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Class Information
Number: 118/720
Name: Coating apparatus > Gas or vapor deposition > Having means to expose a portion of a substrate to coating medium
Description: Apparatus wherein a mechanism is provided to selectively coat only a portion of the base with the coating material.


Sub-classes under this class:

Class Number Class Name Patents
118/721 Substrate contacting mask 134


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
7435300 Dynamic film thickness control system/method and its utilization Oct. 14, 2008
7413610 Method and apparatus for coating or heat treatment of blisks for aircraft gas turbines Aug. 19, 2008
7396411 Apparatus for manufacturing single crystal Jul. 8, 2008
7389580 Method and apparatus for thin-film battery having ultra-thin electrolyte Jun. 24, 2008
7338699 Island projection-modified part, method for producing the same, and apparatus comprising the same Mar. 4, 2008
7311939 Vacuum coating unit and a method for the differentiated coating of spectacle lenses Dec. 25, 2007
7306707 Adaptable processing element for a processing system and a method of making the same Dec. 11, 2007
7294245 Cover ring and shield supporting a wafer ring in a plasma reactor Nov. 13, 2007
7259026 Method and apparatus for processing organosiloxane film Aug. 21, 2007
7229502 Method of forming a silicon nitride layer Jun. 12, 2007
7228873 Valve design and configuration for fast delivery system Jun. 12, 2007
7211145 Substrate processing apparatus and substrate processing method May. 1, 2007
7204912 Method and apparatus for an improved bellows shield in a plasma processing system Apr. 17, 2007
7205033 Method for forming polycrystalline silicon film of polycrystalline silicon TFT Apr. 17, 2007
7194801 Thin-film battery having ultra-thin electrolyte and associated method Mar. 27, 2007
7179335 In situ adaptive masks Feb. 20, 2007
7163607 Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system Jan. 16, 2007
7132016 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask Nov. 7, 2006
7128806 Mask etch processing apparatus Oct. 31, 2006
7115168 Patterned thin-film deposition using collimating heated masked assembly Oct. 3, 2006
7103443 Directed gas injection apparatus for semiconductor processing Sep. 5, 2006
7097750 Device for fixing substrate for thin film sputter and method of fixing substrate using the same Aug. 29, 2006
7077911 MOCVD apparatus and MOCVD method Jul. 18, 2006
7066194 Valve design and configuration for fast delivery system Jun. 27, 2006
7049549 Multi-thermal zone shielding apparatus May. 23, 2006
7033461 Thin film forming apparatus and method Apr. 25, 2006
6960263 Shadow frame with cross beam for semiconductor equipment Nov. 1, 2005
6955726 Mask and mask frame assembly for evaporation Oct. 18, 2005
6942893 Densifying hollow porous substrates by chemical vapor infiltration Sep. 13, 2005
6929724 Shutter Aug. 16, 2005
6911129 Combinatorial synthesis of material chips Jun. 28, 2005
6901659 Method of manufacturing electron-emitting device using ink-jet discharge device Jun. 7, 2005
6899798 Reusable ceramic-comprising component which includes a scrificial surface layer May. 31, 2005
6890385 Multi-face forming mask device for vacuum deposition May. 10, 2005
6884299 Deposition apparatus for organic light-emitting devices Apr. 26, 2005
6881270 Electrode arrangement Apr. 19, 2005
6878208 Mask for vacuum deposition and organic EL display manufactured by using the same Apr. 12, 2005
6878209 Organic electroluminescent device Apr. 12, 2005
6869890 Processing apparatus to be sealed against workpiece Mar. 22, 2005
6869636 Method of evaporating film used in an organic electro-luminescent display Mar. 22, 2005
6858086 Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device Feb. 22, 2005
6855236 Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus Feb. 15, 2005
6849134 Minimum volume oven for producing uniform pyrolytic oxide coatings on capacitor anodes Feb. 1, 2005
6843892 Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet Jan. 18, 2005
6827622 Method of manufacturing electroluminescence display apparatus Dec. 7, 2004
6821348 In-line deposition processes for circuit fabrication Nov. 23, 2004
6802942 Storage plate support for receiving disk-shaped storage plates Oct. 12, 2004
6787786 Thin radiation source and method of making the same Sep. 7, 2004
6783598 Moisture barrier sealing of fiber optic coils Aug. 31, 2004
6776850 Preventative maintenance aided tool for CVD chamber Aug. 17, 2004

1 2 3 4 5 6


 
 
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