparatus, nitride semiconductor crystal manufacturing method, and nitride semiconductor crystal Dec. 24, 2013
8608900 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes Dec. 17, 2013
8608854 CVD device Dec. 17, 2013
8608852 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies Dec. 17, 2013
8603246 Growth reactor systems and methods for low-temperature synthesis of nanowires Dec. 10, 2013
8597430 Modular system and process for continuous deposition of a thin film layer on a substrate Dec. 3, 2013
8597429 Manufacturing apparatus and method for semiconductor device Dec. 3, 2013
8591993 Epitaxial wafer manufacturing apparatus and manufacturing method Nov. 26, 2013
8591824 Heat treating furnace Nov. 26, 2013
8562746 Sectional wafer carrier Oct. 22, 2013
8558134 Plasma processing apparatus and plasma processing method Oct. 15, 2013
8557045 Apparatus and method for fabricating photovoltaic modules using heated pocket deposition in a vacuum Oct. 15, 2013
8555810 Plasma dry etching apparatus having coupling ring with cooling and heating units Oct. 15, 2013
8552346 Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber Oct. 8, 2013
8551890 Showerhead for CVD depositions Oct. 8, 2013
8551248 Showerhead for CVD depositions Oct. 8, 2013
8546270 Atomic layer deposition apparatus Oct. 1, 2013
8540843 Plasma chamber top piece assembly Sep. 24, 2013
8540818 Polycrystalline silicon reactor Sep. 24, 2013
8536494 Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support Sep. 17, 2013
8524580 Manufacturing method of semiconductor substrate and substrate processing apparatus Sep. 3, 2013
8524052 Cooling shower plate for disk manufacture Sep. 3, 2013

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