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Class Information
Number: 118/724
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By means to heat or cool
Description: Apparatus wherein a means is provided which alters the temperature which means is other than and in addition to any temperature altering means associated with a source of the coating material.


Sub-classes under this class:

Class Number Class Name Patents
118/725 Substrate heater 1,649


Patents under this class:

Patent Number Title Of Patent Date Issued
7453051 System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy Nov. 18, 2008
7452420 Apparatus and method for diamond production Nov. 18, 2008
7446284 Etch resistant wafer processing apparatus and method for producing the same Nov. 4, 2008
7442900 Chamber for uniform heating of large area substrates Oct. 28, 2008
7442413 Methods and apparatus for treating a work piece with a vaporous element Oct. 28, 2008
7442275 Lateral temperature equalizing system for large area surfaces during processing Oct. 28, 2008
7438872 Steam oxidation apparatus Oct. 21, 2008
7432475 Vertical heat treatment device and method controlling the same Oct. 7, 2008
7429717 Multizone heater for furnace Sep. 30, 2008
7427329 Temperature control for single substrate semiconductor processing reactor Sep. 23, 2008
7422655 Apparatus for performing semiconductor processing on target substrate Sep. 9, 2008
7422635 Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces Sep. 9, 2008
7419566 Plasma reactor Sep. 2, 2008
7419550 Oxidizing method and oxidizing unit of object for object to be processed Sep. 2, 2008
7416633 Plasma processing apparatus Aug. 26, 2008
7413610 Method and apparatus for coating or heat treatment of blisks for aircraft gas turbines Aug. 19, 2008
7411161 Susceptor for deposition process equipment and method of fabricating a heater therein Aug. 12, 2008
7408131 Wafer holder and semiconductor manufacturing apparatus Aug. 5, 2008
7402778 Oven for controlled heating of compounds at varying temperatures Jul. 22, 2008
7396432 Composite shadow ring assembled with dowel pins and method of using Jul. 8, 2008
7396411 Apparatus for manufacturing single crystal Jul. 8, 2008
7393418 Susceptor Jul. 1, 2008
7387686 Film formation apparatus Jun. 17, 2008
7381928 Thermal processing apparatus and thermal processing method Jun. 3, 2008
7381293 Convex insert ring for etch chamber Jun. 3, 2008
7381276 Susceptor pocket with beveled projection sidewall Jun. 3, 2008
7381275 Apparatus and method for manufacturing semiconductor Jun. 3, 2008
7381052 Apparatus and method for heating substrates Jun. 3, 2008
7378618 Rapid conductive cooling using a secondary process plane May. 27, 2008
7371998 Thermal wafer processor May. 13, 2008
7371997 Thermal processing apparatus and thermal processing method May. 13, 2008
7361230 Substrate processing apparatus Apr. 22, 2008
7361229 Device for deposition with chamber cleaner and method for cleaning chamber Apr. 22, 2008
7358462 Apparatus and method for reducing stray light in substrate processing chambers Apr. 15, 2008
7354622 Method for forming thin film and apparatus for forming thin film Apr. 8, 2008
7351936 Method and apparatus for preventing baking chamber exhaust line clog Apr. 1, 2008
7347901 Thermally zoned substrate holder assembly Mar. 25, 2008
7338578 Step edge insert ring for etch chamber Mar. 4, 2008
7337745 Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor Mar. 4, 2008
7335278 Plasma processing apparatus and plasma processing method Feb. 26, 2008
7335267 Heat treating apparatus having rotatable heating unit Feb. 26, 2008
7332691 Cooling plate, bake unit, and substrate treating apparatus Feb. 19, 2008
7332039 Plasma processing apparatus and method thereof Feb. 19, 2008
7332038 Device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates Feb. 19, 2008
7327948 Cast pedestal with heating element and coaxial heat exchanger Feb. 5, 2008
7326303 Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) Feb. 5, 2008
7321722 Method for thermal processing a semiconductor wafer Jan. 22, 2008
7313931 Method and device for heat treatment Jan. 1, 2008
7312422 Semiconductor batch heating assembly Dec. 25, 2007
7311797 Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor Dec. 25, 2007



 
 
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