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Class Information
Number: 118/723CB
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Vacuum evaporation means within deposition chamber (e.g., activated reactive evaporation, etc.) > Ion cluster beam
Description:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7442946 |
Nonuniform ion implantation apparatus and method using a wide beam |
Oct. 28, 2008 |
| 7421973 |
System and method for performing SIMOX implants using an ion shower |
Sep. 9, 2008 |
| 7377228 |
System for and method of gas cluster ion beam processing |
May. 27, 2008 |
| 7241360 |
Method and apparatus for neutralization of ion beam using AC ion source |
Jul. 10, 2007 |
| 7208878 |
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode |
Apr. 24, 2007 |
| 7176469 |
Negative ion source with external RF antenna |
Feb. 13, 2007 |
| 7119489 |
Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode |
Oct. 10, 2006 |
| 7107929 |
Ion implantation ion source, system and method |
Sep. 19, 2006 |
| 7094312 |
Focused particle beam systems and methods using a tilt column |
Aug. 22, 2006 |
| 7021238 |
Molecular beam epitaxy equipment |
Apr. 4, 2006 |
| 6988463 |
Ion beam source with gas introduced directly into deposition/vacuum chamber |
Jan. 24, 2006 |
| 6974771 |
Methods and apparatus for forming barrier layers in high aspect ratio vias |
Dec. 13, 2005 |
| 6957624 |
Apparatus and a method for forming an alloy layer over a substrate |
Oct. 25, 2005 |
| 6918351 |
Apparatus for ion beam implantation |
Jul. 19, 2005 |
| 6874443 |
Layer-by-layer etching apparatus using neutral beam and etching method using the same |
Apr. 5, 2005 |
| 6676989 |
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology |
Jan. 13, 2004 |
| 6629508 |
Ionizer for gas cluster ion beam formation |
Oct. 7, 2003 |
| 6624081 |
Enhanced etching/smoothing of dielectric surfaces |
Sep. 23, 2003 |
| 6613240 |
Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
Sep. 2, 2003 |
| 6537606 |
System and method for improving thin films by gas cluster ion beam processing |
Mar. 25, 2003 |
| 6491759 |
Combinatorial synthesis system |
Dec. 10, 2002 |
| 6375790 |
Adaptive GCIB for smoothing surfaces |
Apr. 23, 2002 |
| 6338312 |
Integrated ion implant scrubber system |
Jan. 15, 2002 |
| 6331227 |
Enhanced etching/smoothing of dielectric surfaces |
Dec. 18, 2001 |
| 6236163 |
Multiple-beam ion-beam assembly |
May. 22, 2001 |
| 6220204 |
Film deposition method for forming copper film |
Apr. 24, 2001 |
| 6160350 |
Ion plating apparatus |
Dec. 12, 2000 |
| 6063248 |
Process chamber isolation system in a deposition apparatus |
May. 16, 2000 |
| 6032611 |
Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device |
Mar. 7, 2000 |
| 5910220 |
Apparatus and method for selective area deposition of thin films on electrically biased substrates |
Jun. 8, 1999 |
| 5858450 |
Film forming method and apparatus therefor |
Jan. 12, 1999 |
| 5855683 |
Thin film deposition apparatus |
Jan. 5, 1999 |
| 5795385 |
Method of forming single-crystalline thin film by beam irradiator |
Aug. 18, 1998 |
| 5785763 |
Electron-gun evaporation system having evaporation-source stream regulator |
Jul. 28, 1998 |
| 5776253 |
Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device |
Jul. 7, 1998 |
| 5679166 |
Magnetic recording media, magnetic recording media fabrication method, and fabrication equipment |
Oct. 21, 1997 |
| 5656092 |
Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter |
Aug. 12, 1997 |
| 5647279 |
Printing machine roller and method of production thereof |
Jul. 15, 1997 |
| 5588999 |
Thin film forming device |
Dec. 31, 1996 |
| 5525158 |
Thin film deposition apparatus |
Jun. 11, 1996 |
| 5354445 |
Thin film-forming apparatus |
Oct. 11, 1994 |
| 5100526 |
Apparatus for forming thin film |
Mar. 31, 1992 |
| 5099791 |
Cluster beam thin film deposition apparatus with thermionic electron control |
Mar. 31, 1992 |
| 5079224 |
Production method of superconductive thin film and a device thereof |
Jan. 7, 1992 |
| 4882023 |
Method and system for producing thin films |
Nov. 21, 1989 |
| 4811690 |
Thin film deposition apparatus |
Mar. 14, 1989 |
| 4805555 |
Apparatus for forming a thin film |
Feb. 21, 1989 |
| 4799454 |
Apparatus for forming a thin film |
Jan. 24, 1989 |
| 4687939 |
Method and apparatus for forming film by ion beam |
Aug. 18, 1987 |
| 4559901 |
Ion beam deposition apparatus |
Dec. 24, 1985 |
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