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Class Information
Number: 118/723MW
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Microwave gas energizing means (e.g., 2.45 gigahertz, microwave plasma, etc.)
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7608798 |
Plasma catalyst |
Oct. 27, 2009 |
| 7603963 |
Controlled zone microwave plasma system |
Oct. 20, 2009 |
| 7601619 |
Method and apparatus for plasma processing |
Oct. 13, 2009 |
| 7592564 |
Plasma generation and processing with multiple radiation sources |
Sep. 22, 2009 |
| 7584714 |
Method and system for improving coupling between a surface wave plasma source and a plasma space |
Sep. 8, 2009 |
| 7582845 |
Microwave plasma processing device and plasma processing gas supply member |
Sep. 1, 2009 |
| 7581511 |
Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
Sep. 1, 2009 |
| 7574974 |
Device for production of a plasma sheet |
Aug. 18, 2009 |
| 7565879 |
Plasma processing apparatus |
Jul. 28, 2009 |
| 7562638 |
Methods and arrangement for implementing highly efficient plasma traps |
Jul. 21, 2009 |
| 7554053 |
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system |
Jun. 30, 2009 |
| 7547860 |
Microwave plasma processing apparatus for semiconductor element production |
Jun. 16, 2009 |
| 7544269 |
Method and apparatus for electron density measurement |
Jun. 9, 2009 |
| 7533628 |
Volume-optimized reactor for simultaneously coating eyeglasses on both sides |
May. 19, 2009 |
| 7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same |
May. 12, 2009 |
| 7527706 |
Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
May. 5, 2009 |
| 7520245 |
Plasma processing apparatus |
Apr. 21, 2009 |
| 7506609 |
System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber |
Mar. 24, 2009 |
| 7501600 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
Mar. 10, 2009 |
| 7491908 |
Plasma processing device and ashing method |
Feb. 17, 2009 |
| 7485204 |
ECR plasma source and ECR plasma device |
Feb. 3, 2009 |
| 7485827 |
Plasma generator |
Feb. 3, 2009 |
| 7478609 |
Plasma process apparatus and its processor |
Jan. 20, 2009 |
| 7469654 |
Plasma processing device |
Dec. 30, 2008 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7445690 |
Plasma processing apparatus |
Nov. 4, 2008 |
| 7442271 |
Miniature microwave plasma torch application and method of use thereof |
Oct. 28, 2008 |
| 7430985 |
Plasma processing equipment |
Oct. 7, 2008 |
| 7418921 |
Plasma CVD apparatus for forming uniform film |
Sep. 2, 2008 |
| 7410552 |
Electron cyclotron resonance equipment with variable flare angle of horn antenna |
Aug. 12, 2008 |
| 7411352 |
Dual plasma beam sources and method |
Aug. 12, 2008 |
| 7404991 |
Device and control method for micro wave plasma processing |
Jul. 29, 2008 |
| 7402526 |
Plasma processing, deposition, and ALD methods |
Jul. 22, 2008 |
| 7395779 |
Plasma processing apparatus |
Jul. 8, 2008 |
| 7396431 |
Plasma processing system for treating a substrate |
Jul. 8, 2008 |
| 7392760 |
Microwave-excited plasma processing apparatus |
Jul. 1, 2008 |
| 7381290 |
Microwave plasma generator |
Jun. 3, 2008 |
| 7354504 |
Dielectric profile controlled microwave sterilization system |
Apr. 8, 2008 |
| 7338575 |
Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
Mar. 4, 2008 |
| 7325511 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus |
Feb. 5, 2008 |
| 7323231 |
Apparatus and methods for plasma vapor deposition processes |
Jan. 29, 2008 |
| 7311796 |
Plasma processing apparatus |
Dec. 25, 2007 |
| 7312415 |
Plasma method with high input power |
Dec. 25, 2007 |
| 7305935 |
Slotted antenna waveguide plasma source |
Dec. 11, 2007 |
| 7305934 |
Plasma treatment apparatus and plasma generation method |
Dec. 11, 2007 |
| 7302910 |
Plasma apparatus and production method thereof |
Dec. 4, 2007 |
| 7296533 |
Radial antenna and plasma device using it |
Nov. 20, 2007 |
| 7279066 |
Apparatus for forming silicon oxide film |
Oct. 9, 2007 |
| 7263447 |
Method and apparatus for electron density measurement and verifying process status |
Aug. 28, 2007 |
| 7255062 |
Pseudo surface microwave produced plasma shielding system |
Aug. 14, 2007 |
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