| |
 |
|
Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5626677 |
Atmospheric pressure CVD apparatus |
May. 6, 1997 |
| 5624498 |
Showerhead for a gas supplying apparatus |
Apr. 29, 1997 |
| 5622918 |
Process and apparatus for preparing YBaCuO superconducting films |
Apr. 22, 1997 |
| 5620522 |
Microwave plasma generator |
Apr. 15, 1997 |
| 5620578 |
Sputtering apparatus having an on board service module |
Apr. 15, 1997 |
| 5618388 |
Geometries and configurations for magnetron sputtering apparatus |
Apr. 8, 1997 |
| 5611861 |
Rotary type apparatus for processing semiconductor wafers and method of processing semiconductor wafers |
Mar. 18, 1997 |
| 5609688 |
Apparatus for producing semiconductor device |
Mar. 11, 1997 |
| 5609689 |
Vacuum process apparaus |
Mar. 11, 1997 |
| 5603761 |
Liquid phase epitaxial growth method for carrying out the same |
Feb. 18, 1997 |
| 5597609 |
Process and apparatus for the continuous or semi-continuous coating of eyeglass lenses |
Jan. 28, 1997 |
| 5593740 |
Method and apparatus for making carbon-encapsulated ultrafine metal particles |
Jan. 14, 1997 |
| 5591268 |
Plasma process with radicals |
Jan. 7, 1997 |
| 5588999 |
Thin film forming device |
Dec. 31, 1996 |
| 5589007 |
Photovoltaic elements and process and apparatus for their formation |
Dec. 31, 1996 |
| 5589224 |
Apparatus for full wafer deposition |
Dec. 31, 1996 |
| 5587207 |
Arc assisted CVD coating and sintering method |
Dec. 24, 1996 |
| 5585137 |
Apparatus and method of manufacturing fiber |
Dec. 17, 1996 |
| 5582881 |
Process for deposition of a Ti/TiN cap layer on aluminum metallization and apparatus |
Dec. 10, 1996 |
| 5578129 |
Gas supplying head and load lock chamber of semiconductor processing system |
Nov. 26, 1996 |
| 5578130 |
Apparatus and method for depositing a film |
Nov. 26, 1996 |
| 5575855 |
Apparatus for forming a deposited film |
Nov. 19, 1996 |
| 5571330 |
Load lock chamber for vertical type heat treatment apparatus |
Nov. 5, 1996 |
| 5571331 |
Vacuum treatment apparatus |
Nov. 5, 1996 |
| 5571749 |
Method and apparatus for forming deposited film |
Nov. 5, 1996 |
| 5569328 |
Silicon semiconductor wafer test |
Oct. 29, 1996 |
| 5562383 |
Treatment apparatus |
Oct. 8, 1996 |
| 5562387 |
Device for transferring plate-like objects |
Oct. 8, 1996 |
| 5563095 |
Method for manufacturing semiconductor devices |
Oct. 8, 1996 |
| 5558717 |
CVD Processing chamber |
Sep. 24, 1996 |
| 5556472 |
Film deposition apparatus |
Sep. 17, 1996 |
| 5556473 |
Parylene deposition apparatus including dry vacuum pump system and downstream cold trap |
Sep. 17, 1996 |
| 5554249 |
Magnetron plasma processing system |
Sep. 10, 1996 |
| 5551984 |
Vertical heat treatment apparatus with a circulation gas passage |
Sep. 3, 1996 |
| 5547512 |
Continuous atomspheric pressure CVD coating of fibers |
Aug. 20, 1996 |
| 5545387 |
Production of high-purity polycrystalline silicon rod for semiconductor applications |
Aug. 13, 1996 |
| 5542979 |
Apparatus for producing thin film |
Aug. 6, 1996 |
| 5540777 |
Aluminum oxide LPCVD system |
Jul. 30, 1996 |
| 5538390 |
Enclosure for load lock interface |
Jul. 23, 1996 |
| 5538390 |
Enclosure for load lock interface |
Jul. 23, 1996 |
| 5536128 |
Method and apparatus for carrying a variety of products |
Jul. 16, 1996 |
| 5536317 |
Parylene deposition apparatus including a quartz crystal thickness/rate controller |
Jul. 16, 1996 |
| 5536319 |
Parylene deposition apparatus including an atmospheric shroud and inert gas source |
Jul. 16, 1996 |
| 5536320 |
Processing apparatus |
Jul. 16, 1996 |
| 5536321 |
Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter |
Jul. 16, 1996 |
| 5536322 |
Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device |
Jul. 16, 1996 |
| 5534068 |
Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement |
Jul. 9, 1996 |
| 5534069 |
Method of treating active material |
Jul. 9, 1996 |
| 5532102 |
Apparatus and process for preparation of migration imaging members |
Jul. 2, 1996 |
| 5529634 |
Apparatus and method of manufacturing semiconductor device |
Jun. 25, 1996 |
|
|
|
