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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.

Patents under this class:

Patent Number Title Of Patent Date Issued
8430966 Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate Apr. 30, 2013
8430964 Coating apparatus Apr. 30, 2013
8430963 Cool-down system and method for a vapor deposition system Apr. 30, 2013
8424485 Substrate treatment equipment and manufacturing method of substrate Apr. 23, 2013
8419341 Linear vacuum robot with Z motion and articulated arm Apr. 16, 2013
8414703 Advanced mixing system for integrated tool having site-isolated reactors Apr. 9, 2013
8414702 Plasma processing apparatus Apr. 9, 2013
8409399 Reduced maintenance chemical oxide removal (COR) processing system Apr. 2, 2013
8409354 Vapor based combinatorial processing Apr. 2, 2013
8409353 Water cooled gas injector Apr. 2, 2013
8404047 Electron beam vapor deposition apparatus and method Mar. 26, 2013
8388754 System and method for depositing a material on a substrate Mar. 5, 2013
8388753 Coating apparatus Mar. 5, 2013
8388397 Liquid crystal cell manufacturing device and method thereof Mar. 5, 2013
8382902 Single disc vapor lubrication Feb. 26, 2013
8382901 System and method for depositing a material on a substrate Feb. 26, 2013
8382897 Process gas delivery for semiconductor process chambers Feb. 26, 2013
8382088 Substrate processing apparatus Feb. 26, 2013
8377213 Slit valve having increased flow uniformity Feb. 19, 2013
8377210 Film forming apparatus Feb. 19, 2013
8375891 Vacuum vapor processing apparatus Feb. 19, 2013
8372202 Film deposition apparatus Feb. 12, 2013
8372196 Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxial wafer Feb. 12, 2013
8366829 Multi-station decoupled reactive ion etch chamber Feb. 5, 2013
8361232 Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate Jan. 29, 2013
8361229 Seal configuration for a system for continuous deposition of a thin film layer on a substrate Jan. 29, 2013
8357435 Flowable dielectric equipment and processes Jan. 22, 2013
8354001 Processing thin wafers Jan. 15, 2013
8353987 System and method for depositing a material on a substrate Jan. 15, 2013
8353986 Substrate processing apparatus Jan. 15, 2013
8352074 Path planning apparatus and method of robot Jan. 8, 2013
8349085 Substrate processing apparatus Jan. 8, 2013
8349084 Apparatus and systems for intermixing cadmium sulfide layers and cadmium telluride layers for thin film photovoltaic devices Jan. 8, 2013
8334015 Vapor based combinatorial processing Dec. 18, 2012
8333840 Metal organic chemical vapor deposition apparatus and method Dec. 18, 2012
8328945 Coating apparatus and method with indirect thermal stabilization Dec. 11, 2012
8328940 Apparatus for transferring a substrate Dec. 11, 2012
8323451 System and method for self-aligned dual patterning Dec. 4, 2012
8322299 Cluster processing apparatus for metallization processing in semiconductor manufacturing Dec. 4, 2012
8321047 Substrate processing system and substrate processing device Nov. 27, 2012
8317927 Systems and methods for sealing in site-isolated reactors Nov. 27, 2012
8317923 Protective self-aligned buffer layers for damascene interconnects Nov. 27, 2012
8316793 Film coating apparatus Nov. 27, 2012
8308866 Vapor deposition apparatus for an organic vapor deposition material and a method for producing an organic film Nov. 13, 2012
8303764 Apparatus and methods for transporting and processing substrates Nov. 6, 2012
8298340 Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method Oct. 30, 2012
8298339 Roll-to-roll continuous thin film PV manufacturing process and equipment with real time online IV measurement Oct. 30, 2012
8293555 Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system Oct. 23, 2012
8293066 Apparatus and methods for transporting and processing substrates Oct. 23, 2012
8290553 Device and method for fabricating thin films by reactive evaporation Oct. 16, 2012

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