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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5266116 |
Glow discharge apparatus for continuously manufacturing semiconductor device comprising gas gates with slotted rollers |
Nov. 30, 1993 |
| 5266117 |
Apparatus for the evaporative coating of substrates |
Nov. 30, 1993 |
| 5264038 |
Chemical vapor deposition system |
Nov. 23, 1993 |
| 5264245 |
CVD method for forming uniform coatings |
Nov. 23, 1993 |
| 5261776 |
Vacuum operated wafer transfer apparatus |
Nov. 16, 1993 |
| 5261959 |
Diamond crystal growth apparatus |
Nov. 16, 1993 |
| 5261960 |
Reaction chambers for CVD systems |
Nov. 16, 1993 |
| 5259881 |
Wafer processing cluster tool batch preheating and degassing apparatus |
Nov. 9, 1993 |
| 5259942 |
Device for transferring a workpiece into and out from a vacuum chamber |
Nov. 9, 1993 |
| 5258075 |
Process for producing photoconductive member and apparatus for producing the same |
Nov. 2, 1993 |
| 5256204 |
Single semiconductor water transfer method and manufacturing system |
Oct. 26, 1993 |
| 5254169 |
High-vacuum coating apparatus |
Oct. 19, 1993 |
| 5254170 |
Enhanced vertical thermal reactor system |
Oct. 19, 1993 |
| 5254210 |
Method and apparatus for growing semiconductor heterostructures |
Oct. 19, 1993 |
| 5252131 |
Apparatus for gas source molecular beam epitaxy |
Oct. 12, 1993 |
| 5252366 |
Chemical vapor deposition method using an actively cooled effuser to coat a substrate having a heated surface layer |
Oct. 12, 1993 |
| 5248349 |
Process for making photovoltaic devices and resultant product |
Sep. 28, 1993 |
| 5246500 |
Vapor phase epitaxial growth apparatus |
Sep. 21, 1993 |
| 5244559 |
Apparatus for transport and heat treatment of substrates |
Sep. 14, 1993 |
| 5242477 |
Apparatus for coating optical fibers |
Sep. 7, 1993 |
| 5240505 |
Method of an apparatus for forming thin film for semiconductor device |
Aug. 31, 1993 |
| 5238498 |
Open tube-type impurity-diffusion apparatus for simultaneously diffusing impurities into a plurality of wafers subjected to a common environment, for producing a mass of semiconductor chips |
Aug. 24, 1993 |
| 5238525 |
Analysis of Rheed data from rotating substrates |
Aug. 24, 1993 |
| 5236509 |
Modular IBAD apparatus for continuous coating |
Aug. 17, 1993 |
| 5234501 |
Oxidation metod |
Aug. 10, 1993 |
| 5234528 |
Vertical heat-treating apparatus |
Aug. 10, 1993 |
| 5232505 |
Apparatus for the automatic casting, coating, varnishing, testing and sorting of workpieces |
Aug. 3, 1993 |
| 5232506 |
Furnace structure of semiconductor manufacturing apparatus |
Aug. 3, 1993 |
| 5232507 |
Apparatus for forming deposited films with microwave plasma CVD method |
Aug. 3, 1993 |
| 5232508 |
Gaseous phase chemical treatment reactor |
Aug. 3, 1993 |
| 5229081 |
Apparatus for semiconductor process including photo-excitation process |
Jul. 20, 1993 |
| 5227203 |
Ion-plating method and apparatus therefor |
Jul. 13, 1993 |
| 5227708 |
Two-axis magnetically coupled robot |
Jul. 13, 1993 |
| 5228114 |
Heat-treating apparatus with batch scheme having improved heat controlling capability |
Jul. 13, 1993 |
| 5224809 |
Semiconductor processing system with robotic autoloader and load lock |
Jul. 6, 1993 |
| 5223001 |
Vacuum processing apparatus |
Jun. 29, 1993 |
| 5222074 |
Thermal decomposition cell |
Jun. 22, 1993 |
| 5217755 |
Chemical vapor infiltration method utilizing substantially diffusive conditions |
Jun. 8, 1993 |
| 5217501 |
Vertical wafer heat treatment apparatus having dual load lock chambers |
Jun. 8, 1993 |
| 5215420 |
Substrate handling and processing system |
Jun. 1, 1993 |
| 5215589 |
High-vacuum coating apparatus |
Jun. 1, 1993 |
| 5216223 |
Plasma treatment apparatus |
Jun. 1, 1993 |
| 5203924 |
Method of and apparatus for synthesizing diamondlike thin film |
Apr. 20, 1993 |
| 5201956 |
Cellular tumble coater |
Apr. 13, 1993 |
| 5201995 |
Alternating cyclic pressure modulation process for selective area deposition |
Apr. 13, 1993 |
| 5202158 |
Apparatus for and method of producing high density fiber reinforced composite material |
Apr. 13, 1993 |
| 5199993 |
Methods of and apparatus for coating optical fibers |
Apr. 6, 1993 |
| 5199994 |
Impurity doping apparatus |
Apr. 6, 1993 |
| 5200017 |
Sample processing method and apparatus |
Apr. 6, 1993 |
| 5200232 |
Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors |
Apr. 6, 1993 |
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