| |
 |
|
Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6494956 |
System for processing a workpiece |
Dec. 17, 2002 |
| 6496746 |
Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
Dec. 17, 2002 |
| 6491802 |
Magnetic film forming system |
Dec. 10, 2002 |
| 6488778 |
Apparatus and method for controlling wafer environment between thermal clean and thermal processing |
Dec. 3, 2002 |
| 6475286 |
Seal means for separable closing elements, such as separable elements of chemical vapor deposition chamber and deposition reactor apparatus |
Nov. 5, 2002 |
| 6470824 |
Semiconductor manufacturing apparatus |
Oct. 29, 2002 |
| 6472326 |
Reliable particle removal following a process chamber wet clean |
Oct. 29, 2002 |
| 6473151 |
Substrate processing apparatus |
Oct. 29, 2002 |
| 6468352 |
Method and apparatus for modifying particles |
Oct. 22, 2002 |
| 6468353 |
Method and apparatus for improved substrate handling |
Oct. 22, 2002 |
| 6464782 |
Apparatus for vaporization sequence for multiple liquid precursors used in semiconductor thin film applications |
Oct. 15, 2002 |
| 6461437 |
Apparatus used for fabricating liquid crystal device and method of fabricating the same |
Oct. 8, 2002 |
| 6454508 |
Dual cassette load lock |
Sep. 24, 2002 |
| 6454519 |
Dual cassette load lock |
Sep. 24, 2002 |
| 6454908 |
Vacuum treatment system |
Sep. 24, 2002 |
| 6451120 |
Apparatus and method for batch processing semiconductor substrates in making semiconductor lasers |
Sep. 17, 2002 |
| 6447232 |
Semiconductor wafer processing apparatus having improved wafer input/output handling system |
Sep. 10, 2002 |
| 6447233 |
Automated door assembly for use in semiconductor wafer manufacturing |
Sep. 10, 2002 |
| 6447607 |
Apparatus for growing thin films |
Sep. 10, 2002 |
| 6444036 |
Construction of a film on a semiconductor wafer |
Sep. 3, 2002 |
| 6444086 |
Device for vacuum coating slide bearings |
Sep. 3, 2002 |
| 6444262 |
Thermal processing unit and thermal processing method |
Sep. 3, 2002 |
| 6439822 |
Substrate processing apparatus and substrate processing method |
Aug. 27, 2002 |
| 6440277 |
Techniques of printing micro-structure patterns such as holograms directly onto final documents or other substrates in discrete areas thereof |
Aug. 27, 2002 |
| 6436194 |
Method and a system for sealing an epitaxial silicon layer on a substrate |
Aug. 20, 2002 |
| 6436196 |
Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer |
Aug. 20, 2002 |
| 6436556 |
Method for producing a strip-like metal composite by high temperature dip coating |
Aug. 20, 2002 |
| 6432205 |
Gas feeding system for chemical vapor deposition reactor and method of controlling the same |
Aug. 13, 2002 |
| 6417014 |
Method and apparatus for reducing wafer to wafer deposition variation |
Jul. 9, 2002 |
| 6413317 |
Substrate processing method and substrate processing apparatus |
Jul. 2, 2002 |
| 6413320 |
Integrated processing system having multiple reactors connected to a central chamber |
Jul. 2, 2002 |
| 6413321 |
Method and apparatus for reducing particle contamination on wafer backside during CVD process |
Jul. 2, 2002 |
| 6409837 |
Processing system and method for chemical vapor deposition of a metal layer using a liquid precursor |
Jun. 25, 2002 |
| 6409879 |
System for controlling transistor spacer width |
Jun. 25, 2002 |
| 6406544 |
Parylene deposition chamber and method of use |
Jun. 18, 2002 |
| 6407010 |
Single-substrate-heat-processing apparatus and method for semiconductor process |
Jun. 18, 2002 |
| 6402508 |
Heat and cooling treatment apparatus and substrate processing system |
Jun. 11, 2002 |
| 6397776 |
Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators |
Jun. 4, 2002 |
| 6398872 |
Circuit forming apparatus of semiconductor device |
Jun. 4, 2002 |
| 6395094 |
Process system with transfer unit for object to be processed |
May. 28, 2002 |
| 6390753 |
System for loading, processing and unloading substrates arranged on a carrier |
May. 21, 2002 |
| 6391113 |
Semiconductor wafer processing apparatus and method of controlling the same |
May. 21, 2002 |
| 6391114 |
Vacuum processing apparatus |
May. 21, 2002 |
| 6391116 |
Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
May. 21, 2002 |
| 6391148 |
Cobalt silicide etch process and apparatus |
May. 21, 2002 |
| 6387185 |
Processing chamber for atomic layer deposition processes |
May. 14, 2002 |
| 6382902 |
Method for controlling handling robot |
May. 7, 2002 |
| 6379095 |
Robot for handling semiconductor wafers |
Apr. 30, 2002 |
| 6377329 |
Substrate processing apparatus |
Apr. 23, 2002 |
| 6375746 |
Wafer processing architecture including load locks |
Apr. 23, 2002 |
|
|
|
