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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7258768 |
Method of fabricating an EL display device, and apparatus for forming a thin film |
Aug. 21, 2007 |
| 7247207 |
Vacuum processing apparatus |
Jul. 24, 2007 |
| 7241340 |
System configured for applying a modifying agent to a non-equidimensional substrate |
Jul. 10, 2007 |
| 7241099 |
Center ball O-ring |
Jul. 10, 2007 |
| 7238240 |
Method of applying hydrocarbon barrier to a plastic fuel tank |
Jul. 3, 2007 |
| 7232286 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
Jun. 19, 2007 |
| 7229666 |
Chemical vapor deposition method |
Jun. 12, 2007 |
| 7228873 |
Valve design and configuration for fast delivery system |
Jun. 12, 2007 |
| 7214274 |
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
May. 8, 2007 |
| 7208047 |
Apparatus and method for thermally isolating a heat chamber |
Apr. 24, 2007 |
| 7201823 |
High throughput plasma treatment system |
Apr. 10, 2007 |
| 7198678 |
Apparatus for performing at least one process on a substrate |
Apr. 3, 2007 |
| 7192487 |
Semiconductor substrate processing chamber and accessory attachment interfacial structure |
Mar. 20, 2007 |
| 7183526 |
Apparatus and method for heating works uniformly through high frequency induction coils |
Feb. 27, 2007 |
| 7182122 |
Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
Feb. 27, 2007 |
| 7175880 |
Surface treatment system and method |
Feb. 13, 2007 |
| 7166184 |
Multi-stage type processing apparatus |
Jan. 23, 2007 |
| 7163608 |
Apparatus for synthesis of layers, coatings or films |
Jan. 16, 2007 |
| 7163586 |
Vapor deposition apparatus |
Jan. 16, 2007 |
| 7156960 |
Method and device for continuous cold plasma deposition of metal coatings |
Jan. 2, 2007 |
| 7156922 |
Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
Jan. 2, 2007 |
| 7153542 |
Assembly line processing method |
Dec. 26, 2006 |
| 7153367 |
Drive mechanism for a vacuum treatment apparatus |
Dec. 26, 2006 |
| 7153362 |
System and method for real time deposition process control based on resulting product detection |
Dec. 26, 2006 |
| 7144826 |
Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment |
Dec. 5, 2006 |
| 7141120 |
Manufacturing apparatus of semiconductor device having introducing section and withdrawing section |
Nov. 28, 2006 |
| 7132016 |
System for and method of manufacturing a large-area backplane by use of a small-area shadow mask |
Nov. 7, 2006 |
| 7131392 |
Vacuum evaporator |
Nov. 7, 2006 |
| 7128803 |
Integration of sensor based metrology into semiconductor processing tools |
Oct. 31, 2006 |
| 7119032 |
Method to protect internal components of semiconductor processing equipment using layered superlattice materials |
Oct. 10, 2006 |
| 7118783 |
Methods and apparatus for vapor processing of micro-device workpieces |
Oct. 10, 2006 |
| 7104476 |
Multi-sectored flat board type showerhead used in CVD apparatus |
Sep. 12, 2006 |
| 7105059 |
Reaction apparatus for atomic layer deposition |
Sep. 12, 2006 |
| 7105061 |
Method and apparatus for sealing substrate load port in a high pressure reactor |
Sep. 12, 2006 |
| 7103443 |
Directed gas injection apparatus for semiconductor processing |
Sep. 5, 2006 |
| 7097712 |
Apparatus for processing a semiconductor |
Aug. 29, 2006 |
| 7090741 |
Semiconductor processing system |
Aug. 15, 2006 |
| 7085616 |
Atomic layer deposition apparatus |
Aug. 1, 2006 |
| 7077159 |
Processing apparatus having integrated pumping system |
Jul. 18, 2006 |
| 7077929 |
Apparatus for manufacturing a semiconductor device |
Jul. 18, 2006 |
| 7078074 |
Lens plasma coating system |
Jul. 18, 2006 |
| 7078250 |
Method and apparatus for manufacturing organic electroluminescent device, electronic apparatus and method of removing ionic impurities |
Jul. 18, 2006 |
| 7066194 |
Valve design and configuration for fast delivery system |
Jun. 27, 2006 |
| 7051759 |
Processing apparatus having integrated pumping system |
May. 30, 2006 |
| 7052576 |
Pressure control apparatus and method of establishing a desired level of pressure within at least one processing chamber |
May. 30, 2006 |
| 7049154 |
Vapor phase growth method by controlling the heat output in the gas introduction region |
May. 23, 2006 |
| 7033439 |
Apparatus for fabricating a III-V nitride film and a method for fabricating the same |
Apr. 25, 2006 |
| 7033471 |
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
Apr. 25, 2006 |
| 7025856 |
Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge |
Apr. 11, 2006 |
| 7022191 |
Method of crystallizing amorphous silicon layer and crystallizing apparatus thereof |
Apr. 4, 2006 |
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