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Class Information
Number: 118/723AN
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring) > By creating electric field (e.g., gas activation, plasma, etc.) > Microwave gas energizing means (e.g., 2.45 gigahertz, microwave plasma, etc.) > Having antenna
Description:










Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8674607 Plasma processing apparatus and processing gas supply structure thereof Mar. 18, 2014
8662010 Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method Mar. 4, 2014
8641862 High dose implantation strip (HDIS) in H2 base chemistry Feb. 4, 2014
8613828 Procedure and device for the production of a plasma Dec. 24, 2013
8608903 Plasma processing apparatus and plasma processing method Dec. 17, 2013
8597464 Inductively coupled plasma reactor with multiple magnetic cores Dec. 3, 2013
8597463 Inductively coupled plasma processing apparatus Dec. 3, 2013
8590485 Small form factor plasma source for high density wide ribbon ion beam generation Nov. 26, 2013
8552650 Plasma formation region control apparatus and plasma processing apparatus Oct. 8, 2013
8540843 Plasma chamber top piece assembly Sep. 24, 2013
8513137 Plasma processing apparatus and plasma processing method Aug. 20, 2013
8486792 Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device Jul. 16, 2013
8454794 Antenna for plasma processor and apparatus Jun. 4, 2013
8444806 Plasma generator, plasma control method and method of producing substrate May. 21, 2013
8419893 Shielded lid heater assembly Apr. 16, 2013
8419894 Plasma generator, plasma control method and method of producing substrate Apr. 16, 2013
8394232 Plasma processing apparatus Mar. 12, 2013
8372239 Plasma processing apparatus Feb. 12, 2013
8343309 Substrate processing apparatus Jan. 1, 2013
8318614 Method for forming silicon nitride film, method for manufacturing nonvolatile semiconductor memory device, nonvolatile semiconductor memory device and plasma apparatus Nov. 27, 2012
8317971 Plasma processing apparatus and method of manufacturing magnetic recording medium Nov. 27, 2012
8317970 Ceiling electrode with process gas dispersers housing plural inductive RF power applicators extending into the plasma Nov. 27, 2012
8308897 Plasma processing apparatus and plasma processing method Nov. 13, 2012
8303765 Plasma etching apparatus Nov. 6, 2012
8293069 Inductively coupled plasma apparatus Oct. 23, 2012
8286581 High frequency power source and its control method, and plasma processing apparatus Oct. 16, 2012
8282767 Plasma processing apparatus Oct. 9, 2012
8277604 Antenna for plasma processor and apparatus Oct. 2, 2012
8216421 Plasma stabilization method and plasma apparatus Jul. 10, 2012
8216433 Plasma generator and method of generating plasma using the same Jul. 10, 2012
8123903 Plasma reactor having multiple antenna structure Feb. 28, 2012
8119545 Forming a silicon nitride film by plasma CVD Feb. 21, 2012
8114246 Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same Feb. 14, 2012
8092642 Plasma processing apparatus Jan. 10, 2012
8083892 Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same Dec. 27, 2011
8062472 Method of correcting baseline skew by a novel motorized source coil assembly Nov. 22, 2011
8062470 Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers Nov. 22, 2011
8028655 Plasma processing system with locally-efficient inductive plasma coupling Oct. 4, 2011
8028654 Planar controlled zone microwave plasma system Oct. 4, 2011
8021515 Inductively coupled plasma processing apparatus Sep. 20, 2011
8012305 Exhaust assembly for a plasma processing system Sep. 6, 2011
8006640 Plasma processing apparatus and plasma processing method Aug. 30, 2011
7976671 Mask etch plasma reactor with variable process gas distribution Jul. 12, 2011
7976674 Embedded multi-inductive large area plasma source Jul. 12, 2011
7972471 Inductively coupled dual zone processing chamber with single planar antenna Jul. 5, 2011
7967945 RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasma Jun. 28, 2011
7880392 Plasma producing method and apparatus as well as plasma processing apparatus Feb. 1, 2011
7879187 Plasma etching apparatus Feb. 1, 2011
7871490 Inductively coupled plasma generation system with a parallel antenna array having evenly distributed power input and ground nodes and improved field distribution Jan. 18, 2011
7866278 Thin-film deposition system Jan. 11, 2011

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