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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6841031 |
Substrate processing apparatus equipping with high-pressure processing unit |
Jan. 11, 2005 |
| 6841033 |
Material handling system and method for a multi-workpiece plasma treatment system |
Jan. 11, 2005 |
| 6841049 |
OPTICAL DEVICE SUBSTRATE FILM-FORMATION APPARATUS, OPTICAL DISK SUBSTRATE FILM-FORMATION METHOD, SUBSTRATE HOLDER MANUFACTURE METHOD, SUBSTRATE HOLDER, OPTICAL DISK AND A PHASE-CHANGE RECORDIN |
Jan. 11, 2005 |
| 6837936 |
Semiconductor manufacturing device |
Jan. 4, 2005 |
| 6833031 |
Method and device for coating a substrate |
Dec. 21, 2004 |
| 6833155 |
Apparatus and method for processing a substrate |
Dec. 21, 2004 |
| 6830624 |
Blocker plate by-pass for remote plasma clean |
Dec. 14, 2004 |
| 6830625 |
System for fabricating a bipolar transistor |
Dec. 14, 2004 |
| 6830651 |
Load port capable of coping with different types of cassette containing substrates to be processed |
Dec. 14, 2004 |
| 6827788 |
Substrate processing device and through-chamber |
Dec. 7, 2004 |
| 6827789 |
Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry |
Dec. 7, 2004 |
| 6829056 |
Monitoring dimensions of features at different locations in the processing of substrates |
Dec. 7, 2004 |
| 6824617 |
Input/output valve switching apparatus of semiconductor manufacturing system |
Nov. 30, 2004 |
| 6824618 |
Substrate receiving apparatus and method thereof |
Nov. 30, 2004 |
| 6826442 |
Stocker, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method |
Nov. 30, 2004 |
| 6817377 |
Processing apparatus having integrated pumping system |
Nov. 16, 2004 |
| 6818067 |
Processing chamber for atomic layer deposition processes |
Nov. 16, 2004 |
| 6818068 |
Conveyor for treating hollow bodies comprising an advanced pressure distribution circuit |
Nov. 16, 2004 |
| 6818108 |
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece |
Nov. 16, 2004 |
| 6814813 |
Chemical vapor deposition apparatus |
Nov. 9, 2004 |
| 6808592 |
High throughput plasma treatment system |
Oct. 26, 2004 |
| 6805748 |
Substrate processing system with load-lock chamber |
Oct. 19, 2004 |
| 6806211 |
Device and method for processing substrate |
Oct. 19, 2004 |
| 6802934 |
Processing apparatus |
Oct. 12, 2004 |
| 6802935 |
Semiconductor chamber process apparatus and method |
Oct. 12, 2004 |
| 6799910 |
Processing method and processing apparatus |
Oct. 5, 2004 |
| 6800172 |
INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICON |
Oct. 5, 2004 |
| 6797109 |
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates |
Sep. 28, 2004 |
| 6797067 |
Implanter tool process parameter auto pre-setup system |
Sep. 28, 2004 |
| 6793735 |
Integrated cobalt silicide process for semiconductor devices |
Sep. 21, 2004 |
| 6793766 |
Apparatus having platforms positioned for precise centering of semiconductor wafers during processing |
Sep. 21, 2004 |
| 6793968 |
Method and device for coating a product |
Sep. 21, 2004 |
| 6793978 |
Method and device for coating at least one wiper-blade element |
Sep. 21, 2004 |
| 6789499 |
Apparatus to sputter silicon films |
Sep. 14, 2004 |
| 6790286 |
Substrate processing apparatus |
Sep. 14, 2004 |
| 6790287 |
Substrate processing apparatus, substrate inspection method and substrate processing system |
Sep. 14, 2004 |
| 6791692 |
Method and device utilizing plasma source for real-time gas sampling |
Sep. 14, 2004 |
| 6786974 |
Insulating film forming method and insulating film forming apparatus |
Sep. 7, 2004 |
| 6787012 |
Apparatus for the synthesis of layers, coatings or films |
Sep. 7, 2004 |
| 6787373 |
Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates |
Sep. 7, 2004 |
| 6780250 |
System and method for integrated oxide removal and processing of a semiconductor wafer |
Aug. 24, 2004 |
| 6780787 |
Low contamination components for semiconductor processing apparatus and methods for making components |
Aug. 24, 2004 |
| 6776846 |
Integrated processing system having multiple reactors connected to a central chamber |
Aug. 17, 2004 |
| 6776847 |
Film formation apparatus and film formation method and cleaning method |
Aug. 17, 2004 |
| 6770143 |
Method for annealing a semiconductor |
Aug. 3, 2004 |
| 6770144 |
Multideposition SACVD reactor |
Aug. 3, 2004 |
| 6767439 |
High throughput thin film deposition and substrate handling method and apparatus for optical disk processing |
Jul. 27, 2004 |
| 6756235 |
Metal oxide film formation method and apparatus |
Jun. 29, 2004 |
| 6752874 |
Apparatus for perpendicular-type ultra vacuum chemical vapor deposition |
Jun. 22, 2004 |
| 6752900 |
Vacuum loadlock ultraviolet bake for plasma etch |
Jun. 22, 2004 |
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