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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6749086 |
Pressurized liquid delivery module |
Jun. 15, 2004 |
| 6749906 |
Thermal physical vapor deposition apparatus with detachable vapor source(s) and method |
Jun. 15, 2004 |
| 6750155 |
Methods to minimize moisture condensation over a substrate in a rapid cycle chamber |
Jun. 15, 2004 |
| 6742977 |
Substrate processing device, substrate conveying device, and substrate processing method |
Jun. 1, 2004 |
| 6743645 |
Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device |
Jun. 1, 2004 |
| 6740195 |
Detection of nontransient processing anomalies in vacuum manufacturing process |
May. 25, 2004 |
| 6736016 |
Paint booth air detection system |
May. 18, 2004 |
| 6736929 |
Distributed control system for semiconductor manufacturing equipment |
May. 18, 2004 |
| 6733592 |
High-temperature and high-pressure treatment device |
May. 11, 2004 |
| 6735276 |
Sample preprocessing system for a fluorescent X-ray analysis and X-ray fluorescence spectrometric system using the same |
May. 11, 2004 |
| 6730369 |
Device and method for plasma processing |
May. 4, 2004 |
| 6726776 |
Low temperature integrated metallization process and apparatus |
Apr. 27, 2004 |
| 6716772 |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
Apr. 6, 2004 |
| 6712907 |
Magnetically coupled linear servo-drive mechanism |
Mar. 30, 2004 |
| 6712908 |
Purified silicon production system |
Mar. 30, 2004 |
| 6709521 |
Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system |
Mar. 23, 2004 |
| 6709522 |
Material handling system and methods for a multichamber plasma treatment system |
Mar. 23, 2004 |
| 6709545 |
Substrate processing apparatus and substrate processing method |
Mar. 23, 2004 |
| 6705245 |
Apparatus for forming polymer continuously on the surface of metal by DC plasma polymerization |
Mar. 16, 2004 |
| 6706119 |
Apparatus for epitaxially growing semiconductor device structures with submicron group III nitride layer utilizing HVPE |
Mar. 16, 2004 |
| 6702897 |
Optical transmission systems and apparatuses including bragg gratings and methods of making |
Mar. 9, 2004 |
| 6695947 |
Device for manufacturing semiconductor device and method of manufacturing the same |
Feb. 24, 2004 |
| 6692613 |
Reactor for processing a semiconductor wafer |
Feb. 17, 2004 |
| 6692649 |
Inductively coupled plasma downstream strip module |
Feb. 17, 2004 |
| 6688375 |
Vacuum processing system having improved substrate heating and cooling |
Feb. 10, 2004 |
| 6685779 |
Method and a system for sealing an epitaxial silicon layer on a substrate |
Feb. 3, 2004 |
| 6682629 |
Substrate processing unit |
Jan. 27, 2004 |
| 6673196 |
Plasma processing apparatus |
Jan. 6, 2004 |
| 6669185 |
Wafer loading system positioning method and device |
Dec. 30, 2003 |
| 6669987 |
Method for vacuum treatment of workpieces and vacuum treatment facility |
Dec. 30, 2003 |
| 6666922 |
System for processing a workpiece |
Dec. 23, 2003 |
| 6663713 |
Method and apparatus for forming a thin polymer layer on an integrated circuit structure |
Dec. 16, 2003 |
| 6663714 |
CVD apparatus |
Dec. 16, 2003 |
| 6660094 |
Apparatus and method for forming deposited film |
Dec. 9, 2003 |
| 6660135 |
Staged aluminum deposition process for filling vias |
Dec. 9, 2003 |
| 6660666 |
Integrated processing system for forming an insulating layer of thin film transistor liquid crystal display |
Dec. 9, 2003 |
| 6652654 |
System configured for applying multiple modifying agents to a substrate |
Nov. 25, 2003 |
| 6648974 |
Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction |
Nov. 18, 2003 |
| 6649020 |
Plasma processing apparatus |
Nov. 18, 2003 |
| 6641703 |
Magnetic multi-layer film manufacturing apparatus |
Nov. 4, 2003 |
| 6638860 |
Method and apparatus for processing substrates and method for manufacturing a semiconductor device |
Oct. 28, 2003 |
| 6634116 |
Vacuum processing apparatus |
Oct. 21, 2003 |
| 6634314 |
Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors |
Oct. 21, 2003 |
| 6635115 |
Tandem process chamber |
Oct. 21, 2003 |
| 6635116 |
Residual oxygen reduction system |
Oct. 21, 2003 |
| 6633022 |
Substrate processing apparatus and substrate processing method |
Oct. 14, 2003 |
| 6630053 |
Semiconductor processing module and apparatus |
Oct. 7, 2003 |
| 6626997 |
Continuous processing chamber |
Sep. 30, 2003 |
| 6627039 |
Plasma processing methods and apparatus |
Sep. 30, 2003 |
| 6623802 |
Process and installation for forming a layer on a substrate |
Sep. 23, 2003 |
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