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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5433780 |
Vacuum processing apparatus and exhaust system that prevents particle contamination |
Jul. 18, 1995 |
| 5433785 |
Thermal treatment apparatus, semiconductor device fabrication apparatus, load-lock chamber |
Jul. 18, 1995 |
| 5433787 |
Apparatus for forming deposited film including light transmissive diffusion plate |
Jul. 18, 1995 |
| 5431735 |
Phosphorus effusion cell for molecular beam epitaxy |
Jul. 11, 1995 |
| 5429070 |
High density plasma deposition and etching apparatus |
Jul. 4, 1995 |
| 5425611 |
Substrate handling and processing system |
Jun. 20, 1995 |
| 5423914 |
Film depositing apparatus and process for preparing layered structure including oxide superconductor thin film |
Jun. 13, 1995 |
| 5423971 |
Arrangement for coating substrates |
Jun. 13, 1995 |
| 5424097 |
Continuous vapor deposition apparatus |
Jun. 13, 1995 |
| 5421889 |
Method and apparatus for inverting samples in a process |
Jun. 6, 1995 |
| 5421890 |
Apparatus for producing oxide thin film |
Jun. 6, 1995 |
| 5417537 |
Wafer transport device |
May. 23, 1995 |
| 5413663 |
Plasma processing apparatus |
May. 9, 1995 |
| 5413671 |
Apparatus and method for removing deposits from an APCVD system |
May. 9, 1995 |
| 5411592 |
Apparatus for deposition of thin-film, solid state batteries |
May. 2, 1995 |
| 5411593 |
Apparatus for servicing vacuum chamber using non-reactive gas filled maintenance enclosure |
May. 2, 1995 |
| 5409539 |
Slotted cantilever diffusion tube system with a temperature insulating baffle system and a distributed gas injector system |
Apr. 25, 1995 |
| 5409540 |
Chemical vapor phase growth method and chemical vapor phase growth apparatus |
Apr. 25, 1995 |
| 5407485 |
Apparatus for producing semiconductor device and method for producing semiconductor device |
Apr. 18, 1995 |
| 5404894 |
Conveyor apparatus |
Apr. 11, 1995 |
| 5405230 |
Load-lock unit and wafer transfer system |
Apr. 11, 1995 |
| 5405445 |
Vacuum extraction system for chemical vapor deposition reactor vessel and trapping device incorporated therein |
Apr. 11, 1995 |
| 5405446 |
Apparatus for heat processing a substrate |
Apr. 11, 1995 |
| 5401316 |
Method and apparatus for hydrophobic treatment |
Mar. 28, 1995 |
| 5399199 |
Apparatus for gas source molecular beam epitaxy |
Mar. 21, 1995 |
| 5397395 |
Method of continuously forming a large area functional deposited film by microwave PCVD and apparatus for the same |
Mar. 14, 1995 |
| 5397596 |
Method of reducing particulate contaminants in a chemical-vapor-deposition system |
Mar. 14, 1995 |
| 5395198 |
Vacuum loading chuck and fixture for flexible printed circuit panels |
Mar. 7, 1995 |
| 5388944 |
Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus |
Feb. 14, 1995 |
| 5387067 |
Direct load/unload semiconductor wafer cassette apparatus and transfer system |
Feb. 7, 1995 |
| 5383969 |
Process and apparatus for supplying zinc vapor continuously to a chemical vapor deposition process from a continuous supply of solid zinc |
Jan. 24, 1995 |
| 5383971 |
Differential pressure CVD chuck |
Jan. 24, 1995 |
| 5382126 |
Multichamber coating apparatus |
Jan. 17, 1995 |
| 5382419 |
Production of high-purity polycrystalline silicon rod for semiconductor applications |
Jan. 17, 1995 |
| 5378283 |
Treating device |
Jan. 3, 1995 |
| 5376212 |
Reduced-pressure processing apparatus |
Dec. 27, 1994 |
| 5374313 |
Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure |
Dec. 20, 1994 |
| 5372646 |
Apparatus for making photovoltaic devices |
Dec. 13, 1994 |
| 5372647 |
Apparatus for forming thin film |
Dec. 13, 1994 |
| 5372648 |
Plasma CVD system |
Dec. 13, 1994 |
| 5372862 |
Coating technique for synchrotron beam tubes |
Dec. 13, 1994 |
| 5370736 |
Horizontal reactor hardware design |
Dec. 6, 1994 |
| 5368676 |
Plasma processing apparatus comprising electron supply chamber and high frequency electric field generation means |
Nov. 29, 1994 |
| 5366554 |
Device for forming a deposited film |
Nov. 22, 1994 |
| 5366555 |
Chemical vapor deposition under a single reactor vessel divided into separate reaction regions with its own depositing and exhausting means |
Nov. 22, 1994 |
| 5364219 |
Apparatus for clean transfer of objects |
Nov. 15, 1994 |
| 5364225 |
Method of printed circuit panel manufacture |
Nov. 15, 1994 |
| 5364481 |
Apparatus for manufacturing a thin-film photovoltaic conversion device |
Nov. 15, 1994 |
| 5355832 |
Polymerization reactor |
Oct. 18, 1994 |
| 5356474 |
Apparatus and method for making aligned Hi-Tc tape superconductors |
Oct. 18, 1994 |
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