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Class Information
Number: 118/720
Name: Coating apparatus > Gas or vapor deposition > Having means to expose a portion of a substrate to coating medium
Description: Apparatus wherein a mechanism is provided to selectively coat only a portion of the base with the coating material.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6214413 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck |
Apr. 10, 2001 |
| 6206976 |
Deposition apparatus and related method with controllable edge exclusion |
Mar. 27, 2001 |
| 6171462 |
Device for holding lenses, especially for eye glasses to be coated in a vacuum coating or sputtering machine |
Jan. 9, 2001 |
| 6171453 |
Alignment mark shielding ring and method of using |
Jan. 9, 2001 |
| 6168667 |
Resist-processing apparatus |
Jan. 2, 2001 |
| 6162336 |
Clamping ring design to reduce wafer sticking problem in metal deposition |
Dec. 19, 2000 |
| 6139678 |
Plasma processing methods and apparatus |
Oct. 31, 2000 |
| 6136096 |
Method and apparatus for correcting defects in photomask |
Oct. 24, 2000 |
| 6132562 |
Method and device for transporting cylindrical substrates to be coated |
Oct. 17, 2000 |
| 6132805 |
Shutter for thin-film processing equipment |
Oct. 17, 2000 |
| 6120607 |
Apparatus and method for blocking the deposition of oxide on a wafer |
Sep. 19, 2000 |
| 6099896 |
Method and apparatus for zone lubrication of magnetic media |
Aug. 8, 2000 |
| 6093445 |
Microscopic element manufacturing method and equipment for carrying out the same |
Jul. 25, 2000 |
| 6090458 |
Method and apparatus for film formation by chemical vapor deposition |
Jul. 18, 2000 |
| 6068738 |
Method and apparatus for thin film coating an article |
May. 30, 2000 |
| 6051122 |
Deposition shield assembly for a semiconductor wafer processing system |
Apr. 18, 2000 |
| 6048402 |
Device for fabricating a metalized film capacitor |
Apr. 11, 2000 |
| 6045671 |
Systems and methods for the combinatorial synthesis of novel materials |
Apr. 4, 2000 |
| 6039835 |
Etching apparatus and method of etching a substrate |
Mar. 21, 2000 |
| 6001183 |
Wafer carriers for epitaxial growth processes |
Dec. 14, 1999 |
| 5980975 |
Thin-film-coated substrate manufacturing methods having improved film formation monitoring and manufacturing apparatus |
Nov. 9, 1999 |
| 5954929 |
Deposition-preventing part for physical vapor deposition apparatuses |
Sep. 21, 1999 |
| 5951769 |
Method and apparatus for making high refractive index (HRI) film |
Sep. 14, 1999 |
| 5922133 |
Multiple edge deposition exclusion rings |
Jul. 13, 1999 |
| 5906857 |
Apparatus, system and method for controlling emission parameters attending vaporized in a HV environment |
May. 25, 1999 |
| 5888304 |
Heater with shadow ring and purge above wafer surface |
Mar. 30, 1999 |
| 5885356 |
Method of reducing residue accumulation in CVD chamber using ceramic lining |
Mar. 23, 1999 |
| 5879523 |
Ceramic coated metallic insulator particularly useful in a plasma sputter reactor |
Mar. 9, 1999 |
| 5868847 |
Clamp ring for shielding a substrate during film layer deposition |
Feb. 9, 1999 |
| 5863396 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck |
Jan. 26, 1999 |
| 5863340 |
Deposition ring anti-rotation apparatus |
Jan. 26, 1999 |
| 5843235 |
Apparatus for forming a deposited curver coating on a substrate and mirror |
Dec. 1, 1998 |
| 5810931 |
High aspect ratio clamp ring |
Sep. 22, 1998 |
| 5803971 |
Modular coating fixture |
Sep. 8, 1998 |
| 5801634 |
Signal tower controller |
Sep. 1, 1998 |
| 5792267 |
Coating fixture for a turbine engine blade |
Aug. 11, 1998 |
| 5792270 |
Apparatus for forming a pattern of nucleation sites |
Aug. 11, 1998 |
| 5690795 |
Screwless shield assembly for vacuum processing chambers |
Nov. 25, 1997 |
| 5690744 |
Wafer orientation alignment system |
Nov. 25, 1997 |
| 5688389 |
Method and apparatus for thin film coating an article |
Nov. 18, 1997 |
| 5632873 |
Two piece anti-stick clamp ring |
May. 27, 1997 |
| 5630879 |
Method and apparatus for the partial coating of sets of structural components |
May. 20, 1997 |
| 5620578 |
Sputtering apparatus having an on board service module |
Apr. 15, 1997 |
| 5599369 |
Hood for metal-oxide vapor coating glass containers |
Feb. 4, 1997 |
| 5584903 |
Permeable attenuating distributor for a glass container coating apparatus and a method for coating containers |
Dec. 17, 1996 |
| 5565035 |
Fixture for masking a portion of an airfoil during application of a coating |
Oct. 15, 1996 |
| 5529631 |
Apparatus for the continuous surface treatment of sheet material |
Jun. 25, 1996 |
| 5529815 |
Apparatus and method for forming diamond coating |
Jun. 25, 1996 |
| 5510146 |
CVD apparatus, method of forming semiconductor film, and method of fabricating thin-film semiconductor device |
Apr. 23, 1996 |
| 5489369 |
Method and apparatus for thin film coating an article |
Feb. 6, 1996 |
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