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Class Information
Number: 118/723VE
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Vacuum evaporation means within deposition chamber (e.g., activated reactive evaporation, etc.)
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7614932 |
Method and system for endpoint detection |
Nov. 10, 2009 |
| 7611587 |
Thin-film deposition evaporator |
Nov. 3, 2009 |
| 7576017 |
Method and apparatus for forming a thin-film solar cell using a continuous process |
Aug. 18, 2009 |
| 7556720 |
Electrostatic charge-free container and method of manufacturing such a container |
Jul. 7, 2009 |
| 7553368 |
Process for manufacturing a gallium rich gallium nitride film |
Jun. 30, 2009 |
| 7524481 |
Reactors for producing inorganic fullerene-like tungsten disulfide hollow nanoparticles and nanotubes |
Apr. 28, 2009 |
| 7503996 |
Multiple frequency plasma chamber, switchable RF system, and processes using same |
Mar. 17, 2009 |
| 7498587 |
Bi-directional filtered arc plasma source |
Mar. 3, 2009 |
| 7491913 |
Bake apparatus for use in spin-coating equipment |
Feb. 17, 2009 |
| 7481889 |
Film forming apparatus and film forming method |
Jan. 27, 2009 |
| 7462245 |
Single-wafer-processing type CVD apparatus |
Dec. 9, 2008 |
| 7296532 |
Bypass gas feed system and method to improve reactant gas flow and film deposition |
Nov. 20, 2007 |
| 7276121 |
Forming improved metal nitrides |
Oct. 2, 2007 |
| 7276140 |
Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same |
Oct. 2, 2007 |
| 7156960 |
Method and device for continuous cold plasma deposition of metal coatings |
Jan. 2, 2007 |
| 7131392 |
Vacuum evaporator |
Nov. 7, 2006 |
| 7094313 |
Universal mid-frequency matching network |
Aug. 22, 2006 |
| 7078072 |
Method of modifying surface layer of molded resin and apparatus for modifying surface layer of molded resin |
Jul. 18, 2006 |
| 7021238 |
Molecular beam epitaxy equipment |
Apr. 4, 2006 |
| 7005047 |
Film deposition apparatus and film deposition method |
Feb. 28, 2006 |
| 6998034 |
Vacuum arc deposition apparatus |
Feb. 14, 2006 |
| 6988463 |
Ion beam source with gas introduced directly into deposition/vacuum chamber |
Jan. 24, 2006 |
| 6933025 |
Chamber having components with textured surfaces and method of manufacture |
Aug. 23, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6905582 |
Configurable vacuum system and method |
Jun. 14, 2005 |
| 6878248 |
Method of manufacturing an object in a vacuum recipient |
Apr. 12, 2005 |
| 6869508 |
Physical vapor deposition apparatus and process |
Mar. 22, 2005 |
| 6870321 |
High-frequency electron source |
Mar. 22, 2005 |
| 6863731 |
System for deposition of inert barrier coating to increase corrosion resistance |
Mar. 8, 2005 |
| 6858119 |
Mobile plating system and method |
Feb. 22, 2005 |
| 6849132 |
CVD codeposition of A1 and one or more reactive (gettering) elements to form protective aluminide coating |
Feb. 1, 2005 |
| 6821348 |
In-line deposition processes for circuit fabrication |
Nov. 23, 2004 |
| 6805779 |
Plasma generation using multi-step ionization |
Oct. 19, 2004 |
| 6805916 |
Method for making films utilizing a pulsed laser for ion injection and deposition |
Oct. 19, 2004 |
| 6799531 |
Method for making films utilizing a pulsed laser for ion injection and deposition |
Oct. 5, 2004 |
| 6780290 |
Method and device for forming film |
Aug. 24, 2004 |
| 6777045 |
Chamber components having textured surfaces and method of manufacture |
Aug. 17, 2004 |
| 6777352 |
Variable flow deposition apparatus and method in semiconductor substrate processing |
Aug. 17, 2004 |
| 6726769 |
Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
Apr. 27, 2004 |
| 6712019 |
Film forming apparatus having electrically insulated element that introduces power of 20-450MHz |
Mar. 30, 2004 |
| 6708645 |
Arc resistant high voltage feedthru fitting for a vacuum deposition chamber |
Mar. 23, 2004 |
| 6692624 |
Vacuum coating apparatus |
Feb. 17, 2004 |
| 6689930 |
Method and apparatus for cleaning an exhaust line in a semiconductor processing system |
Feb. 10, 2004 |
| 6685774 |
Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
Feb. 3, 2004 |
| 6682602 |
Chemical vapor deposition systems including metal complexes with chelating O- and/or N-donor ligands |
Jan. 27, 2004 |
| 6680420 |
Apparatus for cleaning an exhaust line in a semiconductor processing system |
Jan. 20, 2004 |
| 6675816 |
Plasma CVD apparatus and dry cleaning method of the same |
Jan. 13, 2004 |
| 6653792 |
Ion implanting system |
Nov. 25, 2003 |
| 6653212 |
Method and apparatus for thin-film deposition, and method of manufacturing thin-film semiconductor device |
Nov. 25, 2003 |
| 6649223 |
Method and apparatus for inductively coupled plasma treatment |
Nov. 18, 2003 |
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