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Class Information
Number: 118/723ME
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Microwave gas energizing means (e.g., 2.45 gigahertz, microwave plasma, etc.) > Producing energized gas remotely located from substrate
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7603963 |
Controlled zone microwave plasma system |
Oct. 20, 2009 |
| 7604708 |
Cleaning of native oxide with hydrogen-containing radicals |
Oct. 20, 2009 |
| 7562638 |
Methods and arrangement for implementing highly efficient plasma traps |
Jul. 21, 2009 |
| 7554053 |
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system |
Jun. 30, 2009 |
| 7520245 |
Plasma processing apparatus |
Apr. 21, 2009 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7442271 |
Miniature microwave plasma torch application and method of use thereof |
Oct. 28, 2008 |
| 7442272 |
Apparatus for manufacturing semiconductor device |
Oct. 28, 2008 |
| 7404991 |
Device and control method for micro wave plasma processing |
Jul. 29, 2008 |
| 7311796 |
Plasma processing apparatus |
Dec. 25, 2007 |
| 7156046 |
Plasma CVD apparatus |
Jan. 2, 2007 |
| 7037376 |
Backflush chamber clean |
May. 2, 2006 |
| 7017514 |
Method and apparatus for plasma optimization in water processing |
Mar. 28, 2006 |
| 6919672 |
Closed drift ion source |
Jul. 19, 2005 |
| 6916400 |
Device for the plasma treatment of gases |
Jul. 12, 2005 |
| 6863021 |
Method and apparatus for providing and integrating a general metal delivery source (GMDS) with atomic layer deposition (ALD) |
Mar. 8, 2005 |
| 6858120 |
Method and apparatus for the fabrication of ferroelectric films |
Feb. 22, 2005 |
| 6835277 |
Ashing apparatus for semiconductor device |
Dec. 28, 2004 |
| 6783627 |
Reactor with remote plasma system and method of processing a semiconductor substrate |
Aug. 31, 2004 |
| 6761796 |
Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing |
Jul. 13, 2004 |
| 6749717 |
Device for in-situ cleaning of an inductively-coupled plasma chambers |
Jun. 15, 2004 |
| 6706141 |
Device to generate excited/ionized particles in a plasma |
Mar. 16, 2004 |
| 6692649 |
Inductively coupled plasma downstream strip module |
Feb. 17, 2004 |
| 6676802 |
Remote exposure of workpieces using a plasma |
Jan. 13, 2004 |
| 6656282 |
Atomic layer deposition apparatus and process using remote plasma |
Dec. 2, 2003 |
| 6656540 |
Method for forming metallic film and apparatus for forming the same |
Dec. 2, 2003 |
| 6652763 |
Method and apparatus for large-scale diamond polishing |
Nov. 25, 2003 |
| 6641698 |
Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow |
Nov. 4, 2003 |
| 6617152 |
Method for creating a cell growth surface on a polymeric substrate |
Sep. 9, 2003 |
| 6607633 |
Plasma generating device and plasma processing apparatus comprising such a device |
Aug. 19, 2003 |
| 6603269 |
Resonant chamber applicator for remote plasma source |
Aug. 5, 2003 |
| 6561198 |
Method and installation for treating a metal part surface |
May. 13, 2003 |
| 6502529 |
Chamber having improved gas energizer and method |
Jan. 7, 2003 |
| 6503330 |
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition |
Jan. 7, 2003 |
| 6454912 |
Method and apparatus for the fabrication of ferroelectric films |
Sep. 24, 2002 |
| 6450117 |
Directing a flow of gas in a substrate processing chamber |
Sep. 17, 2002 |
| 6444037 |
Chamber liner for high temperature processing chamber |
Sep. 3, 2002 |
| 6439155 |
Remote plasma generator with sliding short tuner |
Aug. 27, 2002 |
| 6435131 |
Ion flow forming method and apparatus |
Aug. 20, 2002 |
| 6431114 |
Method and apparatus for plasma processing |
Aug. 13, 2002 |
| 6412438 |
Downstream sapphire elbow joint for remote plasma generator |
Jul. 2, 2002 |
| 6401653 |
Microwave plasma generator |
Jun. 11, 2002 |
| 6390018 |
Microwave plasma treatment apparatus |
May. 21, 2002 |
| 6387207 |
Integration of remote plasma generator with semiconductor processing chamber |
May. 14, 2002 |
| 6372084 |
Plasma processing apparatus with a dielectric plate having a thickness based on a wavelength of a microwave introduced into a process chamber through the dielectric plate |
Apr. 16, 2002 |
| 6372305 |
PCVD apparatus and a method of manufacturing an optical fiber, a preform rod and a jacket tube as well as the optical fiber manufactured therewith |
Apr. 16, 2002 |
| 6367412 |
Porous ceramic liner for a plasma source |
Apr. 9, 2002 |
| 6369493 |
Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket |
Apr. 9, 2002 |
| 6360685 |
Sub-atmospheric chemical vapor deposition system with dopant bypass |
Mar. 26, 2002 |
| 6352050 |
Remote plasma mixer |
Mar. 5, 2002 |
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