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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5194406 |
Installation for transport and processing under a pulsating double-floating condition |
Mar. 16, 1993 |
| 5192585 |
Differential pressure sealing apparatus and method |
Mar. 9, 1993 |
| 5190592 |
Aerosol injection system for producing composite layers by pyrolysis |
Mar. 2, 1993 |
| 5188058 |
Uniform gas flow CVD apparatus |
Feb. 23, 1993 |
| 5186594 |
Dual cassette load lock |
Feb. 16, 1993 |
| 5183510 |
Apparatus and process for chemical vapor deposition |
Feb. 2, 1993 |
| 5181964 |
Single ended ultra-high vacuum chemical vapor deposition (UHV/CVD) reactor |
Jan. 26, 1993 |
| 5180432 |
Apparatus for conducting a refractory metal deposition process |
Jan. 19, 1993 |
| 5180434 |
Interfacial plasma bars for photovoltaic deposition apparatus |
Jan. 19, 1993 |
| 5174826 |
Laser-assisted chemical vapor deposition |
Dec. 29, 1992 |
| 5174827 |
Double chamber vacuum apparatus for thin layer deposition |
Dec. 29, 1992 |
| 5174881 |
Apparatus for forming a thin film on surface of semiconductor substrate |
Dec. 29, 1992 |
| 5169451 |
Vacuum vapor deposition apparatus |
Dec. 8, 1992 |
| 5167716 |
Method and apparatus for batch processing a semiconductor wafer |
Dec. 1, 1992 |
| 5167717 |
Apparatus and method for processing a semiconductor wafer |
Dec. 1, 1992 |
| 5160397 |
Plasma process apparatus and plasma processing method |
Nov. 3, 1992 |
| 5156521 |
Method for loading a substrate into a GVD apparatus |
Oct. 20, 1992 |
| 5154135 |
Apparatus for forming a deposited film |
Oct. 13, 1992 |
| 5154773 |
Vapor phase epitaxial growth apparatus having exhaust unit for removing unwanted deposit |
Oct. 13, 1992 |
| 5154810 |
Thin film coating and method |
Oct. 13, 1992 |
| 5151303 |
Method and apparatus for using evacuated, detachable web containers with high vacuum treating means |
Sep. 29, 1992 |
| 5149375 |
Apparatus for forming a deposited film of large area with the use of a plurality of activated gases separately formed |
Sep. 22, 1992 |
| 5149376 |
Process and apparatus for the simultaneous deposition of a protective coating on internal and external surfaces of heat-resistant alloy parts |
Sep. 22, 1992 |
| 5147168 |
Loading and unloading airlock apparatus for a vacuum treatment chamber |
Sep. 15, 1992 |
| 5140939 |
Apparatus and crucible for vapor deposition |
Aug. 25, 1992 |
| 5138973 |
Wafer processing apparatus having independently controllable energy sources |
Aug. 18, 1992 |
| 5139459 |
Clean transfer method and system therefor |
Aug. 18, 1992 |
| 5134965 |
Processing apparatus and method for plasma processing |
Aug. 4, 1992 |
| 5135635 |
Sputtering apparatus |
Aug. 4, 1992 |
| 5135778 |
Removably attachable fore-chamber for sequentially registering substrates with an opening in a vacuum treatment chamber and process of operation |
Aug. 4, 1992 |
| 5133284 |
Gas-based backside protection during substrate processing |
Jul. 28, 1992 |
| 5133285 |
Apparatus for transporting substrates |
Jul. 28, 1992 |
| 5132506 |
Vacuum evaporation apparatus and method for making vacuum evaporated sheet |
Jul. 21, 1992 |
| 5124013 |
High ratio planetary drive system and method for vacuum chamber |
Jun. 23, 1992 |
| 5121705 |
Loading lock for chemical vapor deposition apparatus |
Jun. 16, 1992 |
| 5121706 |
Apparatus for applying a composite insulative coating to a substrate |
Jun. 16, 1992 |
| 5122222 |
Frequency-domain analysis of RHEED data |
Jun. 16, 1992 |
| 5116640 |
Process for preparing an electroluminescent device |
May. 26, 1992 |
| 5113789 |
Self cleaning flow control orifice |
May. 19, 1992 |
| 5112185 |
Method for replacing a deposit shield in an evacuated film forming chamber |
May. 12, 1992 |
| 5112469 |
Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber |
May. 12, 1992 |
| 5110248 |
Vertical heat-treatment apparatus having a wafer transfer mechanism |
May. 5, 1992 |
| 5110249 |
Transport system for inline vacuum processing |
May. 5, 1992 |
| 5107791 |
Process for the manufacture of deposition films and apparatus therefor |
Apr. 28, 1992 |
| 5105761 |
Diffusion plasma-assisted chemical treatment apparatus |
Apr. 21, 1992 |
| 5102279 |
Continuous vacuum processing apparatus |
Apr. 7, 1992 |
| 5097794 |
Apparatus for transporting substrates in a vacuum coating system |
Mar. 24, 1992 |
| 5097800 |
High speed apparatus for forming capacitors |
Mar. 24, 1992 |
| 5094885 |
Differential pressure CVD chuck |
Mar. 10, 1992 |
| 5092728 |
Substrate loading apparatus for a CVD process |
Mar. 3, 1992 |
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