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Class Information
Number: 118/723AN
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Microwave gas energizing means (e.g., 2.45 gigahertz, microwave plasma, etc.) > Having antenna
Description:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6622650 |
Plasma processing apparatus |
Sep. 23, 2003 |
| 6623595 |
Wavy and roughened dome in plasma processing reactor |
Sep. 23, 2003 |
| 6592710 |
Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator |
Jul. 15, 2003 |
| 6578514 |
Modular device of tubular plasma source |
Jun. 17, 2003 |
| 6568346 |
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply |
May. 27, 2003 |
| 6551446 |
Externally excited torroidal plasma source with a gas distribution plate |
Apr. 22, 2003 |
| 6531031 |
Plasma etching installation |
Mar. 11, 2003 |
| 6528752 |
Plasma processing apparatus and plasma processing method |
Mar. 4, 2003 |
| 6527909 |
Plasma processing apparatus |
Mar. 4, 2003 |
| 6514376 |
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
Feb. 4, 2003 |
| 6500315 |
Method and apparatus for forming a layer on a substrate |
Dec. 31, 2002 |
| 6494986 |
Externally excited multiple torroidal plasma source |
Dec. 17, 2002 |
| 6481370 |
Plasma processsing apparatus |
Nov. 19, 2002 |
| 6474258 |
Apparatus and method for improving plasma distribution and performance in an inductively coupled plasma |
Nov. 5, 2002 |
| 6470824 |
Semiconductor manufacturing apparatus |
Oct. 29, 2002 |
| 6468388 |
Reactor chamber for an externally excited torroidal plasma source with a gas distribution plate |
Oct. 22, 2002 |
| 6463873 |
High density plasmas |
Oct. 15, 2002 |
| 6453842 |
Externally excited torroidal plasma source using a gas distribution plate |
Sep. 24, 2002 |
| 6454898 |
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
Sep. 24, 2002 |
| 6447635 |
Plasma processing system and system using wide area planar antenna |
Sep. 10, 2002 |
| 6446572 |
Embedded plasma source for plasma density improvement |
Sep. 10, 2002 |
| 6440220 |
Method and apparatus for inhibiting infiltration of a reactive gas into porous refractory insulation |
Aug. 27, 2002 |
| 6432260 |
Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereof |
Aug. 13, 2002 |
| 6422173 |
Apparatus and methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system |
Jul. 23, 2002 |
| 6424091 |
Plasma treatment apparatus and plasma treatment method performed by use of the same apparatus |
Jul. 23, 2002 |
| 6413359 |
Plasma reactor with high selectivity and reduced damage |
Jul. 2, 2002 |
| 6408786 |
Semiconductor processing equipment having tiled ceramic liner |
Jun. 25, 2002 |
| 6401652 |
Plasma reactor inductive coil antenna with flat surface facing the plasma |
Jun. 11, 2002 |
| 6397775 |
Deposited film forming system and process |
Jun. 4, 2002 |
| 6392351 |
Inductive RF plasma source with external discharge bridge |
May. 21, 2002 |
| 6382129 |
Semiconductor wafer processor, plasma generating apparatus, magnetic field generator, and method of generating a magnetic field |
May. 7, 2002 |
| 6357385 |
Plasma device |
Mar. 19, 2002 |
| 6355573 |
Plasma processing method and apparatus |
Mar. 12, 2002 |
| 6352049 |
Plasma assisted processing chamber with separate control of species density |
Mar. 5, 2002 |
| 6352611 |
Ceramic composition for an apparatus and method for processing a substrate |
Mar. 5, 2002 |
| 6347602 |
Plasma processing apparatus |
Feb. 19, 2002 |
| 6346915 |
Plasma processing method and apparatus |
Feb. 12, 2002 |
| 6343565 |
Flat antenna having rounded slot openings and plasma processing apparatus using the flat antenna |
Feb. 5, 2002 |
| 6341574 |
Plasma processing systems |
Jan. 29, 2002 |
| 6339997 |
Plasma processing apparatus |
Jan. 22, 2002 |
| 6325018 |
Flat antenna having openings provided with conductive materials accommodated therein and plasma processing apparatus using the flat antenna |
Dec. 4, 2001 |
| 6322662 |
Plasma treatment system |
Nov. 27, 2001 |
| 6312556 |
Beat frequency modulation for plasma generation |
Nov. 6, 2001 |
| 6309978 |
Beat frequency modulation for plasma generation |
Oct. 30, 2001 |
| 6305316 |
Integrated power oscillator RF source of plasma immersion ion implantation system |
Oct. 23, 2001 |
| 6291939 |
Ion source device |
Sep. 18, 2001 |
| 6268700 |
Vacuum plasma processor having coil with intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil |
Jul. 31, 2001 |
| 6265831 |
Plasma processing method and apparatus with control of rf bias |
Jul. 24, 2001 |
| 6264812 |
Method and apparatus for generating a plasma |
Jul. 24, 2001 |
| 6262538 |
High density plasma tool with adjustable uniformity and stochastic electron heating for reduced gas cracking |
Jul. 17, 2001 |
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