| |
 |
|
Class Information
Number: 118/723E
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Having glow discharge electrodes (e.g., dc, ac, rf, etc.)
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7442273 |
Apparatus using hybrid coupled plasma |
Oct. 28, 2008 |
| 7441513 |
Plasma-generated coating apparatus for medical devices and a method of coating deposition |
Oct. 28, 2008 |
| 7438783 |
Plasma processing apparatus and plasma processing method |
Oct. 21, 2008 |
| 7438765 |
Adjustable shielding plate for adjusting an etching area of a semiconductor wafer and related apparatus and methods |
Oct. 21, 2008 |
| 7430986 |
Plasma confinement ring assemblies having reduced polymer deposition characteristics |
Oct. 7, 2008 |
| 7426900 |
Integrated electrostatic inductive coupling for plasma processing |
Sep. 23, 2008 |
| 7422654 |
Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
Sep. 9, 2008 |
| 7421974 |
Layer forming method, product comprising the layer, optical film, dielectric-coated electrode and plasma discharge apparatus |
Sep. 9, 2008 |
| 7418921 |
Plasma CVD apparatus for forming uniform film |
Sep. 2, 2008 |
| 7415940 |
Plasma processor |
Aug. 26, 2008 |
| 7411352 |
Dual plasma beam sources and method |
Aug. 12, 2008 |
| 7404874 |
Method and apparatus for treating wafer edge region with toroidal plasma |
Jul. 29, 2008 |
| 7399364 |
Hermetic cap layers formed on low-.kappa. films by plasma enhanced chemical vapor deposition |
Jul. 15, 2008 |
| 7393432 |
RF ground switch for plasma processing system |
Jul. 1, 2008 |
| 7389741 |
Apparatus of fabricating a display device |
Jun. 24, 2008 |
| 7387081 |
Plasma reactor including helical electrodes |
Jun. 17, 2008 |
| 7381661 |
Method for the production of a substrate with a magnetron sputter coating and unit for the same |
Jun. 3, 2008 |
| 7381291 |
Dual-chamber plasma processing apparatus |
Jun. 3, 2008 |
| 7374636 |
Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor |
May. 20, 2008 |
| 7374620 |
Substrate processing apparatus |
May. 20, 2008 |
| 7373899 |
Plasma processing apparatus using active matching |
May. 20, 2008 |
| RE40195 |
Large area plasma source |
Apr. 1, 2008 |
| 7337745 |
Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor |
Mar. 4, 2008 |
| 7332039 |
Plasma processing apparatus and method thereof |
Feb. 19, 2008 |
| 7331307 |
Thermally sprayed member, electrode and plasma processing apparatus using the electrode |
Feb. 19, 2008 |
| 7323219 |
Apparatus and method for applying diamond-like carbon coatings |
Jan. 29, 2008 |
| 7323081 |
High-frequency plasma processing apparatus |
Jan. 29, 2008 |
| 7322313 |
Plasma processing system |
Jan. 29, 2008 |
| 7316761 |
Apparatus for uniformly etching a dielectric layer |
Jan. 8, 2008 |
| 7316199 |
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber |
Jan. 8, 2008 |
| 7311784 |
Plasma processing device |
Dec. 25, 2007 |
| 7309842 |
Shielded monolithic microplasma source for prevention of continuous thin film formation |
Dec. 18, 2007 |
| 7306829 |
RF plasma reactor having a distribution chamber with at least one grid |
Dec. 11, 2007 |
| 7300684 |
Method and system for coating internal surfaces of prefabricated process piping in the field |
Nov. 27, 2007 |
| 7300558 |
Rapid cycle time gas burster |
Nov. 27, 2007 |
| 7296534 |
Hybrid ball-lock attachment apparatus |
Nov. 20, 2007 |
| 7294283 |
Penning discharge plasma source |
Nov. 13, 2007 |
| 7294224 |
Magnet assembly for plasma containment |
Nov. 13, 2007 |
| 7288166 |
Plasma processing apparatus |
Oct. 30, 2007 |
| 7282454 |
Switched uniformity control |
Oct. 16, 2007 |
| 7281492 |
System and method for generating a discharge in gases |
Oct. 16, 2007 |
| 7281491 |
Dielectric-coated electrode, plasma discharge treatment apparatus and method for forming thin film |
Oct. 16, 2007 |
| 7276135 |
Vacuum plasma processor including control in response to DC bias voltage |
Oct. 2, 2007 |
| 7270713 |
Tunable gas distribution plate assembly |
Sep. 18, 2007 |
| 7255773 |
Plasma processing apparatus and evacuation ring |
Aug. 14, 2007 |
| 7244336 |
Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift |
Jul. 17, 2007 |
| 7241397 |
Honeycomb optical window deposition shield and method for a plasma processing system |
Jul. 10, 2007 |
| 7225754 |
Plasma processing apparatus including a plurality of plasma processing units having reduced variation |
Jun. 5, 2007 |
| 7220462 |
Method and electrode assembly for non-equilibrium plasma treatment |
May. 22, 2007 |
|
|
|
