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Class Information
Number: 118/719
Name: Coating apparatus > Gas or vapor deposition > Multizone chamber
Description: Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.

Patents under this class:

Patent Number Title Of Patent Date Issued
8679307 Method and apparatus for preparing specimens for microscopy Mar. 25, 2014
8677932 Apparatus for metering granular source material in a thin film vapor deposition apparatus Mar. 25, 2014
8677590 Plasma confinement structures in plasma processing systems and methods thereof Mar. 25, 2014
8673079 Film deposition apparatus and substrate processing apparatus Mar. 18, 2014
8652259 Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition Feb. 18, 2014
8641824 Method and apparatus for a cleanspace fabricator Feb. 4, 2014
8632854 Substrate centering device and organic material deposition system Jan. 21, 2014
8628619 Plasma coating system for accommodating substrates of different shapes Jan. 14, 2014
8623765 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus Jan. 7, 2014
8623733 Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects Jan. 7, 2014
8623457 Vacuum processing system Jan. 7, 2014
8623142 Coating apparatus Jan. 7, 2014
8623141 Piping system and control for semiconductor processing Jan. 7, 2014
8618446 Substrate support with substrate heater and symmetric RF return Dec. 31, 2013
8617347 Vacuum processing chambers incorporating a moveable flow equalizer Dec. 31, 2013
8613802 Nitride semiconductor crystal manufacturing apparatus, nitride semiconductor crystal manufacturing method, and nitride semiconductor crystal Dec. 24, 2013
8609192 Method and device for controlling oxidizing-reducing of the surface of a steel strip running continuously through a radiant tubes furnace for its galvanizing Dec. 17, 2013
8608422 Particle sticking prevention apparatus and plasma processing apparatus Dec. 17, 2013
8603245 Systems and methods for sealing in site-isolated reactors Dec. 10, 2013
8603244 Vapor deposition device Dec. 10, 2013
8597430 Modular system and process for continuous deposition of a thin film layer on a substrate Dec. 3, 2013
8580332 Thin-film battery methods for complexity reduction Nov. 12, 2013
8574366 Vacuum processing apparatus Nov. 5, 2013
8562744 Coating device Oct. 22, 2013
8562275 Transfer device and semiconductor processing system Oct. 22, 2013
8547021 Plasma processing apparatus Oct. 1, 2013
8545630 Coating apparatus Oct. 1, 2013
8540844 Plasma confinement structures in plasma processing systems Sep. 24, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8524004 Loadlock batch ozone cure Sep. 3, 2013
8518183 Film deposition apparatus, substrate process apparatus, film deposition method, and computer readable storage medium Aug. 27, 2013
8512473 Substrate centering device and organic material deposition system Aug. 20, 2013
8491751 Plasma processing apparatus Jul. 23, 2013
8489237 High throughput method of in transit wafer position correction in a system using multiple robots Jul. 16, 2013
8486194 Apparatus for efficient removal of halogen residues from etched substrates Jul. 16, 2013
8470094 Apparatus for continuous coating Jun. 25, 2013
8465592 Film deposition apparatus Jun. 18, 2013
8465591 Film deposition apparatus Jun. 18, 2013
8465589 Machine and process for sequential multi-sublayer deposition of copper indium gallium diselenide compound semiconductors Jun. 18, 2013
8460468 Device for doping, deposition or oxidation of semiconductor material at low pressure Jun. 11, 2013
8460467 Vacuum processing apparatus Jun. 11, 2013
8454750 Multi-station sequential curing of dielectric films Jun. 4, 2013
8449678 Combinatorial process system May. 28, 2013
8444767 Coating device May. 21, 2013
8440018 Apparatus for supplying source and apparatus for deposition thin film having the same May. 14, 2013
8435350 Supply device May. 7, 2013
8435349 Epitaxial reactor for mass production of wafers May. 7, 2013
8434423 Substrate carrying apparatus having circumferential sidewall and substrate processing system May. 7, 2013
8431439 Thin film laminated body manufacturing apparatus and method Apr. 30, 2013
8430992 Protective self-aligned buffer layers for damascene interconnects Apr. 30, 2013

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