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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.


Patents under this class:

Patent Number Title Of Patent Date Issued
7611586 Reactor for extended duration growth of gallium containing single crystals Nov. 3, 2009
7611585 Plasma reaction chamber with a built-in magnetic core Nov. 3, 2009
7611322 Processing thin wafers Nov. 3, 2009
7594970 Web coating apparatus with a vacuum chamber and a coating cylinder Sep. 29, 2009
7585383 Vacuum processing apparatus Sep. 8, 2009
7585141 Load lock system for ion beam processing Sep. 8, 2009
7576017 Method and apparatus for forming a thin-film solar cell using a continuous process Aug. 18, 2009
7559992 Semiconductor processing apparatus and method Jul. 14, 2009
7547644 Methods and apparatus for forming barrier layers in high aspect ratio vias Jun. 16, 2009
7547465 Multi-station deposition apparatus and method Jun. 16, 2009
7537673 Plasma processing apparatus May. 26, 2009
7534730 Producing method of semiconductor device and substrate processing apparatus May. 19, 2009
7531816 Vacuum conveying apparatus and charged particle beam equipment with the same May. 12, 2009
7527693 Apparatus for improved delivery of metastable species May. 5, 2009
7526878 Method and apparatus for drying coating film and method for producing optical film May. 5, 2009
7521089 Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers Apr. 21, 2009
7517557 Oxide films, a method of producing the same and structures having the same Apr. 14, 2009
7513953 Continuous system for depositing films onto plastic bottles and method Apr. 7, 2009
7513949 Method and apparatus for producing semiconductor device Apr. 7, 2009
7497912 Substrate processing apparatus Mar. 3, 2009
7481889 Film forming apparatus and film forming method Jan. 27, 2009
7464663 Roll-vortex plasma chemical vapor deposition system Dec. 16, 2008
7462372 Light emitting device, method of manufacturing the same, and thin film forming apparatus Dec. 9, 2008
7455747 Substrate processing apparatus, control method for the apparatus, and program for implementing the method Nov. 25, 2008
7455735 Width adjustable substrate support for plasma processing Nov. 25, 2008
7452423 Diffusion system Nov. 18, 2008
7442900 Chamber for uniform heating of large area substrates Oct. 28, 2008
7439208 Growth of in-situ thin films by reactive evaporation Oct. 21, 2008
7438175 Linear vacuum deposition system Oct. 21, 2008
7435445 Method for manufacturing semiconductor device Oct. 14, 2008
7431795 Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor Oct. 7, 2008
7431773 Atomic layer deposition apparatus and method Oct. 7, 2008
7429300 Successive vapour deposition system, vapour deposition system, and vapour deposition process Sep. 30, 2008
7422653 Single-sided inflatable vertical slit valve Sep. 9, 2008
7422636 Plasma enhanced atomic layer deposition system having reduced contamination Sep. 9, 2008
7422198 Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method Sep. 9, 2008
7419550 Oxidizing method and oxidizing unit of object for object to be processed Sep. 2, 2008
7413639 Energy and media connection for a coating installation comprising several chambers Aug. 19, 2008
7410542 Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates Aug. 12, 2008
7394067 Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems Jul. 1, 2008
7387686 Film formation apparatus Jun. 17, 2008
7381969 Load lock control Jun. 3, 2008
7378133 Fabrication system, light-emitting device and fabricating method of organic compound-containing layer May. 27, 2008
7377977 High-purity crystal growth May. 27, 2008
7374731 Reaction apparatus for producing vapor-grown carbon fibers and continuous production system thereof May. 20, 2008
7357846 Substrate processing apparatus and substrate processing method Apr. 15, 2008
7351292 Assembly for processing substrates Apr. 1, 2008
7351291 Semiconductor processing system Apr. 1, 2008
7351285 Method and system for forming a variable thickness seed layer Apr. 1, 2008
7341633 Apparatus for electroless deposition Mar. 11, 2008



 
 
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