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Class Information
Number: 118/723CB
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Vacuum evaporation means within deposition chamber (e.g., activated reactive evaporation, etc.) > Ion cluster beam
Description:


Patents under this class:
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Patent Number Title Of Patent Date Issued
7442946 Nonuniform ion implantation apparatus and method using a wide beam Oct. 28, 2008
7421973 System and method for performing SIMOX implants using an ion shower Sep. 9, 2008
7377228 System for and method of gas cluster ion beam processing May. 27, 2008
7241360 Method and apparatus for neutralization of ion beam using AC ion source Jul. 10, 2007
7208878 Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode Apr. 24, 2007
7176469 Negative ion source with external RF antenna Feb. 13, 2007
7119489 Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode Oct. 10, 2006
7107929 Ion implantation ion source, system and method Sep. 19, 2006
7094312 Focused particle beam systems and methods using a tilt column Aug. 22, 2006
7021238 Molecular beam epitaxy equipment Apr. 4, 2006
6988463 Ion beam source with gas introduced directly into deposition/vacuum chamber Jan. 24, 2006
6974771 Methods and apparatus for forming barrier layers in high aspect ratio vias Dec. 13, 2005
6957624 Apparatus and a method for forming an alloy layer over a substrate Oct. 25, 2005
6918351 Apparatus for ion beam implantation Jul. 19, 2005
6874443 Layer-by-layer etching apparatus using neutral beam and etching method using the same Apr. 5, 2005
6676989 Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology Jan. 13, 2004
6629508 Ionizer for gas cluster ion beam formation Oct. 7, 2003
6624081 Enhanced etching/smoothing of dielectric surfaces Sep. 23, 2003
6613240 Method and apparatus for smoothing thin conductive films by gas cluster ion beam Sep. 2, 2003
6537606 System and method for improving thin films by gas cluster ion beam processing Mar. 25, 2003
6491759 Combinatorial synthesis system Dec. 10, 2002
6375790 Adaptive GCIB for smoothing surfaces Apr. 23, 2002
6338312 Integrated ion implant scrubber system Jan. 15, 2002
6331227 Enhanced etching/smoothing of dielectric surfaces Dec. 18, 2001
6236163 Multiple-beam ion-beam assembly May. 22, 2001
6220204 Film deposition method for forming copper film Apr. 24, 2001
6160350 Ion plating apparatus Dec. 12, 2000
6063248 Process chamber isolation system in a deposition apparatus May. 16, 2000
6032611 Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device Mar. 7, 2000
5910220 Apparatus and method for selective area deposition of thin films on electrically biased substrates Jun. 8, 1999
5858450 Film forming method and apparatus therefor Jan. 12, 1999
5855683 Thin film deposition apparatus Jan. 5, 1999
5795385 Method of forming single-crystalline thin film by beam irradiator Aug. 18, 1998
5785763 Electron-gun evaporation system having evaporation-source stream regulator Jul. 28, 1998
5776253 Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device Jul. 7, 1998
5679166 Magnetic recording media, magnetic recording media fabrication method, and fabrication equipment Oct. 21, 1997
5656092 Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter Aug. 12, 1997
5647279 Printing machine roller and method of production thereof Jul. 15, 1997
5588999 Thin film forming device Dec. 31, 1996
5525158 Thin film deposition apparatus Jun. 11, 1996
5354445 Thin film-forming apparatus Oct. 11, 1994
5100526 Apparatus for forming thin film Mar. 31, 1992
5099791 Cluster beam thin film deposition apparatus with thermionic electron control Mar. 31, 1992
5079224 Production method of superconductive thin film and a device thereof Jan. 7, 1992
4882023 Method and system for producing thin films Nov. 21, 1989
4811690 Thin film deposition apparatus Mar. 14, 1989
4805555 Apparatus for forming a thin film Feb. 21, 1989
4799454 Apparatus for forming a thin film Jan. 24, 1989
4687939 Method and apparatus for forming film by ion beam Aug. 18, 1987
4559901 Ion beam deposition apparatus Dec. 24, 1985

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