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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.

Patents under this class:

Patent Number Title Of Patent Date Issued
7156960 Method and device for continuous cold plasma deposition of metal coatings Jan. 2, 2007
7156922 Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor Jan. 2, 2007
7153542 Assembly line processing method Dec. 26, 2006
7153367 Drive mechanism for a vacuum treatment apparatus Dec. 26, 2006
7153362 System and method for real time deposition process control based on resulting product detection Dec. 26, 2006
7144826 Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment Dec. 5, 2006
7141120 Manufacturing apparatus of semiconductor device having introducing section and withdrawing section Nov. 28, 2006
7132016 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask Nov. 7, 2006
7131392 Vacuum evaporator Nov. 7, 2006
7128803 Integration of sensor based metrology into semiconductor processing tools Oct. 31, 2006
7119032 Method to protect internal components of semiconductor processing equipment using layered superlattice materials Oct. 10, 2006
7118783 Methods and apparatus for vapor processing of micro-device workpieces Oct. 10, 2006
7104476 Multi-sectored flat board type showerhead used in CVD apparatus Sep. 12, 2006
7105059 Reaction apparatus for atomic layer deposition Sep. 12, 2006
7105061 Method and apparatus for sealing substrate load port in a high pressure reactor Sep. 12, 2006
7103443 Directed gas injection apparatus for semiconductor processing Sep. 5, 2006
7097712 Apparatus for processing a semiconductor Aug. 29, 2006
7090741 Semiconductor processing system Aug. 15, 2006
7085616 Atomic layer deposition apparatus Aug. 1, 2006
7077159 Processing apparatus having integrated pumping system Jul. 18, 2006
7077929 Apparatus for manufacturing a semiconductor device Jul. 18, 2006
7078074 Lens plasma coating system Jul. 18, 2006
7078250 Method and apparatus for manufacturing organic electroluminescent device, electronic apparatus and method of removing ionic impurities Jul. 18, 2006
7066194 Valve design and configuration for fast delivery system Jun. 27, 2006
7051759 Processing apparatus having integrated pumping system May. 30, 2006
7052576 Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber May. 30, 2006
7049154 Vapor phase growth method by controlling the heat output in the gas introduction region May. 23, 2006
7033439 Apparatus for fabricating a III-V nitride film and a method for fabricating the same Apr. 25, 2006
7033471 Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers Apr. 25, 2006
7025856 Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge Apr. 11, 2006
7022191 Method of crystallizing amorphous silicon layer and crystallizing apparatus thereof Apr. 4, 2006
7022613 Reduced cross-contamination between chambers in a semiconductor processing tool Apr. 4, 2006
7018517 Transfer chamber for vacuum processing system Mar. 28, 2006
7001468 Pressure energized pressure vessel opening and closing device and method of providing therefor Feb. 21, 2006
6991826 Antisoiling coatings for antireflective substrates Jan. 31, 2006
6979367 Method of improving surface planarity Dec. 27, 2005
6977014 Architecture for high throughput semiconductor processing applications Dec. 20, 2005
6972055 Continuous flow deposition system Dec. 6, 2005
6962644 Tandem etch chamber plasma processing system Nov. 8, 2005
6960416 Method and apparatus for controlling etch processes during fabrication of semiconductor devices Nov. 1, 2005
6957749 Liquid delivery system Oct. 25, 2005
6955925 Annealing Oct. 18, 2005
6951821 Processing system and method for chemically treating a substrate Oct. 4, 2005
6949143 Dual substrate loadlock process equipment Sep. 27, 2005
6949144 Low pressure plasma processing apparatus and method Sep. 27, 2005
6949463 Method of making iron silicide and method of making photoelectric transducer Sep. 27, 2005
6946034 Electron beam physical vapor deposition apparatus Sep. 20, 2005
6942893 Densifying hollow porous substrates by chemical vapor infiltration Sep. 13, 2005
6936134 Substrate processing apparatus and substrate processing method Aug. 30, 2005
6937691 X-ray fluorescence spectrometric system and a program for use therein Aug. 30, 2005

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