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Class Information
Number: 118/723E
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Having glow discharge electrodes (e.g., dc, ac, rf, etc.)
Description:
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7620511 |
Method for determining plasma characteristics |
Nov. 17, 2009 |
| 7618686 |
Method and apparatus for sequential plasma treatment |
Nov. 17, 2009 |
| 7615931 |
Pulsed dielectric barrier discharge |
Nov. 10, 2009 |
| 7615132 |
Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method |
Nov. 10, 2009 |
| 7615131 |
Plasma etching chamber and plasma etching system using same |
Nov. 10, 2009 |
| 7611603 |
Plasma processing apparatus having impedance varying electrodes |
Nov. 3, 2009 |
| 7611585 |
Plasma reaction chamber with a built-in magnetic core |
Nov. 3, 2009 |
| 7610874 |
Poled plasma deposition |
Nov. 3, 2009 |
| 7608162 |
Plasma processing apparatus and method |
Oct. 27, 2009 |
| 7604716 |
Methods and apparatus for generating high-density plasma |
Oct. 20, 2009 |
| 7603963 |
Controlled zone microwave plasma system |
Oct. 20, 2009 |
| 7603962 |
Rotary type CVD film forming apparatus for mass production |
Oct. 20, 2009 |
| 7601619 |
Method and apparatus for plasma processing |
Oct. 13, 2009 |
| 7601241 |
Plasma processing apparatus and plasma processing method |
Oct. 13, 2009 |
| 7594479 |
Plasma CVD device and discharge electrode |
Sep. 29, 2009 |
| 7587989 |
Plasma processing method and apparatus |
Sep. 15, 2009 |
| 7582185 |
Plasma-processing apparatus |
Sep. 1, 2009 |
| 7582184 |
Plasma processing member |
Sep. 1, 2009 |
| 7578258 |
Methods and apparatus for selective pre-coating of a plasma processing chamber |
Aug. 25, 2009 |
| 7575638 |
Apparatus for defining regions of process exclusion and process performance in a process chamber |
Aug. 18, 2009 |
| 7571698 |
Low-frequency bias power in HDP-CVD processes |
Aug. 11, 2009 |
| 7566379 |
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system |
Jul. 28, 2009 |
| 7565880 |
Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same |
Jul. 28, 2009 |
| 7556695 |
Apparatus to make nanolaminate thermal barrier coatings |
Jul. 7, 2009 |
| 7550180 |
Plasma treatment method |
Jun. 23, 2009 |
| 7543547 |
Electrode assembly for plasma processing apparatus |
Jun. 9, 2009 |
| 7543546 |
Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method |
Jun. 9, 2009 |
| 7540257 |
Plasma processing apparatus and semiconductor device manufactured by the same apparatus |
Jun. 2, 2009 |
| 7537672 |
Apparatus for plasma processing |
May. 26, 2009 |
| 7534854 |
Apparatus and method for oxidation and stabilization of polymeric materials |
May. 19, 2009 |
| 7533629 |
Arrangement, method and electrode for generating a plasma |
May. 19, 2009 |
| 7527658 |
Method of manufacturing displays and apparatus for manufacturing displays |
May. 5, 2009 |
| 7527016 |
Plasma processing apparatus |
May. 5, 2009 |
| 7524397 |
Lower electrode design for higher uniformity |
Apr. 28, 2009 |
| 7520957 |
Lid assembly for front end of line fabrication |
Apr. 21, 2009 |
| 7520244 |
Plasma treatment apparatus |
Apr. 21, 2009 |
| 7514377 |
Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device |
Apr. 7, 2009 |
| 7513954 |
Plasma processing apparatus and substrate mounting table employed therein |
Apr. 7, 2009 |
| 7513953 |
Continuous system for depositing films onto plastic bottles and method |
Apr. 7, 2009 |
| 7513214 |
Plasma processing method and apparatus |
Apr. 7, 2009 |
| 7506610 |
Plasma processing apparatus and method |
Mar. 24, 2009 |
| 7500445 |
Method and apparatus for cleaning a CVD chamber |
Mar. 10, 2009 |
| 7494561 |
Plasma processing apparatus and method, and electrode plate for plasma processing apparatus |
Feb. 24, 2009 |
| 7487740 |
Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates |
Feb. 10, 2009 |
| 7485205 |
Method, arrangement and electrode for generating an atmospheric pressure glow plasma (APG) |
Feb. 3, 2009 |
| 7481903 |
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism |
Jan. 27, 2009 |
| 7467598 |
System for, and method of, etching a surface on a wafer |
Dec. 23, 2008 |
| 7465357 |
Computer-readable medium that contains software for executing a method for cleaning a CVD chamber |
Dec. 16, 2008 |
| 7464717 |
Method for cleaning a CVD chamber |
Dec. 16, 2008 |
| 7464663 |
Roll-vortex plasma chemical vapor deposition system |
Dec. 16, 2008 |
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