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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6927165 |
Method and apparatus for processing substrates and method for manufacturing a semiconductor device |
Aug. 9, 2005 |
| 6923867 |
Substrate processing apparatus and method for manufacturing semiconductor device |
Aug. 2, 2005 |
| 6923868 |
Installation for electron-ray coatication of coatings |
Aug. 2, 2005 |
| 6924001 |
Production device for DLC film-coated plastic container and production method therefor |
Aug. 2, 2005 |
| 6921456 |
High pressure processing chamber for semiconductor substrate |
Jul. 26, 2005 |
| 6921466 |
Revolution member supporting apparatus and semiconductor substrate processing apparatus |
Jul. 26, 2005 |
| 6919001 |
Disk coating system |
Jul. 19, 2005 |
| 6916397 |
Methods and apparatus for maintaining a pressure within an environmentally controlled chamber |
Jul. 12, 2005 |
| 6913652 |
Gas flow division in a wafer processing system having multiple chambers |
Jul. 5, 2005 |
| 6913675 |
Film forming apparatus, substrate for forming oxide thin film, and production method thereof |
Jul. 5, 2005 |
| 6911112 |
Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices |
Jun. 28, 2005 |
| 6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
Jun. 14, 2005 |
| 6905582 |
Configurable vacuum system and method |
Jun. 14, 2005 |
| 6902623 |
Reactor having a movable shutter |
Jun. 7, 2005 |
| 6902624 |
Massively parallel atomic layer deposition/chemical vapor deposition system |
Jun. 7, 2005 |
| 6902647 |
Method of processing substrates with integrated weighing steps |
Jun. 7, 2005 |
| 6902947 |
Integrated method for release and passivation of MEMS structures |
Jun. 7, 2005 |
| 6903013 |
Method to fill a trench and tunnel by using ALD seed layer and electroless plating |
Jun. 7, 2005 |
| 6903016 |
Combined conformal/non-conformal seed layers for metallic interconnects |
Jun. 7, 2005 |
| 6903030 |
System and method for heat treating semiconductor |
Jun. 7, 2005 |
| 6899764 |
Chemical vapor deposition reactor and process chamber for said reactor |
May. 31, 2005 |
| 6899765 |
Chamber elements defining a movable internal chamber |
May. 31, 2005 |
| 6895685 |
Vacuum processing apparatus and semiconductor manufacturing line using the same |
May. 24, 2005 |
| 6896513 |
Large area substrate processing system |
May. 24, 2005 |
| 6893506 |
Atomic layer deposition apparatus and method |
May. 17, 2005 |
| 6886272 |
Vacuum processing apparatus and operating method therefor |
May. 3, 2005 |
| 6884298 |
Method and system for coating and developing |
Apr. 26, 2005 |
| 6884299 |
Deposition apparatus for organic light-emitting devices |
Apr. 26, 2005 |
| 6881269 |
Lens plasma coating system |
Apr. 19, 2005 |
| 6878207 |
Gas gate for isolating regions of differing gaseous pressure |
Apr. 12, 2005 |
| 6875279 |
Single reactor, multi-pressure chemical vapor deposition for semiconductor devices |
Apr. 5, 2005 |
| 6875280 |
Substrate processing apparatus and substrate processing method |
Apr. 5, 2005 |
| 6875281 |
Method and system for coating and developing |
Apr. 5, 2005 |
| 6875282 |
Substrate transport container |
Apr. 5, 2005 |
| 6875306 |
Vacuum processing device |
Apr. 5, 2005 |
| 6869483 |
Coating process and apparatus |
Mar. 22, 2005 |
| 6869508 |
Physical vapor deposition apparatus and process |
Mar. 22, 2005 |
| 6863733 |
Apparatus for fabricating thin-film semiconductor device |
Mar. 8, 2005 |
| 6860965 |
High throughput architecture for semiconductor processing |
Mar. 1, 2005 |
| 6858085 |
Two-compartment chamber for sequential processing |
Feb. 22, 2005 |
| 6858119 |
Mobile plating system and method |
Feb. 22, 2005 |
| 6855207 |
Apparatus and system for eliminating contaminants on a substrate surface |
Feb. 15, 2005 |
| 6852169 |
Apparatus and methods for processing optical fibers with a plasma |
Feb. 8, 2005 |
| 6852194 |
Processing apparatus, transferring apparatus and transferring method |
Feb. 8, 2005 |
| 6849134 |
Minimum volume oven for producing uniform pyrolytic oxide coatings on capacitor anodes |
Feb. 1, 2005 |
| 6846380 |
Substrate processing apparatus and related systems and methods |
Jan. 25, 2005 |
| 6843882 |
Gas flow control in a wafer processing system having multiple chambers for performing same process |
Jan. 18, 2005 |
| 6843883 |
Vacuum processing apparatus and method for producing an object to be processed |
Jan. 18, 2005 |
| 6843892 |
Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet |
Jan. 18, 2005 |
| 6841006 |
Atmospheric substrate processing apparatus for depositing multiple layers on a substrate |
Jan. 11, 2005 |
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