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Class Information
Number: 118/723I
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Radio frequency antenna or radio frequency inductive coil discharge means
Description:










Sub-classes under this class:

Class Number Class Name Patents
118/723IR Producing energized gas remotely located from substrate 272


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
8691048 Plasma stabilization method and plasma apparatus Apr. 8, 2014
8692467 Synchronized and shortened master-slave RF pulsing in a plasma processing chamber Apr. 8, 2014
8674607 Plasma processing apparatus and processing gas supply structure thereof Mar. 18, 2014
8674273 Heat treatment apparatus Mar. 18, 2014
8671878 Profile and CD uniformity control by plasma oxidation treatment Mar. 18, 2014
8662010 Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method Mar. 4, 2014
8663572 Micro plasma jet generator Mar. 4, 2014
8643281 Signal generation system Feb. 4, 2014
8623171 Plasma processing apparatus Jan. 7, 2014
8613828 Procedure and device for the production of a plasma Dec. 24, 2013
8608903 Plasma processing apparatus and plasma processing method Dec. 17, 2013
8608902 Plasma processing apparatus Dec. 17, 2013
8607733 Atomic layer deposition apparatus and atomic layer deposition method Dec. 17, 2013
8597463 Inductively coupled plasma processing apparatus Dec. 3, 2013
8597464 Inductively coupled plasma reactor with multiple magnetic cores Dec. 3, 2013
8590485 Small form factor plasma source for high density wide ribbon ion beam generation Nov. 26, 2013
8591711 Method and chamber for inductively coupled plasma processing for cylinderical material with three-dimensional surface Nov. 26, 2013
8578879 Apparatus for VHF impedance match tuning Nov. 12, 2013
8580076 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Nov. 12, 2013
8562785 Gas distribution showerhead for inductively coupled plasma etch reactor Oct. 22, 2013
8551289 Plasma processing apparatus Oct. 8, 2013
8540843 Plasma chamber top piece assembly Sep. 24, 2013
8528498 Integrated steerability array arrangement for minimizing non-uniformity Sep. 10, 2013
8522716 Protective coating for a plasma processing chamber part and a method of use Sep. 3, 2013
8518209 Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system Aug. 27, 2013
8500952 Plasma confinement rings having reduced polymer deposition characteristics Aug. 6, 2013
8485128 Movable ground ring for a plasma processing chamber Jul. 16, 2013
8460508 Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device Jun. 11, 2013
8453600 Substrate processing apparatus Jun. 4, 2013
8454794 Antenna for plasma processor and apparatus Jun. 4, 2013
8444870 Inductive plasma source with high coupling efficiency May. 21, 2013
8444806 Plasma generator, plasma control method and method of producing substrate May. 21, 2013
8425719 Plasma generating apparatus Apr. 23, 2013
8419893 Shielded lid heater assembly Apr. 16, 2013
8419894 Plasma generator, plasma control method and method of producing substrate Apr. 16, 2013
8413604 Slotted electrostatic shield modification for improved etch and CVD process uniformity Apr. 9, 2013
8414736 Plasma reactor with tiltable overhead RF inductive source Apr. 9, 2013
8409400 Inductive plasma chamber having multi discharge tube bridge Apr. 2, 2013
8404080 Apparatus to treat a substrate Mar. 26, 2013
8394232 Plasma processing apparatus Mar. 12, 2013
8389420 Method and apparatus for forming silicon oxide film Mar. 5, 2013
8377209 Linear plasma source for dynamic (moving substrate) plasma processing Feb. 19, 2013
8372239 Plasma processing apparatus Feb. 12, 2013
8360003 Plasma reactor with uniform process rate distribution by improved RF ground return path Jan. 29, 2013
8356575 Ion source and plasma processing apparatus Jan. 22, 2013
8349128 Method and apparatus for stable plasma processing Jan. 8, 2013
8343309 Substrate processing apparatus Jan. 1, 2013
8336488 Multi-station plasma reactor with multiple plasma regions Dec. 25, 2012
8336490 Plasma processing apparatus Dec. 25, 2012
8318269 Induction for thermochemical processes, and associated systems and methods Nov. 27, 2012

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17










 
 
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