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Class Information
Number: 118/723EB
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Vacuum evaporation means within deposition chamber (e.g., activated reactive evaporation, etc.) > Electron beam evaporator
Description:










Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8658004 Vapor-barrier vacuum isolation system Feb. 25, 2014
8642140 Ceramic coating deposition Feb. 4, 2014
8628617 System and method for top-down material deposition Jan. 14, 2014
8500978 Composite coating apparatus Aug. 6, 2013
8500977 Coating apparatus Aug. 6, 2013
8491972 Method of producing encapsulated nanopowders and installation for its realization Jul. 23, 2013
8444767 Coating device May. 21, 2013
8375889 System and method for providing an improved shutter for use with a shadow tab mask Feb. 19, 2013
8360002 In-situ flux measurement devices, methods, and systems Jan. 29, 2013
8347814 Method and apparatus for coating a curved surface Jan. 8, 2013
8337620 Crucible having a monitor system and a cover with a slot which receives light for illuminating coating material Dec. 25, 2012
8286582 Vapor deposition of dissimilar materials Oct. 16, 2012
8282794 Filtered cathodic arc deposition method and apparatus Oct. 9, 2012
8261690 In-situ flux measurement devices, methods, and systems Sep. 11, 2012
8142568 Apparatus for synthesizing a single-wall carbon nanotube array Mar. 27, 2012
8136480 Physical vapor deposition system Mar. 20, 2012
8100083 Process and apparatus for depositing a ceramic coating Jan. 24, 2012
7997227 Vacuum coater device and mechanism for supporting and manipulating workpieces in same Aug. 16, 2011
7931787 Electron-assisted deposition process and apparatus Apr. 26, 2011
7866278 Thin-film deposition system Jan. 11, 2011
7803255 Device for plasma-activated vapor coating of large surfaces Sep. 28, 2010
7727335 Device and method for the evaporative deposition of a coating material Jun. 1, 2010
7705330 Electron beam irradiation device Apr. 27, 2010
7700166 Process for evaporating high-melting materials Apr. 20, 2010
7595098 Method and apparatus for depositing material on a substrate Sep. 29, 2009
7556695 Apparatus to make nanolaminate thermal barrier coatings Jul. 7, 2009
7435980 Electron beam irradiation device Oct. 14, 2008
7393416 Vapor deposition process and apparatus therefor Jul. 1, 2008
7276140 Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same Oct. 2, 2007
7182976 Process for forming a thin film and apparatus therefor Feb. 27, 2007
7183564 Channel spark source for generating a stable focused electron beam Feb. 27, 2007
7152549 Vapor deposition system Dec. 26, 2006
7122949 Cylindrical electron beam generating/triggering device and method for generation of electrons Oct. 17, 2006
7014889 Process and apparatus for plasma activated depositions in a vacuum Mar. 21, 2006
6988463 Ion beam source with gas introduced directly into deposition/vacuum chamber Jan. 24, 2006
6983718 Electron beam physical vapor deposition apparatus Jan. 10, 2006
6946034 Electron beam physical vapor deposition apparatus Sep. 20, 2005
6923868 Installation for electron-ray coatication of coatings Aug. 2, 2005
6918351 Apparatus for ion beam implantation Jul. 19, 2005
6905582 Configurable vacuum system and method Jun. 14, 2005
6902625 Multiple pocket electron beam source Jun. 7, 2005
6869508 Physical vapor deposition apparatus and process Mar. 22, 2005
6858119 Mobile plating system and method Feb. 22, 2005
6688254 Vapor deposition temperature control apparatus and method Feb. 10, 2004
6656518 Thin film forming method and apparatus Dec. 2, 2003
6632285 Programmable flux gradient apparatus for co-deposition of materials onto a substrate Oct. 14, 2003
6620465 Physical properties of thermal barrier coatings using electron beam-physical vapor deposition Sep. 16, 2003
6620249 Method and apparatus for depositing thin layers Sep. 16, 2003
6589351 Electron beam physical vapor deposition apparatus and crucible therefor Jul. 8, 2003
6571728 Process for producing organic electroluminescent display and apparatus for producing the same Jun. 3, 2003

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