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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6627039 |
Plasma processing methods and apparatus |
Sep. 30, 2003 |
| 6623802 |
Process and installation for forming a layer on a substrate |
Sep. 23, 2003 |
| 6620288 |
Substrate treatment apparatus |
Sep. 16, 2003 |
| 6613151 |
Single disc vapor lubrication |
Sep. 2, 2003 |
| 6613587 |
Method of replacing at least a portion of a semiconductor substrate deposition chamber liner |
Sep. 2, 2003 |
| 6609877 |
Vacuum chamber load lock structure and article transport mechanism |
Aug. 26, 2003 |
| 6610150 |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
Aug. 26, 2003 |
| 6610151 |
Seed layers for interconnects and methods and apparatus for their fabrication |
Aug. 26, 2003 |
| 6607602 |
Device for processing semiconductor wafers |
Aug. 19, 2003 |
| 6602347 |
Apparatus and method for processing a substrate |
Aug. 5, 2003 |
| 6602348 |
Substrate cooldown chamber |
Aug. 5, 2003 |
| 6599368 |
System architecture of semiconductor manufacturing equipment |
Jul. 29, 2003 |
| 6595370 |
Apparatus and method for reducing contamination in a wafer transfer chamber |
Jul. 22, 2003 |
| 6585823 |
Atomic layer deposition |
Jul. 1, 2003 |
| 6586343 |
Method and apparatus for directing constituents through a processing chamber |
Jul. 1, 2003 |
| 6579422 |
Method and apparatus for manufacturing flexible organic EL display |
Jun. 17, 2003 |
| 6579428 |
Arc evaporator, method for driving arc evaporator, and ion plating apparatus |
Jun. 17, 2003 |
| 6575737 |
Method and apparatus for improved substrate handling |
Jun. 10, 2003 |
| 6576061 |
Apparatus and method for processing a substrate |
Jun. 10, 2003 |
| 6576062 |
Film forming apparatus and film forming method |
Jun. 10, 2003 |
| 6576063 |
Apparatus and method for use in manufacturing a semiconductor device |
Jun. 10, 2003 |
| 6577923 |
Apparatus and method for robotic alignment of substrates |
Jun. 10, 2003 |
| 6572705 |
Method and apparatus for growing thin films |
Jun. 3, 2003 |
| 6565662 |
Vacuum processing apparatus for semiconductor process |
May. 20, 2003 |
| 6562128 |
In-situ post epitaxial treatment process |
May. 13, 2003 |
| 6562140 |
Apparatus for fabrication of thin films |
May. 13, 2003 |
| 6562141 |
Dual degas/cool loadlock cluster tool |
May. 13, 2003 |
| 6558509 |
Dual wafer load lock |
May. 6, 2003 |
| 6554980 |
Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates |
Apr. 29, 2003 |
| 6549825 |
Alignment apparatus |
Apr. 15, 2003 |
| 6540466 |
Compact apparatus and method for storing and loading semiconductor wafer carriers |
Apr. 1, 2003 |
| 6540869 |
Semiconductor processing system |
Apr. 1, 2003 |
| 6537415 |
Apparatus for processing samples |
Mar. 25, 2003 |
| 6530732 |
Single substrate load lock with offset cool module and buffer chamber |
Mar. 11, 2003 |
| 6530993 |
Cluster tool for fabricating semiconductor device |
Mar. 11, 2003 |
| 6527866 |
Apparatus and method for deposition of thin films |
Mar. 4, 2003 |
| 6528395 |
Method of fabricating compound semiconductor device and apparatus for fabricating compound semiconductor device |
Mar. 4, 2003 |
| 6521048 |
Single body injector and deposition chamber |
Feb. 18, 2003 |
| 6521104 |
Configurable vacuum system and method |
Feb. 18, 2003 |
| 6516743 |
Method and apparatus diffusing zinc into groups III-V compound semiconductor crystals |
Feb. 11, 2003 |
| 6517691 |
Substrate processing system |
Feb. 11, 2003 |
| 6513451 |
Controlling the thickness of an organic layer in an organic light-emiting device |
Feb. 4, 2003 |
| 6514339 |
Laser annealing apparatus |
Feb. 4, 2003 |
| 6508883 |
Throughput enhancement for single wafer reactor |
Jan. 21, 2003 |
| 6506009 |
Apparatus for storing and moving a cassette |
Jan. 14, 2003 |
| 6506253 |
Photo-excited gas processing apparatus for semiconductor process |
Jan. 14, 2003 |
| 6503365 |
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing |
Jan. 7, 2003 |
| 6503379 |
Mobile plating system and method |
Jan. 7, 2003 |
| 6499427 |
Plasma CVD apparatus |
Dec. 31, 2002 |
| 6500264 |
Continuous thermal evaporation system |
Dec. 31, 2002 |
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