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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7153542 |
Assembly line processing method |
Dec. 26, 2006 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7153362 |
System and method for real time deposition process control based on resulting product detection |
Dec. 26, 2006 |
| 7144826 |
Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment |
Dec. 5, 2006 |
| 7141120 |
Manufacturing apparatus of semiconductor device having introducing section and withdrawing section |
Nov. 28, 2006 |
| 7132016 |
System for and method of manufacturing a large-area backplane by use of a small-area shadow mask |
Nov. 7, 2006 |
| 7131392 |
Vacuum evaporator |
Nov. 7, 2006 |
| 7128803 |
Integration of sensor based metrology into semiconductor processing tools |
Oct. 31, 2006 |
| 7119032 |
Method to protect internal components of semiconductor processing equipment using layered superlattice materials |
Oct. 10, 2006 |
| 7118783 |
Methods and apparatus for vapor processing of micro-device workpieces |
Oct. 10, 2006 |
| 7104476 |
Multi-sectored flat board type showerhead used in CVD apparatus |
Sep. 12, 2006 |
| 7105059 |
Reaction apparatus for atomic layer deposition |
Sep. 12, 2006 |
| 7105061 |
Method and apparatus for sealing substrate load port in a high pressure reactor |
Sep. 12, 2006 |
| 7103443 |
Directed gas injection apparatus for semiconductor processing |
Sep. 5, 2006 |
| 7097712 |
Apparatus for processing a semiconductor |
Aug. 29, 2006 |
| 7090741 |
Semiconductor processing system |
Aug. 15, 2006 |
| 7085616 |
Atomic layer deposition apparatus |
Aug. 1, 2006 |
| 7077159 |
Processing apparatus having integrated pumping system |
Jul. 18, 2006 |
| 7077929 |
Apparatus for manufacturing a semiconductor device |
Jul. 18, 2006 |
| 7078074 |
Lens plasma coating system |
Jul. 18, 2006 |
| 7078250 |
Method and apparatus for manufacturing organic electroluminescent device, electronic apparatus and method of removing ionic impurities |
Jul. 18, 2006 |
| 7066194 |
Valve design and configuration for fast delivery system |
Jun. 27, 2006 |
| 7051759 |
Processing apparatus having integrated pumping system |
May. 30, 2006 |
| 7052576 |
Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber |
May. 30, 2006 |
| 7049154 |
Vapor phase growth method by controlling the heat output in the gas introduction region |
May. 23, 2006 |
| 7033439 |
Apparatus for fabricating a III-V nitride film and a method for fabricating the same |
Apr. 25, 2006 |
| 7033471 |
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
Apr. 25, 2006 |
| 7025856 |
Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge |
Apr. 11, 2006 |
| 7022191 |
Method of crystallizing amorphous silicon layer and crystallizing apparatus thereof |
Apr. 4, 2006 |
| 7022613 |
Reduced cross-contamination between chambers in a semiconductor processing tool |
Apr. 4, 2006 |
| 7018517 |
Transfer chamber for vacuum processing system |
Mar. 28, 2006 |
| 7001468 |
Pressure energized pressure vessel opening and closing device and method of providing therefor |
Feb. 21, 2006 |
| 6991826 |
Antisoiling coatings for antireflective substrates |
Jan. 31, 2006 |
| 6979367 |
Method of improving surface planarity |
Dec. 27, 2005 |
| 6977014 |
Architecture for high throughput semiconductor processing applications |
Dec. 20, 2005 |
| 6972055 |
Continuous flow deposition system |
Dec. 6, 2005 |
| 6962644 |
Tandem etch chamber plasma processing system |
Nov. 8, 2005 |
| 6960416 |
Method and apparatus for controlling etch processes during fabrication of semiconductor devices |
Nov. 1, 2005 |
| 6957749 |
Liquid delivery system |
Oct. 25, 2005 |
| 6955925 |
Annealing |
Oct. 18, 2005 |
| 6951821 |
Processing system and method for chemically treating a substrate |
Oct. 4, 2005 |
| 6949143 |
Dual substrate loadlock process equipment |
Sep. 27, 2005 |
| 6949144 |
Low pressure plasma processing apparatus and method |
Sep. 27, 2005 |
| 6949463 |
Method of making iron silicide and method of making photoelectric transducer |
Sep. 27, 2005 |
| 6946034 |
Electron beam physical vapor deposition apparatus |
Sep. 20, 2005 |
| 6942893 |
Densifying hollow porous substrates by chemical vapor infiltration |
Sep. 13, 2005 |
| 6936134 |
Substrate processing apparatus and substrate processing method |
Aug. 30, 2005 |
| 6937691 |
X-ray fluorescence spectrometric system and a program for use therein |
Aug. 30, 2005 |
| 6932871 |
Multi-station deposition apparatus and method |
Aug. 23, 2005 |
| 6930050 |
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing |
Aug. 16, 2005 |
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