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Class Information
Number: 118/723I
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Radio frequency antenna or radio frequency inductive coil discharge means
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611603 |
Plasma processing apparatus having impedance varying electrodes |
Nov. 3, 2009 |
| 7608162 |
Plasma processing apparatus and method |
Oct. 27, 2009 |
| 7604709 |
Plasma processing apparatus |
Oct. 20, 2009 |
| 7602127 |
Phase and frequency control of a radio frequency generator from an external source |
Oct. 13, 2009 |
| 7595462 |
Plasma processing method and plasma processing apparatus |
Sep. 29, 2009 |
| 7591232 |
Internal coil with segmented shield and inductively-coupled plasma source and processing system therewith |
Sep. 22, 2009 |
| 7591935 |
Enhanced reliability deposition baffle for iPVD |
Sep. 22, 2009 |
| 7578258 |
Methods and apparatus for selective pre-coating of a plasma processing chamber |
Aug. 25, 2009 |
| 7571697 |
Plasma processor coil |
Aug. 11, 2009 |
| 7569790 |
Method and apparatus for processing metal bearing gases |
Aug. 4, 2009 |
| 7567037 |
High frequency power supply device and plasma generator |
Jul. 28, 2009 |
| 7557362 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
Jul. 7, 2009 |
| 7541558 |
Inductively-coupled toroidal plasma source |
Jun. 2, 2009 |
| 7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same |
May. 12, 2009 |
| 7520246 |
Power supply antenna and power supply method |
Apr. 21, 2009 |
| 7513971 |
Flat style coil for improved precision etch uniformity |
Apr. 7, 2009 |
| 7511246 |
Induction device for generating a plasma |
Mar. 31, 2009 |
| 7503996 |
Multiple frequency plasma chamber, switchable RF system, and processes using same |
Mar. 17, 2009 |
| 7504041 |
Method of processing a workpiece in a plasma reactor employing a dynamically adjustable plasma source power applicator |
Mar. 17, 2009 |
| 7501600 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
Mar. 10, 2009 |
| 7481904 |
Plasma device |
Jan. 27, 2009 |
| 7482550 |
Quartz guard ring |
Jan. 27, 2009 |
| 7464662 |
Compact, distributed inductive element for large scale inductively-coupled plasma sources |
Dec. 16, 2008 |
| 7458335 |
Uniform magnetically enhanced reactive ion etching using nested electromagnetic coils |
Dec. 2, 2008 |
| 7455030 |
Plasma generating apparatus |
Nov. 25, 2008 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7441513 |
Plasma-generated coating apparatus for medical devices and a method of coating deposition |
Oct. 28, 2008 |
| 7442272 |
Apparatus for manufacturing semiconductor device |
Oct. 28, 2008 |
| 7442273 |
Apparatus using hybrid coupled plasma |
Oct. 28, 2008 |
| 7435926 |
Methods and array for creating a mathematical model of a plasma processing system |
Oct. 14, 2008 |
| 7430984 |
Method to drive spatially separate resonant structure with spatially distinct plasma secondaries using a single generator and switching elements |
Oct. 7, 2008 |
| 7431797 |
Plasma reactor with a dynamically adjustable plasma source power applicator |
Oct. 7, 2008 |
| 7426900 |
Integrated electrostatic inductive coupling for plasma processing |
Sep. 23, 2008 |
| 7419566 |
Plasma reactor |
Sep. 2, 2008 |
| 7413627 |
Deposition chamber and method for depositing low dielectric constant films |
Aug. 19, 2008 |
| 7406925 |
Plasma processing method and apparatus |
Aug. 5, 2008 |
| 7404879 |
Ionized physical vapor deposition apparatus using helical self-resonant coil |
Jul. 29, 2008 |
| 7399943 |
Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece |
Jul. 15, 2008 |
| 7381292 |
Inductively coupled plasma generating apparatus incorporating serpentine coil antenna |
Jun. 3, 2008 |
| 7374620 |
Substrate processing apparatus |
May. 20, 2008 |
| 7374648 |
Single piece coil support assemblies, coil constructions and methods of assembling coil constructions |
May. 20, 2008 |
| 7367281 |
Plasma antenna |
May. 6, 2008 |
| 7363876 |
Multi-core transformer plasma source |
Apr. 29, 2008 |
| 7354501 |
Upper chamber for high density plasma CVD |
Apr. 8, 2008 |
| RE40195 |
Large area plasma source |
Apr. 1, 2008 |
| 7345428 |
Transducer package for process control |
Mar. 18, 2008 |
| 7342361 |
Plasma source |
Mar. 11, 2008 |
| 7338577 |
Inductively coupled plasma processing apparatus having internal linear antenna for large area processing |
Mar. 4, 2008 |
| 7331306 |
Plasma processing method and apparatus |
Feb. 19, 2008 |
| 7326872 |
Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks |
Feb. 5, 2008 |
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