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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7611586 |
Reactor for extended duration growth of gallium containing single crystals |
Nov. 3, 2009 |
| 7611585 |
Plasma reaction chamber with a built-in magnetic core |
Nov. 3, 2009 |
| 7611322 |
Processing thin wafers |
Nov. 3, 2009 |
| 7594970 |
Web coating apparatus with a vacuum chamber and a coating cylinder |
Sep. 29, 2009 |
| 7585383 |
Vacuum processing apparatus |
Sep. 8, 2009 |
| 7585141 |
Load lock system for ion beam processing |
Sep. 8, 2009 |
| 7576017 |
Method and apparatus for forming a thin-film solar cell using a continuous process |
Aug. 18, 2009 |
| 7559992 |
Semiconductor processing apparatus and method |
Jul. 14, 2009 |
| 7547644 |
Methods and apparatus for forming barrier layers in high aspect ratio vias |
Jun. 16, 2009 |
| 7547465 |
Multi-station deposition apparatus and method |
Jun. 16, 2009 |
| 7537673 |
Plasma processing apparatus |
May. 26, 2009 |
| 7534730 |
Producing method of semiconductor device and substrate processing apparatus |
May. 19, 2009 |
| 7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same |
May. 12, 2009 |
| 7527693 |
Apparatus for improved delivery of metastable species |
May. 5, 2009 |
| 7526878 |
Method and apparatus for drying coating film and method for producing optical film |
May. 5, 2009 |
| 7521089 |
Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers |
Apr. 21, 2009 |
| 7517557 |
Oxide films, a method of producing the same and structures having the same |
Apr. 14, 2009 |
| 7513953 |
Continuous system for depositing films onto plastic bottles and method |
Apr. 7, 2009 |
| 7513949 |
Method and apparatus for producing semiconductor device |
Apr. 7, 2009 |
| 7497912 |
Substrate processing apparatus |
Mar. 3, 2009 |
| 7481889 |
Film forming apparatus and film forming method |
Jan. 27, 2009 |
| 7464663 |
Roll-vortex plasma chemical vapor deposition system |
Dec. 16, 2008 |
| 7462372 |
Light emitting device, method of manufacturing the same, and thin film forming apparatus |
Dec. 9, 2008 |
| 7455747 |
Substrate processing apparatus, control method for the apparatus, and program for implementing the method |
Nov. 25, 2008 |
| 7455735 |
Width adjustable substrate support for plasma processing |
Nov. 25, 2008 |
| 7452423 |
Diffusion system |
Nov. 18, 2008 |
| 7442900 |
Chamber for uniform heating of large area substrates |
Oct. 28, 2008 |
| 7439208 |
Growth of in-situ thin films by reactive evaporation |
Oct. 21, 2008 |
| 7438175 |
Linear vacuum deposition system |
Oct. 21, 2008 |
| 7435445 |
Method for manufacturing semiconductor device |
Oct. 14, 2008 |
| 7431795 |
Cluster tool and method for process integration in manufacture of a gate structure of a field effect transistor |
Oct. 7, 2008 |
| 7431773 |
Atomic layer deposition apparatus and method |
Oct. 7, 2008 |
| 7429300 |
Successive vapour deposition system, vapour deposition system, and vapour deposition process |
Sep. 30, 2008 |
| 7422653 |
Single-sided inflatable vertical slit valve |
Sep. 9, 2008 |
| 7422636 |
Plasma enhanced atomic layer deposition system having reduced contamination |
Sep. 9, 2008 |
| 7422198 |
Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method |
Sep. 9, 2008 |
| 7419550 |
Oxidizing method and oxidizing unit of object for object to be processed |
Sep. 2, 2008 |
| 7413639 |
Energy and media connection for a coating installation comprising several chambers |
Aug. 19, 2008 |
| 7410542 |
Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates |
Aug. 12, 2008 |
| 7394067 |
Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems |
Jul. 1, 2008 |
| 7387686 |
Film formation apparatus |
Jun. 17, 2008 |
| 7381969 |
Load lock control |
Jun. 3, 2008 |
| 7378133 |
Fabrication system, light-emitting device and fabricating method of organic compound-containing layer |
May. 27, 2008 |
| 7377977 |
High-purity crystal growth |
May. 27, 2008 |
| 7374731 |
Reaction apparatus for producing vapor-grown carbon fibers and continuous production system thereof |
May. 20, 2008 |
| 7357846 |
Substrate processing apparatus and substrate processing method |
Apr. 15, 2008 |
| 7351292 |
Assembly for processing substrates |
Apr. 1, 2008 |
| 7351291 |
Semiconductor processing system |
Apr. 1, 2008 |
| 7351285 |
Method and system for forming a variable thickness seed layer |
Apr. 1, 2008 |
| 7341633 |
Apparatus for electroless deposition |
Mar. 11, 2008 |
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