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Class Information
Number: 118/723IR
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Radio frequency antenna or radio frequency inductive coil discharge means > Producing energized gas remotely located from substrate
Description:










Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8641862 High dose implantation strip (HDIS) in H2 base chemistry Feb. 4, 2014
8623142 Coating apparatus Jan. 7, 2014
8607733 Atomic layer deposition apparatus and atomic layer deposition method Dec. 17, 2013
8608902 Plasma processing apparatus Dec. 17, 2013
8608903 Plasma processing apparatus and plasma processing method Dec. 17, 2013
8597464 Inductively coupled plasma reactor with multiple magnetic cores Dec. 3, 2013
8590485 Small form factor plasma source for high density wide ribbon ion beam generation Nov. 26, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8578879 Apparatus for VHF impedance match tuning Nov. 12, 2013
8551289 Plasma processing apparatus Oct. 8, 2013
8540843 Plasma chamber top piece assembly Sep. 24, 2013
8460508 Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device Jun. 11, 2013
8461554 Apparatus and method for charge neutralization during processing of a workpiece Jun. 11, 2013
8453600 Substrate processing apparatus Jun. 4, 2013
8425719 Plasma generating apparatus Apr. 23, 2013
8414736 Plasma reactor with tiltable overhead RF inductive source Apr. 9, 2013
8377209 Linear plasma source for dynamic (moving substrate) plasma processing Feb. 19, 2013
8361274 Etching apparatus and etching method Jan. 29, 2013
8356575 Ion source and plasma processing apparatus Jan. 22, 2013
8349128 Method and apparatus for stable plasma processing Jan. 8, 2013
8336490 Plasma processing apparatus Dec. 25, 2012
8317971 Plasma processing apparatus and method of manufacturing magnetic recording medium Nov. 27, 2012
8293069 Inductively coupled plasma apparatus Oct. 23, 2012
8282767 Plasma processing apparatus Oct. 9, 2012
8272348 Method for plasma deposition and plasma CVD system Sep. 25, 2012
8240271 Substrate processing apparatus Aug. 14, 2012
8191505 Process gas introducing mechanism and plasma processing device Jun. 5, 2012
8157976 Apparatus for cathodic vacuum-arc coating deposition Apr. 17, 2012
8147614 Multi-gas flow diffuser Apr. 3, 2012
8100081 Edge removal of films using externally generated plasma species Jan. 24, 2012
8087379 Localized plasma processing Jan. 3, 2012
8083892 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Dec. 27, 2011
8075734 Remote inductively coupled plasma source for CVD chamber cleaning Dec. 13, 2011
8070879 Apparatus and method for hybrid chemical processing Dec. 6, 2011
8062473 Plasma processing apparatus and method Nov. 22, 2011
8057633 Post-etch treatment system for removing residue on a substrate Nov. 15, 2011
8038836 Plasma processing apparatus Oct. 18, 2011
8028655 Plasma processing system with locally-efficient inductive plasma coupling Oct. 4, 2011
8021515 Inductively coupled plasma processing apparatus Sep. 20, 2011
7942112 Method and apparatus for preventing the formation of a plasma-inhibiting substance May. 17, 2011
7909961 Method and apparatus for photomask plasma etching Mar. 22, 2011
7910865 Method and arrangement for supplying power to several induction coils in an induction apparatus Mar. 22, 2011
7883601 Apparatus and method for controlling relative particle speeds in a plasma Feb. 8, 2011
7867355 Adjustable height PIF probe Jan. 11, 2011
7862683 Chamber dry cleaning Jan. 4, 2011
7854213 Modulated gap segmented antenna for inductively-coupled plasma processing system Dec. 21, 2010
7845310 Wide area radio frequency plasma apparatus for processing multiple substrates Dec. 7, 2010
7811410 Matching circuit for a complex radio frequency (RF) waveform Oct. 12, 2010
7771562 Etch system with integrated inductive coupling Aug. 10, 2010
7748344 Segmented resonant antenna for radio frequency inductively coupled plasmas Jul. 6, 2010

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