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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6630053 Semiconductor processing module and apparatus Oct. 7, 2003
6626997 Continuous processing chamber Sep. 30, 2003
6627039 Plasma processing methods and apparatus Sep. 30, 2003
6623802 Process and installation for forming a layer on a substrate Sep. 23, 2003
6620288 Substrate treatment apparatus Sep. 16, 2003
6613151 Single disc vapor lubrication Sep. 2, 2003
6613587 Method of replacing at least a portion of a semiconductor substrate deposition chamber liner Sep. 2, 2003
6609877 Vacuum chamber load lock structure and article transport mechanism Aug. 26, 2003
6610150 Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system Aug. 26, 2003
6610151 Seed layers for interconnects and methods and apparatus for their fabrication Aug. 26, 2003
6607602 Device for processing semiconductor wafers Aug. 19, 2003
6602347 Apparatus and method for processing a substrate Aug. 5, 2003
6602348 Substrate cooldown chamber Aug. 5, 2003
6599368 System architecture of semiconductor manufacturing equipment Jul. 29, 2003
6595370 Apparatus and method for reducing contamination in a wafer transfer chamber Jul. 22, 2003
6585823 Atomic layer deposition Jul. 1, 2003
6586343 Method and apparatus for directing constituents through a processing chamber Jul. 1, 2003
6579422 Method and apparatus for manufacturing flexible organic EL display Jun. 17, 2003
6579428 Arc evaporator, method for driving arc evaporator, and ion plating apparatus Jun. 17, 2003
6575737 Method and apparatus for improved substrate handling Jun. 10, 2003
6576061 Apparatus and method for processing a substrate Jun. 10, 2003
6576062 Film forming apparatus and film forming method Jun. 10, 2003
6576063 Apparatus and method for use in manufacturing a semiconductor device Jun. 10, 2003
6577923 Apparatus and method for robotic alignment of substrates Jun. 10, 2003
6572705 Method and apparatus for growing thin films Jun. 3, 2003
6565662 Vacuum processing apparatus for semiconductor process May. 20, 2003
6562128 In-situ post epitaxial treatment process May. 13, 2003
6562140 Apparatus for fabrication of thin films May. 13, 2003
6562141 Dual degas/cool loadlock cluster tool May. 13, 2003
6558509 Dual wafer load lock May. 6, 2003
6554980 Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates Apr. 29, 2003
6549825 Alignment apparatus Apr. 15, 2003
6540466 Compact apparatus and method for storing and loading semiconductor wafer carriers Apr. 1, 2003
6540869 Semiconductor processing system Apr. 1, 2003
6537415 Apparatus for processing samples Mar. 25, 2003
6530732 Single substrate load lock with offset cool module and buffer chamber Mar. 11, 2003
6530993 Cluster tool for fabricating semiconductor device Mar. 11, 2003
6527866 Apparatus and method for deposition of thin films Mar. 4, 2003
6528395 Method of fabricating compound semiconductor device and apparatus for fabricating compound semiconductor device Mar. 4, 2003
6521048 Single body injector and deposition chamber Feb. 18, 2003
6521104 Configurable vacuum system and method Feb. 18, 2003
6516743 Method and apparatus diffusing zinc into groups III-V compound semiconductor crystals Feb. 11, 2003
6517691 Substrate processing system Feb. 11, 2003
6513451 Controlling the thickness of an organic layer in an organic light-emiting device Feb. 4, 2003
6514339 Laser annealing apparatus Feb. 4, 2003
6508883 Throughput enhancement for single wafer reactor Jan. 21, 2003
6506009 Apparatus for storing and moving a cassette Jan. 14, 2003
6506253 Photo-excited gas processing apparatus for semiconductor process Jan. 14, 2003
6503365 Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing Jan. 7, 2003
6503379 Mobile plating system and method Jan. 7, 2003

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