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Class Information
Number: 118/722
Name: Coating apparatus > Gas or vapor deposition > With treating means (e.g., jarring)
Description: Apparatus wherein a means is provided to condition either the base or the coating material in a manner other than and in addition to applying the coating to the base.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601619 |
Method and apparatus for plasma processing |
Oct. 13, 2009 |
| 7544957 |
Non-uniform ion implantation |
Jun. 9, 2009 |
| 7439116 |
Apparatus and method for forming polycrystalline silicon thin film |
Oct. 21, 2008 |
| 7416633 |
Plasma processing apparatus |
Aug. 26, 2008 |
| 7393416 |
Vapor deposition process and apparatus therefor |
Jul. 1, 2008 |
| 7390366 |
Apparatus for chemical vapor deposition |
Jun. 24, 2008 |
| 7384666 |
Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device |
Jun. 10, 2008 |
| 7374620 |
Substrate processing apparatus |
May. 20, 2008 |
| 7371286 |
Wiring repair apparatus |
May. 13, 2008 |
| 7282111 |
System and method for monitoring particles contamination in semiconductor manufacturing facilities |
Oct. 16, 2007 |
| 7270724 |
Scanning plasma reactor |
Sep. 18, 2007 |
| 7235153 |
System for removal of a spacer |
Jun. 26, 2007 |
| 7220462 |
Method and electrode assembly for non-equilibrium plasma treatment |
May. 22, 2007 |
| 7166167 |
Laser CVD device and laser CVD method |
Jan. 23, 2007 |
| 7097712 |
Apparatus for processing a semiconductor |
Aug. 29, 2006 |
| 7090727 |
Heated gas line body feedthrough for vapor and gas delivery systems and methods for employing same |
Aug. 15, 2006 |
| 7087119 |
Atomic layer deposition with point of use generated reactive gas species |
Aug. 8, 2006 |
| 7070659 |
System for filling openings in semiconductor products |
Jul. 4, 2006 |
| 7063748 |
Methods for coating particles and particles produced thereby |
Jun. 20, 2006 |
| 7019402 |
Silicon chip carrier with through-vias using laser assisted chemical vapor deposition of conductor |
Mar. 28, 2006 |
| 7001467 |
Direct-write laser transfer and processing |
Feb. 21, 2006 |
| 6967109 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units |
Nov. 22, 2005 |
| 6946033 |
Heated gas distribution plate for a processing chamber |
Sep. 20, 2005 |
| 6926801 |
Laser machining method and apparatus |
Aug. 9, 2005 |
| 6916399 |
Temperature controlled window with a fluid supply system |
Jul. 12, 2005 |
| 6902947 |
Integrated method for release and passivation of MEMS structures |
Jun. 7, 2005 |
| 6890387 |
Method and device for correcting pattern film on a semiconductor substrate |
May. 10, 2005 |
| 6866721 |
Apparatus and method for photo-induced process |
Mar. 15, 2005 |
| 6863733 |
Apparatus for fabricating thin-film semiconductor device |
Mar. 8, 2005 |
| 6843202 |
Thermal processing apparatus for substrate employing photoirradiation |
Jan. 18, 2005 |
| 6821906 |
Method and apparatus for treating surface of substrate plate |
Nov. 23, 2004 |
| 6799531 |
Method for making films utilizing a pulsed laser for ion injection and deposition |
Oct. 5, 2004 |
| 6776847 |
Film formation apparatus and film formation method and cleaning method |
Aug. 17, 2004 |
| 6759253 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units |
Jul. 6, 2004 |
| 6756074 |
Methods for the deposition and curing of coating compositions |
Jun. 29, 2004 |
| 6752900 |
Vacuum loadlock ultraviolet bake for plasma etch |
Jun. 22, 2004 |
| 6709512 |
Method of growing a polycrystalline silicon layer, method of growing a single crystal silicon layer and catalytic CVD apparatus |
Mar. 23, 2004 |
| 6689930 |
Method and apparatus for cleaning an exhaust line in a semiconductor processing system |
Feb. 10, 2004 |
| 6682602 |
Chemical vapor deposition systems including metal complexes with chelating O- and/or N-donor ligands |
Jan. 27, 2004 |
| 6680420 |
Apparatus for cleaning an exhaust line in a semiconductor processing system |
Jan. 20, 2004 |
| 6648973 |
Process for the treatment of a fiber |
Nov. 18, 2003 |
| 6648975 |
Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device |
Nov. 18, 2003 |
| 6638880 |
Chemical vapor deposition apparatus and a method of manufacturing a semiconductor device |
Oct. 28, 2003 |
| 6610169 |
Semiconductor processing system and method |
Aug. 26, 2003 |
| 6576566 |
Apparatus and method for forming thin film at low temperature and high deposition rate |
Jun. 10, 2003 |
| 6554969 |
Acoustically enhanced deposition processes, and systems for performing same |
Apr. 29, 2003 |
| 6513451 |
Controlling the thickness of an organic layer in an organic light-emiting device |
Feb. 4, 2003 |
| 6506257 |
Single-substrate-processing apparatus for semiconductor process |
Jan. 14, 2003 |
| 6494956 |
System for processing a workpiece |
Dec. 17, 2002 |
| 6492284 |
Reactor for processing a workpiece using sonic energy |
Dec. 10, 2002 |
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