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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6756235 Metal oxide film formation method and apparatus Jun. 29, 2004
6752874 Apparatus for perpendicular-type ultra vacuum chemical vapor deposition Jun. 22, 2004
6752900 Vacuum loadlock ultraviolet bake for plasma etch Jun. 22, 2004
6753123 Process and apparatus for manufacturing electrophotographic photosensitive member Jun. 22, 2004
6749086 Pressurized liquid delivery module Jun. 15, 2004
6749906 Thermal physical vapor deposition apparatus with detachable vapor source(s) and method Jun. 15, 2004
6750155 Methods to minimize moisture condensation over a substrate in a rapid cycle chamber Jun. 15, 2004
6742977 Substrate processing device, substrate conveying device, and substrate processing method Jun. 1, 2004
6743645 Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device Jun. 1, 2004
6740195 Detection of nontransient processing anomalies in vacuum manufacturing process May. 25, 2004
6736016 Paint booth air detection system May. 18, 2004
6736929 Distributed control system for semiconductor manufacturing equipment May. 18, 2004
6733592 High-temperature and high-pressure treatment device May. 11, 2004
6735276 Sample preprocessing system for a fluorescent X-ray analysis and X-ray fluorescence spectrometric system using the same May. 11, 2004
6730369 Device and method for plasma processing May. 4, 2004
6726776 Low temperature integrated metallization process and apparatus Apr. 27, 2004
6716772 Semiconductor device manufacturing method and semiconductor manufacturing apparatus Apr. 6, 2004
6712907 Magnetically coupled linear servo-drive mechanism Mar. 30, 2004
6712908 Purified silicon production system Mar. 30, 2004
6709521 Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system Mar. 23, 2004
6709522 Material handling system and methods for a multichamber plasma treatment system Mar. 23, 2004
6709545 Substrate processing apparatus and substrate processing method Mar. 23, 2004
6705245 Apparatus for forming polymer continuously on the surface of metal by DC plasma polymerization Mar. 16, 2004
6706119 Apparatus for epitaxially growing semiconductor device structures with submicron group III nitride layer utilizing HVPE Mar. 16, 2004
6702897 Optical transmission systems and apparatuses including bragg gratings and methods of making Mar. 9, 2004
6695947 Device for manufacturing semiconductor device and method of manufacturing the same Feb. 24, 2004
6692613 Reactor for processing a semiconductor wafer Feb. 17, 2004
6692649 Inductively coupled plasma downstream strip module Feb. 17, 2004
6688375 Vacuum processing system having improved substrate heating and cooling Feb. 10, 2004
6685779 Method and a system for sealing an epitaxial silicon layer on a substrate Feb. 3, 2004
6682629 Substrate processing unit Jan. 27, 2004
6673196 Plasma processing apparatus Jan. 6, 2004
6669185 Wafer loading system positioning method and device Dec. 30, 2003
6669987 Method for vacuum treatment of workpieces and vacuum treatment facility Dec. 30, 2003
6666922 System for processing a workpiece Dec. 23, 2003
6663713 Method and apparatus for forming a thin polymer layer on an integrated circuit structure Dec. 16, 2003
6663714 CVD apparatus Dec. 16, 2003
6660094 Apparatus and method for forming deposited film Dec. 9, 2003
6660135 Staged aluminum deposition process for filling vias Dec. 9, 2003
6660666 Integrated processing system for forming an insulating layer of thin film transistor liquid crystal display Dec. 9, 2003
6652654 System configured for applying multiple modifying agents to a substrate Nov. 25, 2003
6648974 Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction Nov. 18, 2003
6649020 Plasma processing apparatus Nov. 18, 2003
6641703 Magnetic multi-layer film manufacturing apparatus Nov. 4, 2003
6638860 Method and apparatus for processing substrates and method for manufacturing a semiconductor device Oct. 28, 2003
6634116 Vacuum processing apparatus Oct. 21, 2003
6634314 Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectors Oct. 21, 2003
6635115 Tandem process chamber Oct. 21, 2003
6635116 Residual oxygen reduction system Oct. 21, 2003
6633022 Substrate processing apparatus and substrate processing method Oct. 14, 2003

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