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Class Information
Number: 118/723DC
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Hot cathode means for thermionic emission of electrons (e.g., tungsten filament, etc.) > With nozzle-shaped anode (i.e., dc spray gun)
Description:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7520957 |
Lid assembly for front end of line fabrication |
Apr. 21, 2009 |
| 7446479 |
High-density plasma source |
Nov. 4, 2008 |
| 7332039 |
Plasma processing apparatus and method thereof |
Feb. 19, 2008 |
| 7327089 |
Beam plasma source |
Feb. 5, 2008 |
| 7165506 |
Method and device for plasma-treating the surface of substrates by ion bombardment |
Jan. 23, 2007 |
| 6948448 |
Apparatus and method for depositing large area coatings on planar surfaces |
Sep. 27, 2005 |
| 6918352 |
Method for producing coated workpieces, uses and installation for the method |
Jul. 19, 2005 |
| 6806652 |
High-density plasma source using excited atoms |
Oct. 19, 2004 |
| 6806651 |
High-density plasma source |
Oct. 19, 2004 |
| 6745717 |
Method and apparatus for preparing nitride semiconductor surfaces |
Jun. 8, 2004 |
| 6681716 |
Apparatus and method for depositing large area coatings on non-planar surfaces |
Jan. 27, 2004 |
| 6632323 |
Method and apparatus having pin electrode for surface treatment using capillary discharge plasma |
Oct. 14, 2003 |
| 6539890 |
Multiple source deposition plasma apparatus |
Apr. 1, 2003 |
| 6525481 |
Method of making a physically and chemically active environment by means of a plasma jet and the related plasma jet |
Feb. 25, 2003 |
| 6394025 |
Vacuum film growth apparatus |
May. 28, 2002 |
| 6388381 |
Constricted glow discharge plasma source |
May. 14, 2002 |
| 6365013 |
Coating method and device |
Apr. 2, 2002 |
| 6325857 |
CVD apparatus |
Dec. 4, 2001 |
| 6213049 |
Nozzle-injector for arc plasma deposition apparatus |
Apr. 10, 2001 |
| 6077388 |
System and method for plasma etch on a spherical shaped device |
Jun. 20, 2000 |
| 5891312 |
Enhanced vacuum arc vapor deposition electrode |
Apr. 6, 1999 |
| 5846330 |
Gas injection disc assembly for CVD applications |
Dec. 8, 1998 |
| 5753045 |
Vacuum treatment system for homogeneous workpiece processing |
May. 19, 1998 |
| 5679167 |
Plasma gun apparatus for forming dense, uniform coatings on large substrates |
Oct. 21, 1997 |
| 5679159 |
Spinning substrate holder for cutting tool inserts for improved arc-jet diamond deposition |
Oct. 21, 1997 |
| 5580386 |
Coating a substrate surface with a permeation barrier |
Dec. 3, 1996 |
| 5565249 |
Method for producing diamond by a DC plasma jet |
Oct. 15, 1996 |
| 5560779 |
Apparatus for synthesizing diamond films utilizing an arc plasma |
Oct. 1, 1996 |
| 5529633 |
Apparatus for depositing a substance on a rotating surface |
Jun. 25, 1996 |
| 5468295 |
Apparatus and method for thermal spray coating interior surfaces |
Nov. 21, 1995 |
| 5435849 |
Apparatus for plasma deposition |
Jul. 25, 1995 |
| 5403399 |
Method and apparatus for vapor deposition of diamond |
Apr. 4, 1995 |
| 5382293 |
Plasma jet CVD apparatus for forming diamond films |
Jan. 17, 1995 |
| RE34806 |
Magnetoplasmadynamic processor, applications thereof and methods |
Dec. 13, 1994 |
| 5328516 |
Modular plasma gun assembly for coating the inner surfaces of hollow spaces and cavities |
Jul. 12, 1994 |
| 5314540 |
Apparatus for forming diamond film |
May. 24, 1994 |
| 5099788 |
Method and apparatus for forming a diamond film |
Mar. 31, 1992 |
| 5048457 |
Plasma/radiation assisted molecular beam epitaxy method and apparatus |
Sep. 17, 1991 |
| 4957062 |
Apparatus for plasma surface treating and preparation of membrane layers |
Sep. 18, 1990 |
| 4830702 |
Hollow cathode plasma assisted apparatus and method of diamond synthesis |
May. 16, 1989 |
| 4682564 |
Magnetoplasmadynamic processor, applications thereof and methods |
Jul. 28, 1987 |
| 4487162 |
Magnetoplasmadynamic apparatus for the separation and deposition of materials |
Dec. 11, 1984 |
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