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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5766360 |
Substrate processing apparatus and substrate processing method |
Jun. 16, 1998 |
| 5766404 |
Methods and apparatus for plasma treatment of workpieces |
Jun. 16, 1998 |
| 5762745 |
Substrate processing apparatus |
Jun. 9, 1998 |
| 5764012 |
Two-axis magnetically coupled robot |
Jun. 9, 1998 |
| 5759214 |
Nitrogen gas supply system |
Jun. 2, 1998 |
| 5759268 |
System for providing a controlled deposition on wafers |
Jun. 2, 1998 |
| 5759334 |
Plasma processing apparatus |
Jun. 2, 1998 |
| 5755888 |
Method and apparatus of forming thin films |
May. 26, 1998 |
| 5755938 |
Single chamber for CVD and sputtering film manufacturing |
May. 26, 1998 |
| 5753092 |
Cylindrical carriage sputtering system |
May. 19, 1998 |
| 5753320 |
Process for forming deposited film |
May. 19, 1998 |
| 5750436 |
Thermal processing method and apparatus therefor |
May. 12, 1998 |
| 5747099 |
Two chamber reaction furnace |
May. 5, 1998 |
| 5747780 |
Apparatus for conveying and processing a wafer in a physically contact-free state |
May. 5, 1998 |
| 5738771 |
Thin film forming apparatus |
Apr. 14, 1998 |
| 5736431 |
Method for producing thin film solar battery |
Apr. 7, 1998 |
| 5735960 |
Apparatus and method to increase gas residence time in a reactor |
Apr. 7, 1998 |
| 5735961 |
Semiconductor fabricating apparatus, method for controlling oxygen concentration within load-lock chamber and method for generating native oxide |
Apr. 7, 1998 |
| 5730801 |
Compartnetalized substrate processing chamber |
Mar. 24, 1998 |
| 5730802 |
Vapor growth apparatus and vapor growth method capable of growing good productivity |
Mar. 24, 1998 |
| 5730847 |
Arc ion plating device and arc ion plating system |
Mar. 24, 1998 |
| 5720821 |
Jet vapor deposition of organic molecule guest-inorganic host thin films |
Feb. 24, 1998 |
| 5714008 |
Molecular beam epitaxy source cell |
Feb. 3, 1998 |
| 5711811 |
Method and equipment for growing thin films |
Jan. 27, 1998 |
| 5711813 |
Epitaxial crystal growth apparatus |
Jan. 27, 1998 |
| 5709753 |
Parylene deposition apparatus including a heated and cooled dimer crucible |
Jan. 20, 1998 |
| 5709785 |
Metallizing machine |
Jan. 20, 1998 |
| 5707500 |
Vacuum processing equipment, film coating equipment and deposition method |
Jan. 13, 1998 |
| 5704980 |
Method of and apparatus for making plastic film with barrier layers |
Jan. 6, 1998 |
| 5700127 |
Substrate processing method and substrate processing apparatus |
Dec. 23, 1997 |
| 5697749 |
Wafer processing apparatus |
Dec. 16, 1997 |
| 5695564 |
Semiconductor processing system |
Dec. 9, 1997 |
| 5688359 |
Muffle etch injector assembly |
Nov. 18, 1997 |
| 5688389 |
Method and apparatus for thin film coating an article |
Nov. 18, 1997 |
| 5685684 |
Vacuum processing system |
Nov. 11, 1997 |
| 5685912 |
Pressure control system for semiconductor manufacturing equipment |
Nov. 11, 1997 |
| 5685963 |
In situ getter pump system and method |
Nov. 11, 1997 |
| 5679165 |
Apparatus for manufacturing semiconductor device |
Oct. 21, 1997 |
| 5679166 |
Magnetic recording media, magnetic recording media fabrication method, and fabrication equipment |
Oct. 21, 1997 |
| 5674574 |
Vapor delivery system for solid precursors and method regarding same |
Oct. 7, 1997 |
| 5674368 |
Film forming apparatus |
Oct. 7, 1997 |
| 5667592 |
Process chamber sleeve with ring seals for isolating individual process modules in a common cluster |
Sep. 16, 1997 |
| 5662785 |
Method for masking a workpiece and a vacuum treatment facility |
Sep. 2, 1997 |
| 5656902 |
Two-axis magnetically coupled robot |
Aug. 12, 1997 |
| 5651867 |
Plasma processing method and apparatus |
Jul. 29, 1997 |
| 5651868 |
Method and apparatus for coating thin film data storage disks |
Jul. 29, 1997 |
| 5647912 |
Plasma processing apparatus |
Jul. 15, 1997 |
| 5637180 |
Plasma processing method and plasma generator |
Jun. 10, 1997 |
| 5630879 |
Method and apparatus for the partial coating of sets of structural components |
May. 20, 1997 |
| 5630880 |
Method and apparatus for a large volume plasma processor that can utilize any feedstock material |
May. 20, 1997 |
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