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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7351291 |
Semiconductor processing system |
Apr. 1, 2008 |
| 7351285 |
Method and system for forming a variable thickness seed layer |
Apr. 1, 2008 |
| 7341633 |
Apparatus for electroless deposition |
Mar. 11, 2008 |
| 7335277 |
Vacuum processing apparatus |
Feb. 26, 2008 |
| 7335260 |
Laser annealing apparatus |
Feb. 26, 2008 |
| 7331751 |
Vacuum processing method |
Feb. 19, 2008 |
| 7326303 |
Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM) |
Feb. 5, 2008 |
| 7317961 |
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus |
Jan. 8, 2008 |
| 7313931 |
Method and device for heat treatment |
Jan. 1, 2008 |
| 7313262 |
Apparatus for visualization of process chamber conditions |
Dec. 25, 2007 |
| 7309395 |
System for forming composite polymer dielectric film |
Dec. 18, 2007 |
| 7294283 |
Penning discharge plasma source |
Nov. 13, 2007 |
| 7294207 |
Gas-admission element for CVD processes, and device |
Nov. 13, 2007 |
| 7291360 |
Chemical vapor deposition plasma process using plural ion shower grids |
Nov. 6, 2007 |
| 7285916 |
Multi chamber plasma process system |
Oct. 23, 2007 |
| 7282097 |
Slit valve door seal |
Oct. 16, 2007 |
| 7279067 |
Port structure in semiconductor processing system |
Oct. 9, 2007 |
| 7279047 |
Reactor for extended duration growth of gallium containing single crystals |
Oct. 9, 2007 |
| 7278831 |
Apparatus and method for control, pumping and abatement for vacuum process chambers |
Oct. 9, 2007 |
| 7276124 |
Reactor having a movable shutter |
Oct. 2, 2007 |
| 7276123 |
Semiconductor-processing apparatus provided with susceptor and placing block |
Oct. 2, 2007 |
| 7276122 |
Multi-workpiece processing chamber |
Oct. 2, 2007 |
| 7276121 |
Forming improved metal nitrides |
Oct. 2, 2007 |
| 7276097 |
Load-lock system, exposure processing system, and device manufacturing method |
Oct. 2, 2007 |
| 7270715 |
Chemical vapor deposition apparatus |
Sep. 18, 2007 |
| 7270709 |
Method and apparatus of generating PDMAT precursor |
Sep. 18, 2007 |
| 7267725 |
Thin-film deposition apparatus |
Sep. 11, 2007 |
| 7261779 |
System, method, and apparatus for continuous synthesis of single-walled carbon nanotubes |
Aug. 28, 2007 |
| 7258768 |
Method of fabricating an EL display device, and apparatus for forming a thin film |
Aug. 21, 2007 |
| 7247207 |
Vacuum processing apparatus |
Jul. 24, 2007 |
| 7241340 |
System configured for applying a modifying agent to a non-equidimensional substrate |
Jul. 10, 2007 |
| 7241099 |
Center ball O-ring |
Jul. 10, 2007 |
| 7238240 |
Method of applying hydrocarbon barrier to a plastic fuel tank |
Jul. 3, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7229666 |
Chemical vapor deposition method |
Jun. 12, 2007 |
| 7228873 |
Valve design and configuration for fast delivery system |
Jun. 12, 2007 |
| 7214274 |
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
May. 8, 2007 |
| 7208047 |
Apparatus and method for thermally isolating a heat chamber |
Apr. 24, 2007 |
| 7201823 |
High throughput plasma treatment system |
Apr. 10, 2007 |
| 7198678 |
Apparatus for performing at least one process on a substrate |
Apr. 3, 2007 |
| 7192487 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure |
Mar. 20, 2007 |
| 7183526 |
Apparatus and method for heating works uniformly through high frequency induction coils |
Feb. 27, 2007 |
| 7182122 |
Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
Feb. 27, 2007 |
| 7175880 |
Surface treatment system and method |
Feb. 13, 2007 |
| 7166184 |
Multi-stage type processing apparatus |
Jan. 23, 2007 |
| 7163608 |
Apparatus for synthesis of layers, coatings or films |
Jan. 16, 2007 |
| 7163586 |
Vapor deposition apparatus |
Jan. 16, 2007 |
| 7156960 |
Method and device for continuous cold plasma deposition of metal coatings |
Jan. 2, 2007 |
| 7156922 |
Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
Jan. 2, 2007 |
| 7153542 |
Assembly line processing method |
Dec. 26, 2006 |
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